Probe head for coordinate measuring apparatus with damping and clamping features

• US 5,623,766 A
• Filed: 07/05/1995
• Issued: 04/29/1997
• Est. Priority Date: 07/09/1994
• Status: Expired due to Term

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Ruck, Otto, Szenger, Franz
• Primary Examiner(s): Bennett, G. Bradley
• Application Number:
  US08/498,344
• Time in Patent Office: 664 Days
• Field of Search: 33/1 M, 33/556, 33/558, 33/559, 33/560, 33/561
• US Class Current: 33/561
• CPC Class Codes: F16F 15/035 by use of eddy or induced-current damping dynamo-electric brakes of the eddy-current type H02K49/04
• CPC Class Codes: G01B 21/045 Correction of measurements G01B9/02055 takes precedence
• CPC Class Codes: G01B 3/008 Arrangements for controlling the measuring force
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor

Abstract

The invention is directed to a probe head of the measuring type equipped with measuring force generators (15 to 17) for the generation of measuring forces of pregiven magnitude and direction. The probe head further includes a system for arresting or clamping the displaceable part 10 of the probe head in preselectable directions. The measuring force generators are arranged directly on the displaceable parts (4, 9, 10) of the guide units for the different deflection directions (x, y, z). The arresting or clamping system is implemented in the form of an electronic control circuit which applies a signal to the force generators (15 to 17) which is opposite to the deflection of the displaceable part 10. In addition, the probe head includes a system for damping the displaceable part. This damping system operates also on an electromagnetic basis with the aid of the measuring force generators configured as plunger coils.

Claims

1. A probe head for a coordinate measuring apparatus, the probe head comprising:

a displaceable part;

three measuring systems for measuring the deflections of said displaceable part in three different directions;

a guide system for holding said displaceable part so as to permit said displaceable part to deflect in said different directions;

the guide system including;

a first guide unit for permitting said part to deflect in a first one of said directions;

a second guide unit for permitting said part to deflect in a second one of said directions; and

, a third guide unit for permitting said part to deflect in a third one of said directions;

each one of said guide units including a measuring sensor for measuring the deflection in said one direction corresponding thereto;

each one of said guide units further including;

an electromagnetic force generator for generating a measuring force of predeterminable magnitude and direction;

a clamping device for clamping said displaceable part in said predeterminable direction;

said clamping device including a control circuit for applying a signal to said electromagnetic force generators opposite in direction to the deflection of said displaceable part; and

,

an electromagnetic damping device for said displaceable part.

2. The probe head of claim 1, said electromagnetic damping device including structure to permit said damping device to operate as an eddy current brake.

3. The probe head of claims 2, each of said electromagnetic force generators being a plunger coil having a solenoid body made of metal.

4. The probe head of claim 3, further comprising a cooling device for removing heat away from said the plunger coil.

5. The probe head of claim 4, said cooling device including tubes for conducting a coolant liquid therethrough and said tubes being connected to said solenoid body.

6. The probe head of claim 5, said electromagnetic damping device including an electronic control circuit for applying a signal to said electromagnetic force generators;

and, said signal being proportional to the velocity with which said displaceable part deflects and opposite to the direction in which said displaceable part is deflected.

7. The probe head of claim 6, said electromagnetic damping device having a damping characteristic;

and, said probe head further comprising a control processor for controlling the adjusting of said damping characteristic.

8. The probe head of claim 1, said control circuit of said clamping device having a control gain;

and, said probe head further including a control processor for adjusting said control gain.

9. The probe head of claim 1, wherein the coordinate measuring apparatus includes a control computer, the probe head further comprising a microprocessor for inputting measuring forces to each of said directions for adjusting the clamping forces in said predeterminable directions and for generating a velocity-dependent damping;

drive circuits connected to corresponding ones of said electromagnetic force generators;

said microprocessor having outputs connected to said drive circuits; and

, a data bus for connecting said microprocessor to said control computer.

10. The probe head of claim 1, wherein:

control signals for adjusting the measuring forces and the clamping forces and the damping are derived from said measuring systems; and

, each of said measuring systems is adapted to supply a probe signal proportional to the deflection of said displaceable part in the particular direction.