Apparatus for simultaneously measuring the thickness of, and the optical intensity transmitted through, a sample body
First Claim
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1. Apparatus for measuring the thickness t and the intensity I of light emerging from a first major surface of a sample solid body, having first and second opposing major planar surfaces, comprising:
- (a) a source of optical radiation for directing a beam of optical radiation on a first portion of said second major surface of the sample body, said source of radiation comprising a light source, a mirror and a hollow chamber enclosing said mirror, said chamber having a planar exterior surface for supporting said second major surface of said sample body, a first aperture for permitting a light beam from said light source to shine on said mirror and a second aperture in said planar exterior surface for permitting exit of a beam reflected by said mirror onto said sample body;
(b) an optical detector located on a second portion of the first major surface of the sample body, the second portion being the first major surface being located opposed to the first portion of the second major surface; and
(c) a thickness measuring device comprising a differential displacement transformer located on the optical detector.
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Abstract
A portion of a surface of a sample body is arranged to receive an incident optical beam having an optical intensity I0. On an opposing surface of the sample body is located an optical detector which senses the intensity I of the resulting optical radiation emerging from the opposing surface of the sample body. In order to measure the thickness t of the sample body, a thickness gauge is located either at another portion of the surface of the sample body or on the optical detector.
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Citations
2 Claims
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1. Apparatus for measuring the thickness t and the intensity I of light emerging from a first major surface of a sample solid body, having first and second opposing major planar surfaces, comprising:
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(a) a source of optical radiation for directing a beam of optical radiation on a first portion of said second major surface of the sample body, said source of radiation comprising a light source, a mirror and a hollow chamber enclosing said mirror, said chamber having a planar exterior surface for supporting said second major surface of said sample body, a first aperture for permitting a light beam from said light source to shine on said mirror and a second aperture in said planar exterior surface for permitting exit of a beam reflected by said mirror onto said sample body; (b) an optical detector located on a second portion of the first major surface of the sample body, the second portion being the first major surface being located opposed to the first portion of the second major surface; and (c) a thickness measuring device comprising a differential displacement transformer located on the optical detector. - View Dependent Claims (2)
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Specification
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Current AssigneeLucent Technologies, Inc. (Nokia Corporation)
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Original AssigneeLucent Technologies, Inc. (Nokia Corporation)
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InventorsGraebner, John E., Jin, Sungho
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Primary Examiner(s)McGraw, Vincent P.
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Application NumberUS08/509,410Time in Patent Office638 DaysField of Search356/72, 356/73, 356/440US Class Current356/72CPC Class CodesG01N 21/59 Transmissivity G01N21/25 ta...
