Trench method for three dimensional chip connecting during IC fabrication

• US 5,627,106 A
• Filed: 05/06/1994
• Issued: 05/06/1997
• Est. Priority Date: 05/06/1994
• Status: Expired due to Fees

• Current Assignee: United Microelectronics Corporation
• Original Assignee: United Microelectronics Corporation
• Inventors: Hsu, Chen-Chung
• Primary Examiner(s): Fourson, George
• Assistant Examiner(s): EVERHART, CARIDAD
• Application Number:
  US08/239,281
• Time in Patent Office: 1,096 Days
• Field of Search: 437/203, 437/915, 437/208, 437/209, 148/DIG. 164
• US Class Current: 438/459
• CPC Class Codes: H01L 21/76898 formed through a semiconductor substrate
• CPC Class Codes: H01L 2224/13009 Bump connector integrally formed with a via connection of the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/8114 Guiding structures outside the body
• CPC Class Codes: H01L 2225/06513 Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
• CPC Class Codes: H01L 2225/06541 Conductive via connections through the device, e.g. vertical interconnects, through silicon via [TSV] manufacturing via connections per se H01L21/76898
• CPC Class Codes: H01L 25/0657 Stacked arrangements of devices
• CPC Class Codes: H01L 25/50 Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00 H01L21/50 takes precedence

Abstract

A new method of connecting three-dimensional integrated circuit chips using trench technology is described. Semiconductor device structures are provided in and on the top side of a semiconductor substrate of a first and a second three-dimensional integrated circuit chip. Deep trenches are etched into the first semiconductor substrate. A conductive material is deposited into the trenches. An insulating material is deposited over the surface of the substrate, polished and planarized. The bottom side of the first semiconductor substrate is ground, polished, and selectively etched so that the deep trenches form protrusions from the bottom surface. A passivation layer and a polyimide layer are deposited on the bottom surface of the first semiconductor substrate and etched away around the protrusions. A passivation layer and a polyimide layer are deposited over the top surface of the second semiconductor substrate. Connection windows are etched through the two layers to the top conducting surface of the second semiconductor substrate. The first and second integrated circuits are aligned so that the protrusions on the bottom surface of the first integrated circuit chip fit into the connection windows in the top surface of the second integrated circuit chip. The polyimide layer on the bottom surface of the first integrated circuit contacts the polyimide layer on the top surface of the second integrated circuit completing the connection between the two chips.

Claims

1. The method of connecting two three-dimensional integrated circuit chips comprising:

providing semiconductor device structures in and on the top side of a semiconductor substrate of a first and a second three-dimensional integrated circuit chip;

preparing said first integrated circuit chip for connection as follows;

etching deep trenches into said first semiconductor substrate;

depositing an insulating film over the entire surface of said first semiconductor substrate and within said deep trenches;

selectively etching away said insulating film from the bottom of said trenches;

depositing a conductive material into said trenches;

depositing an isolation material over the surface of said insulating film and polishing and planarizing said isolation material;

grinding, polishing, and selectively etching the bottom side of said first semiconductor substrate wherein said deep trenches form protrusions from said bottom surface of said first semiconductor substrate;

depositing a bottom passivation layer on said bottom surface of said first semiconductor substrate;

etching away said bottom passivation layer around said protrusions;

depositing a polyimide coating over the surface of said bottom passivation layer; and

etching away said polyimide coating around said protrusions completing preparation of said first integrated circuit for connection;

preparing said second integrated circuit chip for connection as follows;

depositing a passivation layer over the top surface of said second semiconductor substrate;

depositing a polyimide coating over said passivation layer; and

etching through said polyimide and said passivation layers to said top conducting surface of said second semiconductor substrate to provide connection windows for said connection completing preparation of said second integrated circuit for connection;

aligning said first and second integrated circuits wherein said protrusions on said bottom surface of said first integrated circuit chip fit into said connection windows in said top surface of said second integrated circuit chip and wherein said polyimide layer on said bottom surface of said first integrated circuit contacts said polyimide layer on said top surface of said second integrated circuit; and

completing said connection between said two three-dimensional integrated circuit chips.

2. The method of claim 1 wherein said first integrated circuit chip is a subordinate chip and wherein said second integrated circuit chip is a master chip.

3. The method of claim 1 wherein said semiconductor device structures include gate electrodes and source and drain regions.

4. The method of claim 1 wherein said deep trenches extend greater than 10 microns into the surface of said first semiconductor substrate.

5. The method of claim 1 wherein said deep trenches have a width of between about 20 to 50 microns.

6. The method of claim 1 wherein said insulating film is composed of silicon dioxide and is deposited by atmospheric pressure chemical vapor deposition (APCVD) to a thickness of between about 2500 to 3000 Angstroms.

7. The method of claim 1 wherein said conductive material is tungsten.

8. The method of claim 1 wherein said isolation material is silicon dioxide and wherein said isolation material is polished using Chemical Mechanical Polishing.

9. The method of claim 1 wherein after said isolation material has been planarized, a sacrificial semiconductor chip composed of a thermal oxide layer grown on the surface of a silicon substrate is bonded to said first integrated circuit chip wherein said thermal oxide layer of said sacrificial semiconductor chip bonds to said isolation material of said first integrated circuit chip and wherein said sacrificial integrated circuit chip allows for ease of handling of said first integrated circuit chip.

10. The method of claim 9 wherein after said two three-dimensional integrated circuit chips have been connected, said silicon substrate and said thermal oxide layer of said sacrificial semiconductor chip are ground and polished away leaving said isolation material as the top layer of said first integrated circuit chip.

11. The method of claim 1 wherein said protrusions protrude from the bottom side of said first semiconductor substrate by between about 5 to 6 microns.

12. The method of claim 1 wherein said bottom passivation layer is composed of silicon dioxide and is deposited by plasma enhanced chemical vapor deposition (PECVD) to a thickness of between about 8000 to 12,000 Angstroms.

13. The method of claim 1 wherein said polyimide layer is coated to a thickness of between about 15,000 to 20,000 Angstroms.

14. The method of claim 1 wherein said passivation layer deposited on top surface of said second semiconductor substrate is composed of phosphosilicate glass and is deposited to a thickness of between about 8000 to 12,000 Angstroms.

15. The method of claim 1 wherein said passivation layer deposited on top surface of said second semiconductor substrate is composed of silicon nitride and is deposited to a thickness of between about 8000 to 12,000 Angstroms.

16. The method of claim 1 wherein said polyimide layer is deposited on said top surface of said second semiconductor substrate to a thickness of between about 15,000 to 20,000 Angstroms.

17. The method of claim 1 wherein said first and second integrated circuits are aligned using infrared microscopy.

18. The method of claim 1 wherein said first and second integrated circuits are connected by thermal compression of about 190 kg/cm2 and heating said integrated circuits to 400°

C.

19. The method of claim 1 wherein after said first and second integrated circuit chips have been connected, a metal layer is deposited over the surface of said first integrated circuit chip and wherein said connected integrated circuit chip can be prepared to be connected to a third integrated circuit chip wherein said connected integrated circuit chip will be prepared for connection as was said second integrated circuit chip described hereabove.

20. The method of claim 19 wherein said metal layer is composed of aluminum deposited to a thickness of between about 8000 to 10,000 Angstroms.

21. The method of connecting two-three dimensional integrated circuit chips comprising:

providing semiconductor device structures in and on the top side of a semiconductor substrate of a first and a second three-dimensional integrated circuit chip wherein said semiconductor device structures include gate electrodes and source and drain regions;

forming protrusions of a conductive material protruding from the bottom surface of said first integrated circuit chip wherein said bottom surface between said protrusions is covered with a passivation layer covered with polyimide coating, said protrusion formed by;

etching deep trenches into said first semiconductor substrate,

depositing an insulating film over the entire surface of said first semiconductor substrate and within said deep trenches,

selectively etching away said insulating film from the bottom of said trenches,

depositing a conductive material into said trenches,

depositing an isolation material over the surface of said insulating film and planarizing said isolation material, and

removing a portion of said first semiconductor substrate so that said deep trenches form said protrusions;

covering the top conductive surface of said second integrated circuit chip with a polyimide layer wherein said polyimide layer is deposited over a passivation layer;

opening connection windows through said polyimide and said passivation layers to said top conductive surface of said second integrated circuit chip wherein said connection windows of said second integrated circuit chip correspond to said protrusions on said first integrated circuit chip; and

aligning said first and second integrated circuit chips wherein said protrusions on said bottom surface of said first integrated circuit chip fit into said connection windows and contact said conductive surface of said second integrated circuit chip and wherein said polyimide layer on said bottom surface of said first integrated circuit contacts said polyimide layer on said top surface of said second integrated circuit.

22. The method of claim 21 wherein said first integrated circuit chip is a subordinate chip and wherein said second integrated circuit chip is a master chip.

23. The method of claim 21 wherein said deep trenches extend greater than 10 microns into the surface of said first semiconductor substrate.

24. The method of claim 21 wherein said deep trenches have a width of between about 20 to 50 Angstroms.

25. The method of claim 21 wherein said insulating film is composed of silicon dioxide and is deposited to a thickness of between about 2500 to 3000 Angstroms.

26. The method of claim 21 wherein said conductive material is tungsten.

27. The method of claim 21 wherein said isolation material is silicon dioxide and wherein said isolation material is polished using Chemical Mechanical Polishing.

28. The method of claim 21 wherein said protrusions protrude from the bottom side of said first semiconductor substrate by between about 5 to 6 microns.

29. The method of claim 21 wherein said polyimide layer on said bottom surface of said first integrated circuit is coated to a thickness of between about 8000 to 12,000 Angstroms.

30. The method of claim 21 wherein said polyimide layer deposited on top surface of said second integrated is coated to a thickness of between about 8000 to 12,000 Angstroms.

31. The method of claim 21 wherein said first and second integrated circuits are aligned using infrared microscopy.

32. The method of claim 21 wherein said first and second integrated circuits are connected by thermal compression of about 190 kg/cm2 and heating said integrated circuits to 400°

C.

33. The method of connecting two three-dimensional integrated circuit chips comprising:

providing semiconductor device structures in and on the top side of a semiconductor substrate of a first and a second three-dimensional integrated circuit chip wherein said semiconductor device structures include gate electrodes and source and drain regions;

forming protrusions of a conductive material protruding from the bottom surface of said first integrated circuit chip comprising the steps of;

etching deep trenches into said first semiconductor substrate;

depositing an insulating film over the entire surface of said first semiconductor substrate and within said deep trenches;

selectively etching away said insulating film from the bottom of said trenches;

depositing a conductive material into said trenches;

depositing an isolation material over the surface of said insulating film and polishing and planarizing said isolation material; and

grinding, polishing, and selectively etching the bottom side of said first semiconductor substrate wherein said deep trenches form said protrusions from said bottom surface of said first semiconductor substrate;

covering said bottom surface between said protrusions with a passivation layer covered with a polyimide coating;

covering the top conductive surface of said second integrated circuit chip with a polyimide layer wherein said polyimide layer is deposited over a passivation layer;

opening connection windows through said polyimide and said passivation layers to said top conductive surface of said second integrated circuit chip wherein said connection windows of said second integrated circuit chip correspond to said protrusions on said first integrated circuit chip;

aligning said first and second integrated circuit chips wherein said protrusions on said bottom surface of said first integrated circuit chip fit into said connection windows and contact said conductive surface of said second integrated circuit chip and wherein said polyimide layer on said bottom surface of said first integrated circuit contacts said polyimide layer on said top surface of said second integrated circuit; and

completing said connection between said two three-dimensional integrated circuit chips by thermal compression of about 190 kg/cm² and heating said integrated circuit chips to 400°

C.