Process and arrangement for producing dose profiles for the fabrication of structured surfaces
First Claim
1. In an arrangement for producing dose profiles for the fabrication of microlens arrays with a beam used for exposure and directed on a surface of a substrate, the improvement comprising:
- shaping means including a diaphragm assembly having a plurality of apertures for shaping the cross-section of a plurality of exposure beams, which shaping means generates a plurality of shaped beam cross-sections which are fixed relative to one another and movable relative to the surface and whose extents in the direction of the relative movement, in combination with the velocity of the relative movement, determines doses for a plurality of respective areas on said substrate, said apertures being arranged one behind the other in the direction of relative movement.
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Accused Products
Abstract
The object of a process and an arrangement for producing dose profiles for the fabrication of structured surfaces with a beam which is used for exposure and is directed on the surface consists in arranging the surface irradiation in such a way that the processing times and material outlay required for fabrication of micro-lenses and micro-lens arrays can be substantially reduced. According to the invention, the beam has at least one shaped region in cross section, which shaped region is movable relative to the surface and whose extent in the movement direction of the relative movement, in combination with the velocity of the relative movement, determines the dose. Effective lithographic fabrication of lens structures, in particular micro-lenses and micro-lens arrays, can be realized with the invention.
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Citations
14 Claims
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1. In an arrangement for producing dose profiles for the fabrication of microlens arrays with a beam used for exposure and directed on a surface of a substrate, the improvement comprising:
shaping means including a diaphragm assembly having a plurality of apertures for shaping the cross-section of a plurality of exposure beams, which shaping means generates a plurality of shaped beam cross-sections which are fixed relative to one another and movable relative to the surface and whose extents in the direction of the relative movement, in combination with the velocity of the relative movement, determines doses for a plurality of respective areas on said substrate, said apertures being arranged one behind the other in the direction of relative movement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
Specification