Hardware/software implementation for multipass E-beam mask writing

• US 5,621,216 A
• Filed: 04/26/1996
• Issued: 04/15/1997
• Est. Priority Date: 04/26/1996
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Enichen, William A., Hartley, John G., Clarke, Eileen V.
• Primary Examiner(s): Berman, Jack I.
• Assistant Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US08/638,410
• Time in Patent Office: 354 Days
• Field of Search: 250/492.22, 250/492.2, 250/398, 364/490, 364/491
• US Class Current: 250/492.22
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 1/68 Preparation processes not covered by groups G03F1/20 - G03F1/50
• CPC Class Codes: G03F 1/78 by charged particle beam [CPB], e.g. electron beam patterning of masks
• CPC Class Codes: H01J 37/3026 Patterning strategy
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography

Abstract

A process smooths the edges of rectangles written by an E-beam lithography system to improve critical dimension (CD) control in these shapes in the preparation of X-ray masks. The CD tolerances of X-ray masks are improved without the usual postprocessing costs normally associated with multipass solutions, thereby saving time and money when multipass writing is used in X-ray lithography. Two enhancements are provided to an X-ray mask maker that allow use of the same E-beam drive code for each exposure of a multipass write operation.

Claims

1. A multipass E-beam mask writing system with increased pattern fidelity comprising:

a data storage device storing pattern drive code, the same pattern drive code being used for each pass of a multipass exposure to write a mask;

a shape processor accessing the pattern drive code stored in said data storage device and outputting a rectangle position, rectangle dimensions, subfield boundary, and a rectangle exposure control data to an output buffer;

a shape divider receiving said rectangle position, said rectangle dimensions and said subfield boundary data from said output buffer and moving a boundary location of adjacent subfields between exposure passes resulting in better subfield stitch; and

a shape generator receiving said rectangle exposure control data from said output buffer and shifting a boundary location of spots within said rectangles between said exposure passes resulting in a smoother edge of an exposed pattern.

2. The multipass E-beam mask writing system recited in claim 1 wherein said shape divider dynamically defines said subfield boundaries between passes of said multipass write and said shape generator dynamically changes said rectangles between said exposure passes.

3. The multipass E-beam mask writing system recited in claim 2 further comprising a tool controller connected to said shape processor and wherein the subfield boundary data provided to said shape divider is loaded by said tool controller at the beginning of each exposure pass and wherein, based on said subfield boundary data, said tool controller dynamically changes said subfield definition.

4. The multipass E-beam mask writing system recited in claim 3 wherein said shape divider comprises:

comparators receiving said subfield boundary data and comparing the rectangle position data with the subfield boundary data to determine if the rectangle position data falls within said subfield boundaries; and

re-referencing means responsive to said comparators for re-referencing the rectangle position if the rectangle position falls outside said outside subfield boundaries.

5. The multipass E-beam writing system recited in claim 4 wherein said shape generator comprises:

spot allocation processing means for receiving said rectangle position and said rectangle dimensions data and calculating a spot position and a spot dimension; and

spot exposure processing means for receiving said rectangle exposure control data and calculating an exposure for the spot, said spot exposure processing means being responsive to said comparators for modifying a spot'"'"'s exposure when that spot'"'"'s position has crossed into an adjacent subfield to reflect that the spot must be exposed with reduced exposure since said spot will be exposed in two subfields.

6. A method of operating a multipass E-beam mask writing system with increased pattern fidelity comprising the steps of:

storing a pattern drive code, the same pattern drive code being used for each pass of a multipass exposure to write a mask;

accessing the pattern drive code and outputting rectangle position, a rectangle dimensions, a subfield boundary, and a rectangle exposure control data to an output buffer;

receiving said rectangle position, said rectangle dimensions and said subfield boundary data from said output buffer and moving a boundary location of adjacent subfields between exposure passes;

receiving said rectangle exposure control data and shifting a boundary location of spots within said rectangles between said exposure passes.

7. The method of operating a multipass E-beam mask writing system recited in claim 6 further comprising the steps of:

dynamically defining said subfield boundaries between passes of said multipass write; and

dynamically changing said rectangles between said exposure passes.