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Spring-loaded mount for a rotatable sputtering cathode

  • US 5,620,577 A
  • Filed: 01/24/1996
  • Issued: 04/15/1997
  • Est. Priority Date: 12/30/1993
  • Status: Expired due to Term
First Claim
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1. A rotating magnetron cathode apparatus, comprising:

  • a cylindrical tubular structure with a first end which is rotatably supported and a second end which is distal from said first end;

    a frontal dark space shield at said second end of said cylindrical tubular structure;

    mounting means for rotatably mounting said frontal dark space shield onto said second end of said cylindrical tubular structure without electrical conduction therebetween and such that said frontal dark shield remains stationary while said cylindrical tubular structure rotates; and

    said frontal dark space shield including a cylindrical tubular sleeve having an outer diameter less than a diameter of said cylindrical tubular structure.

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