Inspection method of inclination of an IC

• US 5,627,912 A
• Filed: 12/06/1995
• Issued: 05/06/1997
• Est. Priority Date: 06/29/1992
• Status: Expired due to Fees

• Current Assignee: YOZAN BUILDING
• Original Assignee: YOZAN, Inc.
• Inventors: Matsumoto, Koji
• Primary Examiner(s): JOHNS, ANDREW W
• Application Number:
  US08/568,439
• Time in Patent Office: 517 Days
• Field of Search: 348/87, 348/583, 348/94, 348/95, 395/137, 395/904, 382/141, 382/146, 382/151, 382/168, 382/170, 382/289
• US Class Current: 382/146
• CPC Class Codes: H01L 21/681 using optical controlling means
• CPC Class Codes: H05K 13/0813 Controlling of single components prior to mounting, e.g. orientation, component geometry H05K13/0812 takes precedence

Abstract

The present invention has a purpose to provide method of measuring the inclination of an IC in order to correct its position quickly and precisely without binzarized images. The method according to this invention: 1) defines an inspection area including open ends of IC pins, 2) extracts longitudinal edges and open ends of pin of each IC pin from a density projection of each inspection area, 3) selects a representative point for each inspection area on a line along the open ends of the pins and calculates a center and inclination of an IC according to a difference of coordinates of representative points on opposite sides of the IC.

Claims

1. A method of measuring the orientation of an integrated circuit having a first set of pins on a first side thereof and a second set of pins on a second side opposing the first side, wherein a line extending between the first and the second side of the integrated circuit defines a first axis of the integrated circuit, the method comprising steps of:

generating a pixel image of the integrated circuit in a reference coordinate system having a first reference axis and a second reference axis, the pixel image having a first pixel axis corresponding to the first axis of the integrated circuit, the first pixel axis being parallel to one of the first reference axis and the second reference axis if the integrated circuit is disposed at a zero angle of inclination, the first pixel axis being disposed at a non-zero angle with respect to both the first and the second reference axes if the integrated circuit is disposed at a non-zero angle of inclination, pixels in the pixel image representing relative darknesses of the integrated circuit and a background at discrete locations;

generating density projections of the pins in each of the first and the second set of pins along the first and the second reference axes;

detecting coordinates of termini of the first and the second set of pins along the first and the second references axes from the density projections of the pins in the first and the second sets of pins;

determining reference points corresponding to the pins in the first and the second sets of pins based on the detected coordinates of termini of the first and the second set of pins in the first and the second reference axes, each pin having one reference point associated therewith, the reference points associated with pins in a same set of pins being aligned in parallel with the first reference axis;

selecting a first location representative of the first set of pins based on the reference points associated with the pins in the first set;

selecting a second location representative of the second set of pins based on the reference points associated with the pins in the second set;

determining a first relative displacement of the first and the second locations along one of the first and the second reference axes; and

generating a quantitative measure of inclination of the integrated circuit relative to at least one of the first and the second reference axis based on the first relative displacement.

2. The method of claim 1, wherein the integrated circuit includes a third set of pins located on a third side thereof and a fourth set of pins on a fourth side opposing the third side, further comprising the steps of:

generating density projections of the pins in each of the third and the fourth set of pins along the first and the second reference axes;

detecting coordinates of termini of the third and the fourth sets of pins along the first and the second references axes from the density projections of the pins in the third and the fourth sets of pins;

determining additional reference points corresponding to pins in the third and the fourth sets of pins based on the detected coordinates of the third and the fourth sets of pin termini along the first and the second reference axes, each pin in the third and forth sets of pins having one of the additional reference points associated therewith, the additional reference points associated with the pins in a same set of pins being aligned in parallel with the second reference axis;

selecting a third location representative of the third set of pins based on the additional reference points associated with the pins in the third set;

selecting a fourth location representative of the fourth set of pins based on the additional reference points associated with the pins in the fourth set;

determining a second relative displacement of the third and fourth locations along the second reference axis; and

generating a quantitative measure of inclination of the integrated circuit relative to at least one of the first and second reference axes based on the first and second relative displacements.

3. The method of claim 1, wherein the step of detecting coordinates of pin termini include steps of:

generating a first density projection for a first image area, the first image area encompassing termini of the first set of pins, the first density projection integrating pixel density values along discrete increments of the first reference axis;

determining a first coordinate of an individual pin terminus based on a change in first density projection;

generating a second density projection for the first image area, the second density projection integrating pixel density values along discrete increments of the second reference axis; and

determining a second coordinate of the individual pin terminus based on a change in second density projection.

4. The method of claim 3, wherein the step of determining a first coordinate includes a step of determining a coordinate where a rate of change of the first density projection satisfies a first criterion.

5. The method of claim 3, wherein the step of determining a first coordinate includes a step of determining a coordinate where a rate of change of the first density projection exceeds a threshold value.

6. The method of claim 1, wherein the step of selecting a first location includes a step of selecting, as one coordinate of the first location, a position substantially along a line segment connecting the reference points associated with the pins in the first set.

7. The method of claim 1, wherein the step of selecting a first location includes a step of selecting, as one coordinate of the first location, a position substantially at a midpoint of a line segment connecting the reference points associated with the pins in the first set.

8. The method of claim 1 further comprising the step of adjusting the inclination of the integrated circuit according to the measured inclination.

9. An electronic method of measuring the orientation of an integrated circuit having a first, a second, a third and a fourth set of pins, the first and second sets of pins being located on opposing sides of the integrated circuit wherein a line extending between the first and second sets of pins defines a first axis of the integrated circuit, the third and fourth sets of pins also being located on opposing sides of the integrated circuit wherein a line extending between the third and fourth sets of pins defines a second axis of the integrated circuit, the method comprising steps of:

acquiring a pixel image of the integrated circuit, the image oriented relative to a reference coordinate system having a first reference axis and a second reference axis, the pixel image having a first pixel axis corresponding to the first axis of the integrated circuit and a second pixel axis corresponding to the second axis of the integrated circuit, the first pixel axis being parallel to one of the first and the second reference axis and the second pixel axis being parallel to a remaining other of the first and the second reference axis if the integrated circuit is disposed at a zero angle of inclination, the first pixel axis being disposed at a non-zero angle with respect to one of the first and the second reference axis and the second pixel axis being disposed at a non-zero angle with respect to a remaining other of the first and the second reference axis if the integrated circuit is disposed at a non-zero angle of inclination, pixels in the pixel image representing relative darknesses of the integrated circuit and a background at discrete locations;

generating density projections of the pins in each of the first, second, third and fourth sets of pins along the first and the second reference axes;

detecting coordinates, in the first and the second reference axes, of termini of pins in the first, second, third and fourth sets of pins, from the density projections of the first, second, third and fourth sets of pins;

determining reference points corresponding to the pins in the first, second, third and fourth sets of pins based on the detected coordinates of termini of the pins in the first, second, third and fourth sets of pins, each pin having one reference point associated therewith, the reference points associated with pins in a same set of pins being aligned in parallel to one of the first and second reference axes;

selecting first, second, third and fourth set-representative locations, each representative of one of the first, second, third and fourth sets of pins, respectively, based on the reference points associated with the pins in the first, second, third and fourth sets, respectively;

determining a first relative displacement of the first and second set-representative locations along one of the first and the second reference axis;

determining a second relative displacement of the second and third set-representative locations along a remaining other of the first and the second reference axis; and

generating a quantitative measure of inclination of the integrated circuit relative to the first and the second axes based on the first and second relative displacements.

10. The method of claim 9 wherein the step of detecting coordinates of termini include steps of:

generating a first density projection for a first image area, the first image area encompassing termini of the first set of pins, the first density projection integrating pixel density values along discrete increments of the first reference axis;

determining a first coordinate of an individual pin terminus based on a rate of change in the first density projection;

generating a second density projection for the first image area, the second density projection integrating pixel density values along discrete increments of the second reference axis; and

determining a second coordinate of the individual pin terminus based on a rate of change in second density projection.

11. The method of claim 9, wherein the step of selecting set-representative locations includes a step of selecting, as one coordinate of one set-representative location, a position substantially along a line segment connecting the reference points associated with the pins in a set.

12. The method of claim 9 wherein the step of selecting set-representative locations includes a step of selecting, as one coordinate of one location, a position substantially at a midpoint of a line segment connecting the reference points associated with the pins in a set.

13. An electronic method of mounting an integrated circuit on a circuit board, the integrated circuit having a first, a second, a third and a fourth set of pins, the first and second sets of pins being located on opposing sides of the integrated circuit wherein a line extending between the first and second sets of pins defines a first axis of the integrated circuit, the third and fourth sets of pins also being located on opposing sides of the integrated circuit wherein a line extending between the third and fourth sets of pins defines a second axis of the integrated circuit, the method comprising steps of:

acquiring a pixel image of the integrated circuit, the image oriented relative to a reference coordinate system having a first reference axis and a second reference axis, the pixel image having a first pixel axis corresponding to the first axis of the integrated circuit and a second pixel axis corresponding to the second axis of the integrated circuit, the first pixel axis being parallel to one of the first and the second reference axis and the second pixel axis being parallel to a remaining other of the first and the second reference axis if the integrated circuit is disposed at a zero angle of inclination, the first pixel axis being disposed at a non-zero angle with respect to one of the first and the second reference axis and the second pixel axis being disposed at a non-zero angle with respect to a remaining other of the first and the second reference axis if the integrated circuit is disposed at a non-zero angle of inclination, the pixels representing relative darknesses of the integrated circuit and a background at discrete locations;

generating density projections of the pins in each of the first, second, third and fourth sets of pins along the first and second reference axes;

detecting coordinates, in the first and second reference axes, of termini of pins in the first, second, third and fourth sets of pins, from the density projections of the first, second, third and fourth sets of pins;

determining reference points corresponding to the pins in the first, second, third and fourth sets of pins based on the detected coordinates of termini of the pins in the first, second, third and fourth sets of pins, each pin having one reference point associated therewith, the reference points associated with pins in a same set of pins being aligned in parallel to one of the first and second reference axes;

selecting set-representative locations, each representative of one of the first, second, third and fourth sets of pins based on the reference points associated with the pins in the first, second, third and fourth sets;

determining a first relative displacement of the first and second locations along one of the first and the second reference axis;

determining a second relative displacement of the second and third locations along one of the first and the second reference axis;

generating a quantitative measure of inclination of the integrated circuit relative to the first and the second reference axis based on the first and second relative displacements; and

adjusting the orientation of the integrated circuit relative to a circuit board according to the measured inclination prior to mounting the integrated circuit on the circuit board.

14. The method of claim 13 wherein the step of detecting coordinates of termini include steps of:

generating a first density projection for a first image area, the first image area encompassing termini of the first set of pins, the first density projection integrating pixel density values along discrete increments of the first reference axis;

determining a first coordinate of an individual pin terminus based on a rate of change in the first density projection;

generating a second density projection for the first image area, the second density projection integrating pixel density values along discrete increments of the second reference axis; and

determining a second coordinate of the individual pin terminus based on a rate of change in second density projection.

15. The method of claim 13 wherein the step of selecting set-representative locations includes a step of selecting, as one coordinate of one set-representative location, a position substantially along a line segment connecting the reference points associated with the pins in a set.

16. The method of claim 13 wherein the step of selecting set-representative locations includes a step of selecting, as one coordinate of one location, a position substantially at the midpoint of a line segment connecting the reference points associated with the pins in a set.