Heated pressure transducer assembly

• US 5,625,152 A
• Filed: 01/16/1996
• Issued: 04/29/1997
• Est. Priority Date: 01/16/1996
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Thomas, Frank W., DeMone, Archibald J., Blankenship, Steven D., Pandorf, Robert C.
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/585,535
• Time in Patent Office: 469 Days
• Field of Search: 73/756, 73/724, 73/700, 73/753, 73/715, 73/723-728
• US Class Current: 73/756
• CPC Class Codes: G01L 19/0092 Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 19/14 Housings G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

The disclosed heated pressure transducer includes an external enclosure, a first thermal shell housed within the external enclosure, and a sensor housed within the first thermal shell. The transducer further includes a heater for heating the first thermal shell and a control unit for controlling the heater. A tube couples the sensor to a source of heated, pressurized gas and the transducer may further include a tube-heater that is controlled by the control unit for applying heat to the tube. The transducer may also include a second thermal shell housed within the external enclosure with at least a portion of the control unit being housed within the second thermal shell. A heater that is controlled by the control unit may be disposed proximal to the second thermal shell for heating that shell. An auxiliary heater disposed within the first thermal shell for heating the sensor may also be included. Two thermistors may also be included for measuring the temperature of the sensor and the first thermal shell.

Claims

1. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a pressure sensor, disposed in one portion of said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port;

(C) controller means, disposed in another portion of said interior cavity, for sensing the parameter value and for generating in response thereto an output signal representative of the pressure at said input port;

(D) first temperature control means for controlling the temperature of said sensor;

(E) second temperature control means for controlling the temperature of said controller means; and

(F) thermal control means for controlling said first temperature control means to control the temperature of said sensor at a first preselected temperature, and for controlling said second temperature control means to control the temperature of said controller means at a second preselected temperature different from the first preselected temperature.

2. A pressure transducer assembly according to claim 1, further comprising a first thermal shell disposed within said external enclosure, said sensor being disposed within said first thermal shell.

3. A pressure transducer assembly according to claim 2, wherein said first temperature control means comprises a heater disposed proximal to said first thermal shell.

4. A pressure transducer assembly according to claim 3, further comprising a second thermal shell disposed within said external enclosure, at least a portion of said controller means being disposed within said second thermal shell.

5. A pressure transducer assembly according to claim 4, wherein said second temperature control means comprises a heater disposed proximal to said second thermal shell.

6. A pressure transducer assembly according to claim 1, said external enclosure including at least one aperture proximal to said controller means.

7. A pressure transducer assembly according to claim 1, further comprising a thermal shunt disposed within said external enclosure between said controller means and said sensor.

8. A pressure transducer assembly according to claim 1, wherein said external enclosure includes a first compartment and a second compartment, said sensor being disposed within said first compartment and said controller means being disposed within said second compartment, said assembly further including means for thermally isolating said first and second compartments.

9. A pressure transducer assembly according to claim 8, wherein said means for thermally isolating said first and second compartments includes a thermal shunt disposed therebetween.

10. A pressure transducer assembly according to claim 8, further including standoff means for fixing said first compartment relative to said second compartment.

11. A pressure transducer assembly according to claim 10, wherein said standoff means comprises thermally insulating material.

12. A pressure transducer assembly according to claim 8, said first compartment being spaced apart from said second compartment.

13. A pressure transducer assembly according to claim 1, said first temperature control means including means for maintaining said sensor substantially in thermal equilibrium at said first preselected temperture.

14. A pressure transducer assembly according to claim 1, said second temperature control means including means for maintaining at least a portion of said controller means substantially in thermal equilibrium at said second preselected temperature.

15. A pressure transducer assembly comprising:

(A) an enclosure defining an interior cavity;

(B) a first heater and a second heater;

(C) a pressure sensor, disposed in one portion of said interior cavity proximal to said first heater and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port; and

(D) a control unit, disposed in another portion of said interior cavity proximal to said second heater, including signal conditioning means for sensing the parameter value and for generating in response thereto an output signal representative of the pressure at said input port and said control unit including thermal control means for controlling said first heater so as to control the temperature of said sensor at a first preselected temperature, and for controlling said second heater so as to control the temperature of said control unit at a second preselected temperature different from the first preselected temperature.

16. A pressure transducer assembly comprising:

(A) an external enclosure, including an aperture, for defining an interior cavity;

(B) a pressure sensor, disposed in said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port;

(C) a tube for defining a conduit for the vapor or gas to said input port of said sensor, said tube extending through said aperture and having a first end coupled to the input port of the sensor and a second end positioned outside the enclosure;

(D) first temperature control means for controlling the temperature of said sensor;

(E) second temperature control means for controlling the temperature of said tube, said second temperature control means including means, proximal to and in thermal contact with at least a portion of the section of the tube extending between said first end and said aperture, for providing heat transfer with said tube; and

(F) controller means for controlling said first and second temperature control means, said controller means being disposed within said interior cavity.

17. A pressure transducer assembly according to claim 16, wherein said means for providing heat transfer includes a tube-clamp clamped to said portion of said tube.

18. A pressure transducer assembly according to claim 17, wherein said second temperature control means further includes a tube-heater proximal to said tube-clamp for heating said tube-clamp.

19. A pressure transducer assembly according to claim 17, wherein said tube-clamp comprises thermally conductive material.

20. A pressure transducer assembly according to claim 17, wherein said external enclosure comprises a plate, and wherein said plate defines said aperture.

21. A pressure transducer assembly according to claim 20, further comprising fastening means for fastening said tube-clamp so as to be spaced apart from said plate.

22. A pressure transducer assembly according to claim 21, wherein said fastening means comprises thermally insulating material so as to thermally insulate said plate from said tube clamp.

23. A pressure transducer according to claim 21, wherein said fastening means fastens said tube-clamp relative to said plate such that there is a gap between said tube-clamp and said plate.

24. A pressure transducer assembly according to claim 21, wherein said tube-clamp includes a collar that extends through said aperture between said tube and said plate.

25. A pressure transducer assembly according to claim 24, wherein said aperture is larger than the collar so that there is a gap between said plate and said collar when said fastening means fastens said tube-clamp relative to said plate.

26. A pressure transducer assembly according to claim 20, said plate including a first region and a second region, said first region being disposed around and proximal to said aperture, said first region having a higher thermal resistance than said second region.

27. A pressure transducer assembly according to claim 20, said plate including a first region and a second region, said first region being disposed around and proximal to said aperture, said first region being thinner than said second region.

28. A pressure transducer assembly according to claim 17, wherein said tube-clamp includes a central aperture and wherein said tube extends through said central aperture of said tube-clamp.

29. A pressure transducer assembly according to claim 28, said tube-clamp including means for expanding and contracting said central aperture between an open position and a closed position, said tube being slidable through said tube-clamp when said central aperture is in said open position, and said tube-clamp clamping said tube when said central aperture is in said closed position.

30. A pressure transducer assembly comprising:

(A) an enclosure, including an aperture, for defining an interior cavity;

(B) a pressure sensor, disposed in said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port;

(C) a tube for defining a conduit for the vapor or gas to said input port of said sensor, said tube extending through said aperture and having a first end coupled to the input port of the sensor and a second end positioned outside the enclosure, said tube being smaller than said aperture so that there is a gap between said tube and said aperture and so that said tube does not contact said enclosure.

31. A pressure transducer assembly according to claim 30, further comprising insulation disposed around said tube, said insulation extending through said aperture.

32. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a thermal shell, disposed within said interior cavity, for defining a sensor cavity;

(c) a pressure sensor, disposed within said sensor cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of said gas or vapor at said input port;

(D) means for coupling pressurized gas or vapor to said input port;

(E) temperature control means for controlling the temperature of said thermal shell, said temperature control means including means disposed proximal to said thermal shell for providing heat transfer with said thermal shell; and

(F) auxiliary heater means disposed in said sensor cavity proximal to said sensor for heating said sensor.

33. A pressure transducer assembly according to claim 32, further comprising controller means for controlling said temperature control means and said auxiliary heater means.

34. A pressure transducer assembly according to claim 33, said controller means including means for sensing an initial power up condition of said transducer.

35. A pressure transducer assembly according to claim 34, wherein said controller means activates said auxiliary heater means for a first time interval following an initial power up condition of said transducer assembly.

36. A pressure transducer assembly according to claim 35, wherein said controller means controls said temperature control means so as to bring said sensor into thermal equilibrium at a desired operating temperature following said first time interval.

37. A pressure transducer assembly according to claim 34, further including temperature sensing means for sensing the temperature of said sensor.

38. A pressure transducer assembly according to claim 37, wherein said controller means includes means, responsive to said temperature sensing means, for activating said auxiliary heater means following an initial power up condition of said transducer assembly until the temperature of said sensor reaches a first preselected temperature.

39. A pressure transducer assembly comprising:

(A) an enclosure defining an interior cavity;

(B) a thermal shell, disposed within said interior cavity, for defining a sensor cavity;

(C) a pressure sensor, disposed in said sensor cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at said input port;

(D) means for coupling a source of said gas or vapor to said input port;

(E) first temperature sensitive means for measuring the temperature of said thermal shell;

(F) second temperature sensitive means for measuring the temperature of said sensor; and

(G) controller means, responsive to said first and second temperature sensitive means, for controlling the temperature of said thermal shell as a function of the temperature of said thermal shell and the temperature of said sensor.

40. A pressure transducer assembly according to claim 39, wherein said first temperature sensitive means comprises a first thermistor, and wherein said second temperature sensitive means comprises a second thermistor.

41. A pressure transducer assembly according to claim 40, wherein said first and second thermistors are coupled together in series between said controller means and an electrical reference potential.

42. A pressure transducer assembly according to claim 41, said first thermistor being characterized by a first temperature coefficient and said second thermistor being characterized by a second temperature coefficient, said second temperature coefficient being larger than said first temperature coefficient.

43. A pressure tranducer assembly according to claim 39, said controller means comprising a heater disposed proximal to said thermal shell.

44. A pressure transducer assembly according to claim 39, wherein said first and second temperature sensitive means are selected from a group consisting of thermistors, resistance temperature devices, and thermocouples.

45. A pressure transducer assembly according to claim 39, wherein said controller means controls the temperature of said thermal shell so that an average of the temperatures of the thermal shell and the sensor is substantially equal to a desired operating temperature.

46. A pressure transducer assembly according to claim 39, wherein said controller means controls the temperature of said thermal shell so that a weighted average of the temperatures of the thermal shell and the sensor is substantially equal to a desired operating temperature.

47. A pressure transducer assembly comprising:

(A) an external enclosure defining an interior cavity;

(B) a pressure sensor, disposed in one portion of said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port;

(C) controller means, disposed in another portion of said interior cavity, for sensing the parameter value and for generating in response thereto an output signal representative of the pressure at said input port;

(D) first temperature control means for maintaining said sensor substantially in thermal equilibrium at a first preselected temperature; and

(E) second temperature control means for maintaining at least a portion of said controller means substantially in thermal equilibrium at a second preselected temperature different from the first preselected temperature.

48. A pressure transducer assembly according to claim 47, said first temperature control means comprising a first thermal shell disposed within said external enclosure, said sensor being disposed within said first thermal shell.

49. A pressure transducer assembly according to claim 48, said first thermal shell comprising thermally conductive material.

50. A pressure transducer assembly according to claim 49, said first temperature control means comprising a first heater disposed proximal to said first thermal shell.

51. A pressure transducer assembly according to claim 50, said second temperature control means comprising a second thermal shell disposed within said external enclosure, said portion of said controller means being disposed within said second thermal shell.

52. A pressure transducer assembly according to claim 51, said second thermal shell comprising thermally conductive material.

53. A pressure transducer assembly according to claim 52, said second temperature control means comprising a second heater disposed proximal to said second thermal shell.

54. A pressure transducer assembly according to claim 53, said controller means including means for controlling said first and second heaters.

55. A pressure transducer assembly comprising:

(A) an external enclosure, including an aperture, for defining an interior cavity;

(B) a pressure sensor, disposed in said interior cavity and including an input port for receiving a gas or vapor, for sensing the pressure of the gas or vapor at the input port as a function of a parameter value that varies according to the pressure of the gas or vapor at the input port;

(C) a tube for defining a conduit for the vapor or gas to said input port of said sensor, said tube extending through said aperture and having a first end coupled to the input port of the sensor and a second end positioned outside the external enclosure;

(D) first temperature control means for controlling the temperature of said sensor;

(E) second temperature control means for controlling the temperature of said tube, said second temperature control means including means, proximal to and in thermal contact with at least a portion of the tube, for providing heat transfer with said tube; and

(F) controller means for controlling said first and second temperature control means, said controller means being disposed within said interior cavity.