Method and system for screening reliability of semiconductor circuits
First Claim
1. A system for testing a semiconductor which includes a circuit having a plurality of transistors, said circuit further including a supply voltage node, a reference node and a substrate node, said system comprising:
- circuitry for applying a supply voltage to said supply voltage node of said circuit;
circuitry for applying a reference voltage to said reference node of said circuit;
circuitry for applying a test voltage to said substrate node of said circuit;
circuitry for measuring a current flowing to said supply node such that the current flowing to the supply node can be compared to a predetermined current criterion to obtain performance information about said circuit.
0 Assignments
0 Petitions
Accused Products
Abstract
A method and system for screening semiconductor circuits is disclosed herein. A circuit 50, such as an SOI circuit, is provided. The circuit includes a plurality of transistors and is coupled to a supply voltage node VDD, a reference node VSS, and a substrate node VSUB. A supply voltage is applied to the supply node while a reference voltage is applied to the reference node and a test voltage is applied to the substrate node. The current IDD flowing to the supply and/or reference node is then measured. These steps are repeated for a plurality of test circuits to determine at least one performance and/or reliability criterion. The steps can then be repeated to screen other circuits by comparing the measured current to the reliability limit(s).
-
Citations
5 Claims
-
1. A system for testing a semiconductor which includes a circuit having a plurality of transistors, said circuit further including a supply voltage node, a reference node and a substrate node, said system comprising:
-
circuitry for applying a supply voltage to said supply voltage node of said circuit; circuitry for applying a reference voltage to said reference node of said circuit; circuitry for applying a test voltage to said substrate node of said circuit; circuitry for measuring a current flowing to said supply node such that the current flowing to the supply node can be compared to a predetermined current criterion to obtain performance information about said circuit. - View Dependent Claims (2, 3, 4, 5)
-
Specification