Method and apparatus for wavevector selective pyrometry in rapid thermal processing systems

• US 5,628,564 A
• Filed: 03/28/1995
• Issued: 05/13/1997
• Est. Priority Date: 04/26/1994
• Status: Expired due to Term

• Current Assignee: Ast Elecktronik Gmbh
• Original Assignee: Ast Elektronik, USA, Inc.
• Inventors: Tillmann, Andreas, Nenyei, Zsolt, Walk, Heinrich
• Primary Examiner(s): Bennett, G. Bradley
• Application Number:
  US08/412,278
• Time in Patent Office: 777 Days
• Field of Search: 374/121, 374/123, 374/126, 374/130, 374/161, 250/338.1, 250/341.1, 250/341.8, 356/43
• US Class Current: 374/121
• CPC Class Codes: G01J 5/0003 for sensing the radiant heat transfer of samples, e.g. emittance meter
• CPC Class Codes: G01J 5/0007 of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
• CPC Class Codes: G01J 5/80 Calibration using comparison with reference sources G01J5/52

Abstract

A method and apparatus for optical pyrometry in a Rapid Thermal Processing (RTP) System, whereby the radiation used to heat the object to be processed in the RTP system is in part specularly reflected from specularly reflecting surfaces and is incident on the object with a particular angular distribution, and the thermal radiation from the object is measured at an angles different from the angle where the incident radiation specularly reflected from the surface of the object is a maximum.

Claims

1. A method for optical temperature measurement of an object to be processed in a rapid thermal processing system comprising:

a. irradiating a specularly reflecting area of a surface of the object with incident radiation having a particular angular distribution, the incident radiation arising in part from one or more reflections of radiation from at least one radiation source, the reflections of radiation being substantially specular; and

b. measuring radiation emitted and reflected from the specularly reflecting area of the surface of the object at angles different from an angle where the incident radiation reflected from the specularly reflecting area of the surface of the object has maximum intensity.

2. The method of claim 1 wherein the radiation emitted from the specularly reflecting area of the surface is measured with a measuring instrument sensitive to a broad bandwidth of the emitted radiation.

3. The method of claim 2 wherein the radiation emitted from the specularly reflecting area of the surface is measured with a measuring instrument sensitive to a center wavelength λ

₀ and a bandwidth greater than or equal to ±

λ

₀ /3 about the center wavelength.

4. The method of claim 2 wherein the radiation emitted from the specularly reflecting area of the surface is measured by a plurality of optical sensors.

5. The method of claim 2, wherein the reflections of radiation have less than 10% of the reflected radiation scattered in a non-specular direction.

6. The method of claim 2, wherein the radiation reflected by the specularly reflecting area of the surface of the object and measured has been reflected more than once from the specularly reflecting area of the surface of the object.

7. The method of claim 1, wherein the object to be processed is a semiconductor wafer having a first surface and a second surface parallel to the first surface, wherein radiation emitted from the first surface at angles which are nearly normal to the surfaces is measured, and wherein radiation emitted from the second surface which is reflected back and transmitted through the wafer is measured, the radiation which is reflected back and transmitted through the wafer and measured is reflected from a surface of reduced reflectivity.

8. The method of claim 1, wherein the step of measuring the radiation emitted from the specularly reflecting area of the surface includes the step of measuring polarized radiation from the specularly reflecting area of the surface.

9. The method of claim 1, further comprising:

c. rapidly raising the incident radiation intensity in a time short compared with the thermal relaxation time of the object to be processed; and

d. calibrating the measurement system to account for incident light scattered to the measurement system.

10. The method of claim 1, wherein the step of irradiating the specularly reflecting area of the surface of the object includes modulating the irradiation power.

11. The method of claim 5, wherein the reflections of radiation have less than 5% of the reflected radiation scattered in a non-specular scattering direction.

12. The method of claim 11, wherein the reflections of radiation have less than 1% of the reflected radiation scattered in a non-specular scattering direction.

13. The method of claim 2, wherein the measurement instrument has an acceptance angle in a first direction substantially different from an acceptance angle in a second direction.

14. A rapid thermal processing apparatus for processing an object and optical temperature measurement of the object comprising;

a reflection chamber for multiply specularly reflecting radiation from one or more radiation sources so that the radiation is incident on to a specularly reflecting area of the surface of the object to be processed, the radiation incident on the specularly reflecting area of the surface of the object having a particular angular distribution; and

means for measuring radiation emitted from the specularly reflecting area of the surface of the object to processed, the means for measuring radiation being sensitive primarily to radiation emitted from the specularly reflecting area of the surface at an angle different from an angle where the radiation incident on the specularly reflecting area of the surface and then reflected from the specularly reflecting area of the surface has maximum intensity.

15. The apparatus of claim 14, wherein the means for measuring the radiation emitted from the specularly reflecting area of the surface is sensitive to a broad bandwidth of the emitted radiation.

16. The apparatus of claim 15, wherein the means for measuring the radiation emitted from the specularly reflecting area of the surface includes a plurality of radiation detectors.

17. The apparatus of claim 16, wherein at least two of the plurality of radiation detectors are sensitive to different radiation wavelengths.

18. The apparatus of claim 14, wherein the means for measurement of the radiation emitted from the specularly reflecting area of the surface is sensitive to the polarization of the radiation.

19. The apparatus of claim 15, further comprising:

means for rapidly raising intensity of the radiation incident on to the specularly reflecting area of the surface of the object to be processed in a time short compared to the thermal relaxation time of the object to be measured; and

means for calculating the corrected temperature using measurements of the radiation incident on to the specularly reflecting area of the surface of the object to be measured which is scattered to the measurement system.

20. The apparatus of claim 15, further comprising:

means for modulating the intensity of the radiation incident on to the specularly reflecting area of the surface of the object to be measured.

21. The apparatus of claim 20, further comprising:

means for calculating the corrected temperature using measurements of the modulated radiation incident on to the specularly reflecting area of the surface of the object to be measured which is scattered to the measurement system.