Capacitive semiconductor pressure sensor

• US 5,631,428 A
• Filed: 11/22/1995
• Issued: 05/20/1997
• Est. Priority Date: 11/24/1994
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: Siemens AG
• Inventors: Hierold, Christofer, Scheiter, Thomas, Catanescu, Ralf
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/561,854
• Time in Patent Office: 545 Days
• Field of Search: 73/724, 73/718, 257/419, 361/283.4
• US Class Current: 73/724
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

A micromechanically manufacturable pressure sensor has a cavity produced in an auxiliary layer that is covered with a membrane layer, the cavity is produced via recesses in the membrane layer. These recesses are subsequently closed by portions of a closure layer. Further layers can be applied on the closure layer. Portions of the further layers and closure layer are removed above the membrane layer.

Claims

1. A semiconductor component pressure sensor, comprising:

an electrically conductive region;

a layer over the electrically conductive region defining a cavity;

an electrically conductive membrane layer overlying the cavity;

recesses in the membrane layer above the cavity;

a closure layer applied on the membrane layer;

said membrane layer being deformable so that given a change of pressure within a predetermined interval at a side of the membrane layer facing away from the cavity, the membrane layer can deflect so as to cause a change of electrical capacitance defined by the conductive region and the electrically conductive membrane layer;

electrical contacts respectively connected to the membrane layer and conductive region for measuring said change of electrical capacitance; and

a material of the closure layer being introduced into said recesses.

2. A semiconductor component pressure sensor, comprising:

an electrically conductive region;

a layer over the electrically conductive region defining a cavity;

an electrically conductive membrane layer overlying the cavity;

recesses in the membrane layer above the cavity;

a closure layer applied on the membrane layer;

said membrane layer being deformable so that given a change of pressure within a predetermined interval at a side of the membrane layer facing away from the cavity, the membrane layer can deflect so as to cause a change of electrical capacitance defined by the conductive region and the electrically conductive membrane layer;

electrical contacts respectively connected to the membrane layer and conductive region for measuring said change of electrical capacitance; and

an opening through said closure layer to said membrane layer for permitting said pressure to be exerted directly on said membrane layer.

3. A pressure sensor according to claim 2 wherein said opening through said closure layer to said membrane layer surrounds a portion of said closure layer which remains above said membrane.

4. A pressure sensor according to claim 2 wherein a stiffening layer is applied on said membrane layer in said opening in said closure layer down to said membrane layer.

5. A pressure sensor according to claim 4 wherein said stiffening layer is formed of a metal layer applied onto said membrane layer and covering at least all of said opening to said membrane layer.

6. A pressure sensor according to claim 2 wherein at least one further layer is provided on said closure layer, said further layer also having an opening aligned with said opening in said closure layer down to said membrane layer.

7. A semiconductor component pressure sensor, comprising:

an electrically conductive region;

a layer over the electrically conductive region defining a cavity

an electrically conductive membrane layer overlying the cavity;

recesses in the membrane layer above the cavity;

a closure layer applied on the membrane layer;

said membrane layer being deformable so that given a change of pressure within a predetermined interval at a side of the membrane layer facing away from the cavity, the membrane layer can deflect so as to cause a change of electrical capacitance defined by the conductive region and the electrically conductive membrane layer;

electrical contacts respectively connected to the membrane layer and conductive region for measuring said change of electrical capacitance; and

said electrically conductive membrane layer comprising polysilicon.

8. A semiconductor component pressure sensor, comprising:

an electrically conductive region;

a layer over the electrically conductive region defining a cavity;

an electrically conductive membrane layer overlying the cavity;

recesses in the membrane layer above the cavity;

a closure layer applied on the membrane layer;

said membrane layer being deformable so that given a change of pressure within a predetermined interval at a side of the membrane layer facing away from the cavity, the membrane layer can deflect so as to cause a change of electrical capacitance defined by the conductive region and the electrically conductive membrane layer;

electrical contacts respectively connected to the membrane layer and conductive region for measuring said change of electrical capacitance; and

said membrane layer comprising metal.

9. A semiconductor component pressure sensor, comprising:

an electrically conductive region;

a layer over the electrically conductive region defining a cavity;

an electrically conductive membrane layer overlying the cavity;

recesses in the membrane layer above the cavity;

a closure layer applied on the membrane layer, a material of the closure layer being introduced into the recesses to close them off;

said membrane being deformable so that given a change of pressure within a predetermined interval at a side of the membrane facing away from the cavity, the membrane can deflect so as to cause a change of electrical capacitance defined by the conductive region and the electrically conductive membrane layer;

electrical contacts respectively connected to the membrane layer and conductive region for measuring said change of electrical capacitance; and

an opening through said closure layer down to said membrane layer for permitting said pressure to be exerted on said membrane layer.