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High-density circuit and method of its manufacture

  • US 5,624,708 A
  • Filed: 10/31/1994
  • Issued: 04/29/1997
  • Est. Priority Date: 01/05/1988
  • Status: Expired due to Term
First Claim
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1. A method of making a substrate for an electronic circuit, the method comprising the steps of:

  • a) selecting a ceramic material for use as a base material for the substrate,b) grinding and polishing the ceramic material,c) cleaning the ceramic material,d) selecting a dielectric material which has a melting temperature greater than about 850°

    C., the dielectric material including organic impurities, and coating the ceramic material with a layer of the dielectric material,e) heating the ceramic and dielectric materials to a first temperature sufficient, and for a time sufficient, to drive off the organic impurities in the dielectric material,f) heating the ceramic and dielectric materials to a second temperature sufficient to allow the dielectric material to flow, the second temperature being greater than the first temperature, andg) cooling the ceramic and dielectric materials to form a product which has a smooth surface having a deviation of not more than about 5 microns per inch, which is capable of accepting a thin film layer, and which is capable of being etched with a line density of at least about 200 lines per inch.

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