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Image recognition apparatus capable of inspecting height and method for inspecting height by using two slit incident beams of light

  • US 5,621,814 A
  • Filed: 10/21/1994
  • Issued: 04/15/1997
  • Est. Priority Date: 10/22/1993
  • Status: Expired due to Fees
First Claim
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1. An image recognition apparatus having a coordinate system associated therewith, the apparatus comprising:

  • illuminant means for emitting a flux of rays of light;

    slit means for converting the flux of rays of light into a combination of first and second slits of light parallel to each other and incident on an inspection object at a variable oblique angle, the first and second slits of light scanning the inspection object;

    image pickup means for picking up an image of first and second bright lines made by the first and second slits of light, respectively, on a surface region which the inspection object has in a local domain of the coordinate system; and

    image processing means for comparing and collating the picked-up image with a stored image representative of a pattern showing a presence and an absence of the first and second bright lines on the surface region of the inspection object in the local domain of the coordinate system so that, for a height of a convex shape on the surface region, a conformity is determined based on a broken one of the first and second bright lines and a discrimination is made between a first non-conformity due to the height of the convex shape being greater than a first height and a second non-conformity due to the height of the convex shape being less than a second height, based on an order in which the first and second bright lines are broken, as the first and second slits of light correspond to upper and lower limits of the conformity, respectively.

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