Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process

• US 5,631,514 A
• Filed: 06/09/1994
• Issued: 05/20/1997
• Est. Priority Date: 06/09/1994
• Status: Expired due to Fees

• Current Assignee: United States Department of Energy (Government of the United States of America)
• Original Assignee: United States Department of Energy (Government of the United States of America)
• Inventors: Sniegowski, Jeffry J., Garcia, Ernest J.
• Primary Examiner(s): Laballe, Clayton E.
• Application Number:
  US08/257,317
• Time in Patent Office: 1,076 Days
• Field of Search: 310/20, 310/40 MM, 310/80, 310/308, 310/309, 74/44
• US Class Current: 310/309
• CPC Class Codes: F16H 21/16 for interconverting rotary motion and reciprocating motion
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: Y10T 74/18208 Crank, pitman, and slide

Abstract

A microengine uses two synchronized linear actuators as a power source and converts oscillatory motion from the actuators into rotational motion via direct linkage connection to an output gear or wheel. The microengine provides output in the form of a continuously rotating output gear that is capable of delivering drive torque to a micromechanism. The microengine can be operated at varying speeds and its motion can be reversed. Linear actuators are synchronized in order to provide linear oscillatory motion to the linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means. The output gear has gear teeth on its outer perimeter for directly contacting a micromechanism requiring mechanical power. The gear is retained by a retaining means which allows said gear to rotate freely. The microengine is microfabricated of polysilicon on one wafer using surface micromachining batch fabrication.

Claims

1. A microengine batch fabricated by polysilicon surface micromachining techniques, comprising:

a substrate base;

a mechanical output gear made rotatably secured by a central flanged restraining hub formed on and attached to said substrate base, said gear having a center and an outer perimeter, said gear for providing direct rotational power to a micromechanism;

a linear actuator means formed on said substrate base and linked to said mechanical output gear near said outer perimeter by a linkage means, said linear actuator means for causing rotation of said mechanical output gear; and

a linkage means for linking said linear actuator means to said mechanical output gear wherein said linkage means is rotatably connected to said gear between the center and the outer perimeter of said gear.

2. The invention of claim 1 wherein said actuator means further comprises a first linear actuator and a second linear actuator wherein said first linear actuator is rotatably connected by said linkage means to said output gear and said second linear actuator is rotatably connected to said linkage means at a point between said first linear actuator and said output gear.

3. The invention of claim 2 wherein said linear actuators are timed in order to provide linear oscillatory motion to said linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means.

4. The invention of claim 3 wherein said actuators are electrostatic comb drive actuators.

5. The invention of claim 4 wherein said mechanical output means is a gear further comprises teeth at its outermost perimeter, said teeth for directly contacting a micromechanism.

6. The invention of claim 5 wherein said invention is fabricated of polysilicon on one wafer using surface micromachining batch fabrication.

7. The invention of claim 1 wherein said linkage means is flexible to allow rotational motion at said output means.

8. The invention of claim 7 wherein said invention is fabricated of polysilicon on one wafer using surface micromachining batch fabrication.

9. A microengine batch fabricated by polysilicon surface micromachining techniques, comprising:

a mechanical output gear formed upon and rotatably attached to a substrate base by a central flanged restraining hub that is formed on and attached to said substrate base, said gear for providing rotational motion and power to a mechanical load;

a first linear actuator formed on said substrate base and positioned along an X axis relative to said output gear;

a second linear actuator formed on said substrate base and positioned along a Y axis relative to said output gear and said first linear actuator wherein said second actuator is positioned between said output gear and said first linear actuator;

a first linkage means for rotatably linking said first linear actuator to said output gear, wherein said linkage is connected to said output gear near said output gear'"'"'s outer perimeter; and

a second linkage means for linking said second linear actuator to said first linkage means.

10. The invention of claim 9 wherein said linear actuators are timed in order to provide linear oscillatory motion to said linkage means in the X and Y directions according to a desired position, rotational direction and speed of said mechanical output means.

11. The invention of claim 10 wherein said actuators are electrostatic comb drive actuators.

12. The invention of claim 11 wherein said mechanical output gear further comprises teeth on its outer perimeter, said teeth for directly contacting a micromechanism.

13. The invention of claim 12 wherein said microengine output gear is fabricated on a silicon substrate and is smaller than 40 micrometers in diameter.

14. The invention of claim 9 wherein said linkage means is flexible to allow rotational motion at said output means.

15. The invention of claim 14 wherein said microengine is fabricated on a silicon substrate and is smaller than 9 micrometers in thickness.

16. A microfabricated microengine made of polysilicon on a silicon substrate base, comprising:

a mechanical output gear having teeth on its outermost surface for providing rotational motion to a mechanical load;

a retaining hub formed on and attached to said substrate base for rotatably securing said output gear and allowing the output gear to rotate;

a first linear actuator formed on said substrate base and positioned along the X axis relative to said output gear;

a second linear actuator formed on said substrate base and positioned along the Y axis relative to said output gear wherein said second actuator is positioned between said output gear and said first linear actuator;

a first linkage means for rotatably linking said first linear actuator to said output gear, wherein said linkage is rotatably connected to said output gear near said output gear'"'"'s perimeter; and

a second linkage means for flexibly linking said second linear actuator to said first linkage means.

17. The invention of claim 16 wherein said linear actuators are timed in order to provide linear oscillatory motion said linkage means in X and Y directions relative to said mechanical output gear and according to a desired position, rotational direction and speed of said mechanical output means.

18. The invention of claim 17 wherein said actuators are electrostatic comb drive actuators.

19. The invention of claim 16 wherein said linkage means is flexible to allow rotational motion at said output means.

20. The invention of claim 16 wherein said gear is retained by a retaining means which allows said gear to rotate freely.

21. The invention of claim 16 wherein said output gear is smaller than 40 micrometers and said microengine is smaller than 9 micrometers in thickness.