Precision motion stage with single guide beam and follower stage

• US 5,623,853 A
• Filed: 10/19/1994
• Issued: 04/29/1997
• Est. Priority Date: 10/19/1994
• Status: Expired due to Fees

• Current Assignee: Nikon Precision Incorporated (Nikon Corporation)
• Original Assignee: Nikon Precision Incorporated (Nikon Corporation)
• Inventors: Ebihara, Akimitsu, Novak, W. Thomas, Premji, Zahirudeen, Nayak, Uday G.
• Primary Examiner(s): Marmor, Charles A.
• Assistant Examiner(s): FENSTERMACHER, DAVID MORGAN
• Application Number:
  US08/325,740
• Time in Patent Office: 923 Days
• Field of Search: 74/490.09, 74/490.07, 74/490.13, 901/16
• US Class Current: 74/490.09
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
• CPC Class Codes: Y10T 74/20354 Planar surface with orthogonal movement only
• CPC Class Codes: Y10T 74/20378 Planar surface with orthogonal movement or rotation

Abstract

An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam. A cable follower stage moves in the Y direction on the follower stage and supports the cables connecting to the main stage, thereby reducing cable drag. An air circulation system is provided in the magnetic tracks on the follower stage to remove heat from operation of the electromagnetic motors. Air is removed from a central region of each track by a vacuum duct enhanced by air plugs fitting at the two ends of the motor coil assembly on the main stage to contain the air therein.

Claims

1. A stage mechanism, comprising:

a base;

at least one linear guide mounted on said base and extending along a first direction;

a movable linear beam elongated in a second direction perpendicular to the first direction and guided slidably by said at least one linear guide;

a stage assembly guided movably in the second direction by said linear beam and movable in the first direction with said linear beam;

a follower stage located adjacent said stage assembly and not contacting said main stage assembly and guided slidably by said at least one linear guide;

a stage drive motor having a first portion on said stage assembly and a second portion on said follower stage, for moving said stage assembly in the second direction; and

a follower drive motor for moving said follower stage in the first direction so as to follow movement of said stage assembly in the first direction with said linear beam.

2. The mechanism of claim 1, further comprising:

a beam drive motor having a first portion on said linear beam and a second portion on said base for moving said linear beam along said linear guide; and

a control system operatively connected to said follower drive motor and said beam drive motor for moving said follower stage and said linear beam synchronously along said linear guide in the first direction.

3. The mechanism of claim 1, further comprising at least one fluid bearing system provided between a side guide surface of said linear beam and said main stage assembly.

4. The mechanism of claim 1, wherein said follower stage is a rectangular frame structure which comprises:

a first and second member extending along the second direction along each side of said stage assembly;

a third and a fourth member, each connecting said first and second members and extending along the first direction, wherein the second portion of said stage drive motor is on each of said first and second members of said frame structure.

5. The mechanism of claim 1, further comprising:

a linear support portion disposed on said follower stage and extending along the second direction; and

a cable follower unit supported by said linear support and movable in the second direction, wherein said cable follower unit includes a cable fastener.

6. The mechanism of claim 5, further comprising:

a drive actuator operatively connected to said cable follower unit for moving said cable follower unit in the second direction; and

a cable follower control system operatively connected to said drive actuator to move said cable follower unit synchronously with said stage assembly in the second direction.

7. The mechanism of claim 1, further comprising a plurality of air bearings provided between an under surface of said stage assembly and a main surface of said base.

8. The mechanism of claim 1, further comprising:

a first fluid bearing system for supporting said main stage assembly on a main surface of said base;

a second fluid bearing system for supporting said linear beam on said main surface of said base; and

a third fluid bearing system for supporting said follower stage on said main surface of said base.

9. The mechanism of claim 1, wherein said movable linear beam extends through said stage assembly and the first portion of said stage drive motor is mounted in a side slot portion of said stage assembly, wherein said side slot portion is elongated along the second portion of said stage drive motor.

10. The mechanism of claim 9, wherein the second portion of said stage drive motor includes at least one magnetic track cooperating with the first portion of said stage drive motor, and said main stage assembly further comprises a ventilator duct connecting to said side slot portion.

11. The mechanism of claim 1, further comprising a first fluid bearing system provided between an end portion of said follower stage and said at least one linear guide.

12. The mechanism of claim 11, wherein said at least one linear guide includes first and second linear guides at each side of said follower stage and said movable linear beam, wherein said first fluid bearing system is provided between said follower stage and said first linear guide, and further comprising a second fluid bearing system provided between an end portion of said linear beam and said second linear guide.

13. The mechanism of claim 1, wherein said stage drive motor is an electro-magnetic linear motor having a coil assembly and a magnet assembly, and one of the first and second portions of said stage drive motor is the coil assembly and the other portion is the magnet assembly.

14. The mechanism of claim 1, wherein said linear beam includes a damping structure and is at least partly of ceramic material.

15. The mechanism of claim 1, wherein said main stage assembly is at least partly of ceramic material.

16. The mechanism of claim 1, further comprising a chuck mounted on said main stage assembly for supporting an object, wherein said chuck is at least partly of a ceramic material.

17. A movable apparatus comprising:

(a) a base structure having a flat principal surface;

(b) first and second linear guide members mounted on said base structure,

said first and second guide members being parallel to each other in an X direction and separated in a Y direction perpendicular to the X direction;

(c) a movable guide member located between said first and second linear guide members,

wherein said movable guide member is restricted by said first linear guide member and said flat principal surface of said base structure to move in the X direction;

d) a movable follower member located between said first and second linear guide members independently of said movable guide member,

wherein said follower member is restricted by said second linear guide member and said flat principal surface of said base structure to move in the X direction;

(e) a main stage member restricted by the movable guide member and said flat principal surface of said base structure to move in the Y direction without contacting said follower member; and

(f) an electro-magnetic force generator including a coil unit and a magnet unit to move said main stage member in the Y direction,

wherein one of said units is mounted on said main stage member and the other is mounted on said follower member, thereby maintaining a predetermined gap between said units in the X direction.

18. A movable apparatus comprising:

(a) a base structure having a base surface;

(b) a first linear guide member mounted on said base structure and elongated in an X direction;

(c) a second linear guide member mounted on said base structure and elongated in the X direction and separated from said first linear guide member in a Y direction perpendicular to the X direction;

(d) a first movable assembly located between said first and second linear guide members and having a guide surface elongated in the Y direction,

wherein said first movable assembly is guided by said first linear guide member and said base surface to move in the X direction;

(e) a main stage assembly guided by said first movable assembly and said base surface to move in the Y direction;

(f) a second movable assembly located between said first and second linear guide members and moving independently of said first movable assembly and said main stage assembly; and

driven to maintain a predetermined space from said main stage assembly in the X direction by synchronous movement with said first movable assembly,

wherein said second movable assembly is guided by said second linear guide member and said base surface; and

(g) a linear motor assembly disposed between said main stage assembly and said second movable assembly to move said main stage assembly in the Y direction.

19. A movable apparatus comprising:

a base structure having a flat principal surface;

a main stage assembly movable in a first and a second direction on said flat principal surface,

wherein said second direction is perpendicular to said first direction;

a cable bundle attached at one end to said main stage assembly and including at least a wire, an optical fiber, and a tube;

a cable follower stage assembly movable in the first and second directions on said flat principal surface, wherein a portion of said cable bundle is attached to said cable follower stage assembly; and

a control system operatively connected to an actuator of said first stage assembly and to an actuator of said cable follower stage assembly for moving said cable follower stage assembly synchronously to said main stage assembly in the first and second directions.

20. The apparatus of claim 19, further comprising a fluid bearing mounted on a surface of said cable follower stage assembly facing said flat principal surface of said base structure.

21. The apparatus of claim 19,

further comprising a follower stage assembly adjacent said main stage assembly, and movable in the first direction on said flat principal surface of said base structure;

wherein a drive motor is mounted on a first portion of said first stage assembly, and said cable follower stage assembly is connected to said drive motor,

and wherein a surface of said cable follower stage assembly is in slidable contact with a second portion of said main stage assembly.

22. A movable assembly having a fluid cooling system, and comprising:

a base structure;

a main stage assembly movable on said base structure and having a motor coil mounted on a portion of said first assembly;

a follower stage assembly also movable on said base structure to maintain a predetermined spacing from said main stage assembly and having a magnetic track mounted on a portion of said follower stage assembly, wherein said motor coil and magnetic track cooperatively are a linear drive motor;

an enclosure mounted on said main stage assembly and at least partially surrounding said magnetic track, thereby to retain fluid inside said enclosure; and

a duct extending along said main stage assembly adjacent said motor coil, and defining at least one opening adjacent said motor coil, thereby to receive fluid in the opening from a vicinity of said motor coil and vent the fluid from a distal end of said duct.

23. The movable assembly of claim 22, wherein said motor coil is mounted in an elongated recess on said main stage assembly;

and

further comprising a seal structure located at either end of said elongated recess, wherein each said seal structure substantially seals one end of the recess.

24. A mechanism comprising:

a base structure;

at least one guide member mounted on said base structure;

a movable beam of a ceramic material and in slidable engagement with said at least one guide member;

a main stage adjacent to said beam and moveable along said beam;

a follower assembly in slidable engagement with said at least one guide member, and located adjacent said main stage and spaced apart from said main stage and said movable beam;

a stage drive motor having a first portion mounted on said main stage and a second portion mounted on said follower assembly, for moving said main stage relative to said follower assembly; and

a first portion of a follower drive motor on said follower stage for moving said follower assembly relative to a second portion of said follower drive motor and oriented at an angle to said stage drive motor.

25. A mechanism comprising:

a base structure;

at least one guide member mounted on said base structure;

a movable beam in slidable engagement with said at least one guide member;

a main stage at least partly of ceramic material and adjacent to said beam and movable along said beam;

a follower assembly in slidable engagement with said at least one guide member, and located adjacent said main stage and spaced apart from said main stage and said movable beam;

a stage drive motor having a first portion mounted on said main stage and a second portion mounted on said follower assembly, for moving said main stage relative to said follower assembly; and

a first portion of a follower drive motor on said follower assembly for moving said follower assembly relative to a second portion of said follower drive motor and oriented at an angle to said stage drive motor.

26. A mechanism comprising:

a base structure;

at least one guide member mounted on said base structure;

a movable beam in slidable engagement with said at least one guide member;

a main stage adjacent to said beam and movable along said beam, wherein said main stage includes a chuck of a ceramic material;

a follower assembly in slidable engagement with said at least one guide member, and located adjacent said main stage and spaced apart from said main stage and said movable beam;

a stage drive motor having a first portion mounted on said main stage and a second portion mounted on said follower assembly, for moving said main stage relative to said follower assembly; and

a first portion of a follower drive motor on said follower stage for moving said follower stage relative to a second portion of said follower drive motor and oriented at an angle to said stage drive motor.

27. A scanning exposure apparatus for exposing a pattern of a reticle onto a substrate by moving the reticle and substrate simultaneously in a predetermined scanning direction during an exposure sequence, the apparatus comprising:

(a) a base structure having a Z direction guide surface;

(b) at least one fixed guide member provided on said base structure and having an X direction guide surface extending in an X direction perpendicular to the Z direction;

(c) a movable guide member having a Y direction guide surface extending in a Y direction perpendicular to the X and Z directions, to move in the X direction on said Z direction guide surface by restriction of the X direction guide surface of said fixed guide member;

(d) a movable main stage supported on said Z direction guide surface and holding the substrate, for moving in the Y direction by restriction of the Y direction guide surface of said movable guide member and moving in the X direction by the movement of said movable guide member;

(e) a movable follower stage system having at least one frame portion elongated in the Y direction and located adjacent to said main stage, for moving in the X direction on said Z direction guide surface so as to maintain a predetermined spacing in the X direction from said main stage when said main stage is moved in the X direction; and

(f) at least one linear motor provided between said main stage and the frame portion of said follower stage system, for moving said main stage in the Y direction;

wherein the scanning direction of said exposure sequence coincides with the Y direction and a cross scan direction coincides with the X direction.

28. The apparatus of claim 27, wherein said electromagnetic linear motor includes a coil assembly mounted on said main stage and a magnet assembly mounted on the frame portion of said follower stage system to generate force between said coil assembly and magnet assembly in the X direction.

29. The apparatus of claim 28, said follower stage system further comprising:

a measuring system for detecting a positional relationship between said main stage and the frame portion of said follower stage system in the Y direction; and

a drive assembly for actuating the frame portion of said follower stage system in accordance with the detected positional relationship, thereby to maintain said predetermined spacing in the X direction.

30. The apparatus of claim 29, wherein said fixed guide member includes a first fixed guide member mounted on said base structure for guiding said movable guide member in the X direction and a second fixed guide member mounted on said base structure for guiding said follower stage system in the X direction.

31. The apparatus of claim 28, wherein said follower stage system includes a first and a second frame portions which are parallel to one another, and said magnet assembly of said electro-magnetic linear motor includes a first and a second magnetic track respectively mounted on said first and second frame portions, wherein said main stage is arranged between said first and second frame portions, and said coil assembly of said electro-magnetic linear motor includes a first and a second coil units respectively cooperating with said first and second magnetic tracks.

32. The apparatus of claim 31, wherein at least one of said first and second frame portions of said follower stage system includes an exhaust structure for exhausting fluid through the magnetic track.