Spring-loaded mount for a rotatable sputtering cathode
First Claim
1. A rotating magnetron cathode apparatus, comprising:
- a cylindrical tubular structure with a first end which is rotatably supported and a second end which is distal from said first end;
a frontal dark space shield at said second end of said cylindrical tubular structure;
mounting means for rotatably mounting said frontal dark space shield onto said second end of said cylindrical tubular structure without electrical conduction therebetween and such that said frontal dark shield remains stationary while said cylindrical tubular structure rotates; and
said frontal dark space shield including a cylindrical tubular sleeve having an outer diameter less than a diameter of said cylindrical tubular structure.
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Accused Products
Abstract
A rotatable magnetron cathode has one end adapted to be attached to a drive shaft and a free end supported by a yoke suspended from spring-loaded supporting devices attached to a sputtering chamber wall. A dark space shield is attached to the cathode where the cathode connects to the drive shaft of its motor so as to rotate with the cathode. Another dark space shield is attached at the free end of the cathode with an insulator bearing in between such that the cathode can rotate without causing the shield at its front to also rotate. An insulator pad is placed between the yoke and a metal cover piece attached to the shield at the front so as to keep the frontal dark space shield in an electrically floating condition.
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Citations
21 Claims
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1. A rotating magnetron cathode apparatus, comprising:
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a cylindrical tubular structure with a first end which is rotatably supported and a second end which is distal from said first end; a frontal dark space shield at said second end of said cylindrical tubular structure; mounting means for rotatably mounting said frontal dark space shield onto said second end of said cylindrical tubular structure without electrical conduction therebetween and such that said frontal dark shield remains stationary while said cylindrical tubular structure rotates; and said frontal dark space shield including a cylindrical tubular sleeve having an outer diameter less than a diameter of said cylindrical tubular structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A rotating magnetron apparatus comprising:
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an evacuable chamber; a drive shaft; a cathode disposed inside said evacuable chamber having a first end detachably attached to said drive shaft and a second end distal from said first end; a frontal dark space shield at said second end of said cathode; spring loaded supporting means attached to a wall of said chamber for vertically supporting said second end of said cathode while allowing radial displacement of said second end; and mounting means for rotatably mounting said frontal dark space shield onto said cathode without electrical conduction therebetween. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A rotating magnetron apparatus comprising:
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an evacuable chamber; a drive shaft; a cathode disposed inside said evacuable chamber having a first end detachably attached to said drive shaft and a second end distal from said first end; and spring loaded supporting means attached to a wall of said chamber for vertically supporting said second end of said cathode while allowing radial displacement of said second end. - View Dependent Claims (19, 20)
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21. A rotating magnetron cathode apparatus, comprising:
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a cylindrical tubular structure with a first end that is rotatably supported and a second end that is distal from the first end; a frontal dark space shield including a circular disk part with an external surface and an externally protruding tubular part protruding from said external surface; a front flange having a base affixed to said cylindrical tubular structure at said second end and a cylindrical part protruding from said base; and a tubular insulator bearing disposed coaxially between said externally protruding tubular part of said frontal dark space shield and said cylindrical part of said front flange so that said frontal dark space shield is rotatably mounted at said second end.
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Specification