Mass spectrometry apparatus

• US 5,633,496 A
• Filed: 03/17/1995
• Issued: 05/27/1997
• Est. Priority Date: 03/17/1994
• Status: Expired due to Term

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Hirabayashi, Atsumu, Takada, Yasuaki, Sakairi, Minoru, Ose, Yoichi, Mimura, Tadao
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US08/405,767
• Time in Patent Office: 802 Days
• Field of Search: 250/281, 250/288, 250/423 R
• US Class Current: 250/288
• CPC Class Codes: G01N 30/7233 interfaced to liquid or supercritical fluid chromatograph interfaces in general for introducing or extracting samples to be analysed with specially adapted mass spectrometer, see H01J49/04
• CPC Class Codes: H01J 49/067 Ion lenses, apertures, skimmers

Abstract

A mass spectrometry apparatus which includes an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample, a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from the ion source and outputting the ions and an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from the differential pumping region. The ions from the accelerating and focusing region are introduced under vacuum to a mass spectrometer which detects and analyzes the ions.

Claims

1. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein at least one of said plurality of ion accelerating electrodes is a cylindrical electrode;

wherein said cylindrical electrode includes a part having a mesh structure.

2. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein a pressure in said differential pumping region is not lower than 10^-3 Torr, and a pressure in said ion accelerating and focusing region is not higher than 10^-3 Torr;

wherein at least one of said plurality of ion accelerating electrodes is a cylindrical electrode;

wherein said cylindrical electrode includes a part having a mesh structure.

3. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein different voltages are applied independently to said ion accelerating electrodes;

wherein at least one of said plurality of ion accelerating electrodes is a cylindrical electrode;

wherein said cylindrical electrode includes a part having a mesh structure.

4. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein at least one of said plurality of ion accelerating electrodes is provided with a heater.

5. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein a pressure in said differential pumping region is not lower than 10^-3 Torr, and a pressure in said ion accelerating and focusing region is not higher than 10^-3 Torr;

wherein at least one of said plurality of ion accelerating electrodes is provided with a heater.

6. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with apertures, for receiving under vacuum ions in the ionized sample from said ion source and outputting the ions;

an ion accelerating and focusing region, having a plurality of ion accelerating electrodes each having applied thereto a voltage, for accelerating and focusing under vacuum the ions from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating and focusing region;

wherein different voltages are applied independently to said ion accelerating electrodes;

wherein at least one of said plurality of ion accelerating electrodes is provided with a heater.

7. A mass spectrometry apparatus comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with a skimmer, for receiving under vacuum ions in the ionized sample output form said ion source and outputting the received ions through said skimmer;

an ion accelerating region, having a plurality of ion accelerating electrodes, for accelerating under vacuum the ions output from said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating region,

wherein said plurality of ion accelerating electrodes are serially arranged between said skimmer and said mass spectrometer, each accelerating electrode having applied thereto a constant voltage which is different from other constant voltages applied to the other accelerating electrodes such that kinetic energy of the accelerated ions are continually increased toward the side of said mass spectrometer.

8. A mass spectrometry apparatus according to claim 7,

wherein the voltage difference between said skimmer and the accelerating electrodes provided adjacent to said skimmer is smaller than the voltage difference between the other two ion accelerating electrodes provided adjacent to said mass spectrometer.

9. A mass spectrometry apparatus according to claim 7, wherein one of said plurality of ion accelerating electrodes includes a housing having an electron impact ionization source.

10. A mass spectrometry apparatus according to claim 7, wherein an ion deflector is provided between said ion accelerating region and said mass spectrometer.

11. A mass spectrometry apparatus according to claim 7, wherein at least one of said plurality of ion accelerating electrodes is a cylindrical electrode.

12. A mass spectrometry apparatus according to claim 11, wherein said cylindrical electrode is a bore carrying cylindrical electrode.

13. A mass spectrometry apparatus according to claim 11, wherein said cylindrical electrode includes a part having a mesh structure.

14. A mass spectrometry apparatus according to claim 7, wherein said plurality of ion accelerating electrodes includes a first ion accelerating electrode provided near said skimmer, and an end portion of said first ion accelerating electrode, which is on the side of said differential pumping region, has a hemispherical structure.

15. A mass spectrometry apparatus according to claim 14, wherein said end portion of said first ion accelerating electrode is provided at a position less than a predetermined distance away from said skimmer, and the other end portion of said first ion accelerating electrode which is on the side of said mass spectrometer is provided at a position more than said predetermined distance away from said skimmer.

16. A mass spectrometry apparatus according to claim 15, wherein said predetermined distance is a distance determined by an expression 0.67×

the inner diameter of the aperture of said skimmer×

the square root of (a pressure in said differential pumping region/a pressure in said ion accelerating region).

17. A mass spectrometry apparatus according to claim 7, wherein said plurality of ion accelerating electrodes include a first ion accelerating electrode provided near said skimmer, and a fixed voltage is applied to said first ion accelerating electrode to form an electric field in a range of 0-2000 V/cm, between said skimmer and said first ion accelerating electrode.

18. A mass spectrometry apparatus according to claim 7, wherein the pressure in said differential pumping region is not lower than 10^-3 Torr, and the pressure in said ion accelerating region is not higher than 10^-3 Torr.

19. A mass spectrometry apparatus according to claim 7, wherein at least one of said plurality of ion accelerating electrodes is provided with a heater.

20. A mass spectrometry apparatus for analyzing multiple charged ions obtained from organic matter comprising:

an ion source which ionizes a sample under atmospheric pressure and outputs the ionized sample;

a differential pumping region, provided with a skimmer, for receiving under vacuum ions in the ionized sample output from said ion source and outputting the received ions through said skimmer;

an ion accelerating region, having a plurality of ion accelerating electrodes, for accelerating under vacuum the ions output form said differential pumping region; and

a mass spectrometer for detecting and analyzing under vacuum the ions from said accelerating region,

wherein said plurality of ion accelerating electrodes are serially arranged between said skimmer and said mass spectrometer each accelerating electrode having applied thereto a constant voltage which is different from other constant voltages applied to the other accelerating electrodes such that the kinetic energy of the accelerated ions are continually increased toward the side of said mass spectrometer.

21. A mass spectrometry apparatus according to claim 20,

wherein the voltage difference between the voltages applied to the adjacent two ion accelerating electrodes provided adjacent to said skimmer is smaller than the voltage difference between the voltages applied to the adjacent two ion accelerating electrodes provided adjacent to said mass spectrometer.