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Monitoring of minimum features on a substrate

  • US 5,629,772 A
  • Filed: 12/20/1994
  • Issued: 05/13/1997
  • Est. Priority Date: 12/20/1994
  • Status: Expired due to Term
First Claim
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1. A method of measuring lithographic process bias of a minimum feature formed in a lithographic process, using a measurement tool, comprising the steps of:

  • creating an array of elements on a substrate, each element in the array having a nominal length and a nominal width, and adjacent element having a nominal space therebetween, wherein the nominal width of each element and the nominal space between each adjacent element correspond to said minimum feature, the nominal length being larger than the minimum feature;

    measuring length of said created elements in the array resulting from said lithographic process;

    calculating change in length of said elements from nominal length; and

    ,means for calculating lithographic process bias of the minimum feature (width, space) from said change in length of said elements in the array.

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