X-ray thickness gauge

• US 5,619,548 A
• Filed: 08/11/1995
• Issued: 04/08/1997
• Est. Priority Date: 08/11/1995
• Status: Expired due to Term

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: Oryx Instruments and Materials Corp.
• Inventors: Koppel, Louis N.
• Primary Examiner(s): Wong, Don
• Application Number:
  US08/514,303
• Time in Patent Office: 606 Days
• Field of Search: 378/70, 378/71, 378/73, 378/84, 378/87, 378/86
• US Class Current: 378/70
• CPC Class Codes: G01B 15/02 for measuring thickness

Abstract

A monochromator positioned in the path of a plurality of X-rays to simultaneously impinge the plurality of X-rays onto a thin-film at various angles of incidence, typically greater than a critical angle ψ_c. The monochromator may be cylindrically or toroidally shaped, defining two focal areas with a source of X-rays positioned at the first focal point and a sample containing the thin-film layer positioned at the second focal point. A position sensitive detector is positioned to sense monochromatic X-rays reflected from the thin-film and produce a signal corresponding to both intensity and an angle of reflection of the monochromatic X-rays sensed. A processor is connected to receive signals produced by the detector to determine, as a function of intensity and angle of reflection of the monochromatic X-rays impinging on the detector, various properties of the structure of the thin-film layer, including the thickness, density and smoothness.

Claims

1. A device for measuring properties of a thin-film disposed on a layered structure using scattering X-rays, said device comprising:

a source adapted to produce X-rays;

a curved surface positioned between said source and said thin-film, with the surface being in fixed orientation with respect to the layered structure and adapted to focus the X-rays onto a first focal area of the layered structure with one point of said area having X-rays impinging thereon at varying angles of incidence, with a reflected X-ray being associated with each of said plurality of X-rays;

a detector positioned to sense said reflected X-rays, said detector adapted to produce a signal corresponding to an angle of reflection and an intensity of each of the reflected X-rays sensed; and

a processor means, connected to receive signals produced by the detector, for determining properties of the thin-film based upon a comparison of the intensity and the angle of reflection of the reflected X-rays sensed, the properties including thin-film thickness.

2. The device of claim 1 wherein the reflecting surface is a curved reflector.

3. The device of claim 1 wherein the reflecting surface is a curved monochromator.

4. The device of claim 1 wherein the reflecting surface is a curved monochromator having an ellipsoidal shape.

5. The device of claim 1 wherein the reflecting surface has a cylindrical shape, defining a second focal area, with the source positioned at the second focal area.

6. The device of claim 1 wherein the reflecting surface has a toroidal shape, defining a second focal area, with the source positioned at the second focal area.

7. The device of claim 1 wherein the detector is in a fixed rotational relationship with respect to said layered structure.

8. The device of claim 5 wherein the detector is a self-scanning diode array.

9. The device of claim 5 wherein the detector is a charge coupled device.

10. The device of claim 5 wherein the detector is a multiple-wire proportional counter.

11. The device of claim 5 wherein the detector is a multiple-anode microchannel detector.

12. The device of claim 5 wherein the detector is a photostimulated storage phosphor image detector.

13. The device of claim 5 wherein the varying angles of incidence are greater than a critical angle ψ

_c.

14. A device for measuring the structure of a thin-film disposed on a substrate, comprising:

an X-ray reflector defining a focal area proximate to the thin-film;

a source directing a plurality of X-rays onto the reflector, with the reflector directing the plurality of X-rays as a bundle of monochromatic X-rays onto said thin-film at a plurality of incident angles greater than the critical angle (ψ

_c), with each of the monochromatic X-rays reflecting from the thin-film at an angle of reflection corresponding to an angle of incidence, the reflector being a curved monochromator defining at least one focal point proximate to the substrate, whereby the curved monochromator simultaneously directs the plurality of X-rays onto the thin-film at varying angles of incidence;

a detector positioned to sense X-rays reflected from the thin-film along a plane transverse to the plane of the thin-film, the detector producing a signal corresponding to an intensity and a spatial position of the transverse X-ray in the plane, with each spatial position in the plane corresponding to an angle of reflection; and

a processor means connected to receive signals produced by the detector for determining physical properties of the thin-film based upon all signals received by the detector, the physical properties including the mass per unit area of the thin-film.

15. The device of claim 14 wherein the reflector has a cylindrical shape defining a second focal area, with the source positioned at the second focal area with said first focal area corresponding to a line lying in the plane of the thin-film.

16. The device of claim 14 wherein the reflector has a toroidal shape defining a second focal point, with the source positioned at the second focal point.

17. The device of claim 14 wherein the detector is positioned to sense X-rays reflected from the thin-film along a plane transverse to the plane of the thin-film, the detector further including means for producing a signal corresponding to both intensity and a spatial position of the X-ray in the plane.

18. The device of claim 16 wherein the detector is a self-scanning diode array.

19. The device of claim 16 wherein the detector is a charge coupled device.

20. The device of claim 16 wherein the detector is a self-scanning diode array.

21. The device of claim 16 wherein the detector is a charge coupled device.

22. The device of claim 16 wherein the detector is a multiple-wire proportional counter.

23. A device for measuring the properties of a thin-film disposed on a substrate, defining a substrate-thin-film interface, comprising:

a source of X-rays adapted to produce X-rays;

an X-ray reflector positioned in the path of the X-rays and adapted to simultaneously impinge onto at least one point of the thin-film a plurality of said X-rays at a plurality of incident angles with each of the plurality of X-rays reflecting from the thin-film at an angle of reflection, defining reflected X-rays with the angle of reflection corresponding to an angle of incidence;

a detector positioned to sense said reflected X-rays reflected from the thin-film and produce a signal corresponding to the intensity and an angle of reflection of the reflected X-rays sensed; and

a processor means connected to receive signals produced by the detector for determining properties of the thin-film based upon a comparison of the intensity and the angle of reflection of the reflected X-rays sensed, the properties including thin-film thickness, thin-film density and a relative smoothness between the surface of the thin-film and the smoothness of the substrate-thin-film interface.

24. The device of claim 23 wherein said detector and said interface are in a fixed rotational relationship with respect to each other.

25. The device of claim 23 wherein the monochromator is ellipsoidal defining first and second focal points, with the source positioned at the first focal point and the second focal point laying in the plane of the thin-film.

26. The device of claim 23 wherein the detector is positioned to sense monochromatic X-rays reflected from the thin-film along a plane transverse to the plane of the thin-film, the detector further including means for producing a signal corresponding to both intensity and a spatial position of the monochromatic X-ray in the plane.

27. The device of claim 26 wherein the detector is a self-scanning diode array.

28. The device of claim 26 wherein the detector is a charge coupled device.

29. The device of claim 26 wherein the detector is a self-scanning diode array.

30. The device of claim 26 wherein the detector is a charge coupled device.

31. The device of claim 26 wherein the detector is a multiple-wire proportional counter.