Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe
First Claim
1. A scanning near-field optic/atomic force microscope comprising:
- a probe made of a light-propagating body for scanning above a sample to observe a topography and optical characteristics thereof;
vibration means for vibrating a distal end of the probe and the sample relative to one another;
a light source for generating a radiating light onto the sample;
optical modulating means for modulating an amplitude of the radiating light in synchronism with a vibrating position of the distal end of the probe;
a phase shifter for modifying a phase and/or an intermittent rate of the radiating light of the optical modulating means;
displacement detection means for optically detecting displacement of the probe;
a photoelectric converter and optical system for detecting light from the sample; and
a rough-motion mechanism and a fine-motion mechanism for moving the sample and the probe relative to each other.
2 Assignments
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Accused Products
Abstract
A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate of the optical modulator are adjusted by a phase shifter. A sample characteristic measuring light is radiated onto the surface of the sample from the distal end of the probe. A light transmitted through or scattered by the sample, or fluorescent light generated from the sample is directed into a photoelectric converter via an optical system. The light radiating area of sample characteristic measuring light can be efficiently modified to improve the resolution of a light characteristic image of the surface topography and optical characteristic of the sample at high resolution, without relying on the existence of transmissivity and conductivity in the sample.
58 Citations
3 Claims
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1. A scanning near-field optic/atomic force microscope comprising:
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a probe made of a light-propagating body for scanning above a sample to observe a topography and optical characteristics thereof; vibration means for vibrating a distal end of the probe and the sample relative to one another; a light source for generating a radiating light onto the sample; optical modulating means for modulating an amplitude of the radiating light in synchronism with a vibrating position of the distal end of the probe; a phase shifter for modifying a phase and/or an intermittent rate of the radiating light of the optical modulating means; displacement detection means for optically detecting displacement of the probe; a photoelectric converter and optical system for detecting light from the sample; and a rough-motion mechanism and a fine-motion mechanism for moving the sample and the probe relative to each other. - View Dependent Claims (2, 3)
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Specification