Spatial light modulator having an analog beam for steering light
First Claim
1. An improved spatial light modulator of the type which includes a generally planar light-reflective pixel which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to an underlying address circuit, the deflection of the pixel storing potential mechanical energy in a pixel-supporting facility, which stored energy tends to return the pixel to the first position, wherein the improvement comprises:
- the pixel-supporting facility includinga first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and
a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member.
1 Assignment
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Accused Products
Abstract
A spatial light modulator (40, 70, 80) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) is supported by a torsion hinge (44) along a torsion axis. A plurality of flexure hinges (48) are provided to support the corners of the mirror (42, 72) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60).
198 Citations
14 Claims
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1. An improved spatial light modulator of the type which includes a generally planar light-reflective pixel which is deflectable out of a first, normal position into a plurality of second positions, light incident on the pixel being selectively modulated by being reflected from the pixel in selected directions depending on the position of the pixel, the position of the pixel being dependent on a selected characteristic of an electrical signal provided to an underlying address circuit, the deflection of the pixel storing potential mechanical energy in a pixel-supporting facility, which stored energy tends to return the pixel to the first position, wherein the improvement comprises:
the pixel-supporting facility including a first torsion member connected between the pixel and a first stationary post and defining a torsion axis, deflection of the pixel effecting its rotation about the torsional axis of the first member; and a second flexure member connected between the pixel and a second stationary post, deflection of the pixel effecting flexure of the second member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
Specification