Chip-type piezoelectric-resonator and method of manufacturing the same

• US 5,623,236 A
• Filed: 01/25/1996
• Issued: 04/22/1997
• Est. Priority Date: 10/19/1992
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Yoshinaga, Takashi, Yonemura, Motohide
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): GAMBINO, DARUIS
• Application Number:
  US08/590,039
• Time in Patent Office: 453 Days
• Field of Search: 333/187-192, 310/344, 310/348, 29/25.35
• US Class Current: 333/187
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/1035 the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49172 by molding of insulating material
• CPC Class Codes: Y10T 29/49798 Dividing sequentially from leading end, e.g., by cutting or breaking
• CPC Class Codes: Y10T 29/4981 Utilizing transitory attached element or associated separate material

Abstract

In order to regularly properly define cavities for vibrating spaces in a chip-type piezoelectric-resonator which is protected with resin to be capable of surface mounting, a mother substrate comprising a piezoelectric substrate, a plurality of piezoelectric resonance elements formed thereon is prepared and bank-shaped adhesive layers are formed on respective major surfaces of the mother substrate to enclose the vibrating region, and mother sheets provided with plural cover sheets are arranged to cover both major surfaces of the mother substrate, thereby defining cavities for vibrating spaces. Then, protective resin members are applied to cover both major surfaces of the mother substrate, which in turn is divided to obtain a plurality of chip-type piezoelectric-resonators.

Claims

1. A chip-type piezoelectric-resonator comprising:

a piezoelectric resonance element including a piezoelectric substrate, vibrating electrodes that are opposite to each other through said piezoelectric substrate, and terminal electrodes that are connected with said vibrating electrodes, respectively;

peripheral walls of adhesive layers provided on respective major surfaces of said piezoelectric substrate so as to enclose a vibrating region of said piezoelectric resonance element;

cover sheets having outer and inner major surfaces, said inner major surfaces being arranged on respective said adhesive layers for defining cavities between the cover sheets and said vibrating region, each said cavity having a periphery and a thickness corresponding to a thickness of said respective adhesive layers thereby providing spaces for vibration of said vibrating region; and

protective resin members in contact with and extending into a space defined between said cover sheets and said major surfaces of said piezoelectric substrate outside said adhesive layers and along the entire periphery of each said cavity, said protective resin members thereby sealing said cavities.

2. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said cover sheets are made of an electrical insulating material.

3. A chip-type piezoelectric-resonator in accordance with claim 1 wherein said piezoelectric-resonator is generally parallelepiped in shape with a top surface, an opposing bottom surface and two pairs of opposing side surfaces, one opposing side surfaces being longer than the other pair of opposing pair of side surfaces, said terminal electrodes extending to at least one of said longer side surfaces, said piezoelectric-resonator further comprising:

external electrodes on at least said one longer side surface contacting said terminal electrodes.

4. A chip-type piezoelectric-resonator in accordance with claim 3, wherein said external electrodes are also on at least one of said top and bottom surfaces, and on said other longer side surface.

5. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said vibrating electrodes are located spaced inwardly from a periphery of said piezoelectric substrate.

6. A chip-type piezoelectric-resonator in accordance with claim 5, wherein said peripheral walls of adhesive layers extend continuously around said vibrating electrodes.

7. A chip-type piezoelectric-resonator in accordance with claim 6, wherein said peripheral walls of adhesive layers are spaced inwardly from said periphery of said piezoelectric substrate.

8. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said peripheral walls of adhesive layers are spaced inwardly from a periphery of said piezoelectric substrate.

9. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said peripheral walls of adhesive layers extend continuously around said vibrating electrodes.

10. A chip-type piezoelectric-resonator in accordance with claim 9, wherein said peripheral walls of adhesive layers are spaced inwardly from said periphery of said piezoelectric substrate.

11. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said resin members extend continuously around a periphery of said piezoelectric substrate.

12. A chip-type piezoelectric-resonator in accordance with claim 11, wherein said resin members extend continuously around said space defined between said cover sheets and said piezoelectric substrate.

13. A chip-type piezoelectric-resonator in accordance with claim 12, wherein said resin members extend continuously around said space defined between said periphery of said piezoelectric substrate and said peripheral walls of adhesive layers.

14. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said resin members extend continuously around said space defined between said cover sheets and said piezoelectric substrate.

15. A chip-type piezoelectric-resonator in accordance with claim 14, wherein said resin members extend continuously around said space defined between said periphery of said piezoelectric substrate and said peripheral walls of adhesive layers.

16. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said resin members extend continuously around said space defined between said periphery of said piezoelectric substrate and said peripheral walls of adhesive layers.

17. A chip-type piezoelectric-resonator in accordance with claim 1, wherein said protective resin members cover said outer major surfaces of said cover sheets.