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Method and system for screening reliability of semiconductor circuits

  • US 5,617,038 A
  • Filed: 06/07/1995
  • Issued: 04/01/1997
  • Est. Priority Date: 07/07/1992
  • Status: Expired due to Term
First Claim
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1. A system for testing a semiconductor which includes a circuit having a plurality of transistors, said circuit further including a supply voltage node, a reference node and a substrate node, said system comprising:

  • circuitry for applying a supply voltage to said supply voltage node of said circuit;

    circuitry for applying a reference voltage to said reference node of said circuit;

    circuitry for applying a test voltage to said substrate node of said circuit;

    circuitry for measuring a current flowing to said supply node such that the current flowing to the supply node can be compared to a predetermined current criterion to obtain performance information about said circuit.

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