Variable spot-size scanning apparatus

• US 5,633,747 A
• Filed: 12/21/1994
• Issued: 05/27/1997
• Est. Priority Date: 12/21/1994
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: Tencor Instruments (KLA Corporation)
• Inventors: Nikoonahad, Mehrdad
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/361,135
• Time in Patent Office: 888 Days
• Field of Search: 359/312, 359/305, 359/308, 359/285, 359/286, 359/287, 359/310, 369/54, 369/116, 369/97, 369/44.14, 369/112, 369/121, 356/394, 356/237, 356/392, 356/338, 356/398, 250/234
• US Class Current: 359/312
• CPC Class Codes: G01N 21/95623 using a spatial filtering method per se G02B
• CPC Class Codes: G02F 1/113 Circuit or control arrangements
• CPC Class Codes: G03F 7/70641 Focus

Abstract

An apparatus for both deflecting a beam of light illuminating a spot on a surface and varying the size of the spot, electronically, without changing any system components. The apparatus includes an acousto-optic deflector driven with a linear FM signal produced by a chirp signal generator. The linear FM signal is characterized with a dispersion rate, and the chirp signal generator includes a chirp dispersion selector to vary the dispersion rate. A beam of collimated light passes through the acousto-optic deflector and appropriate focusing optics image the beam onto a spot in a nominal focal plane. The chirp dispersion selector sets the dispersion rate in accord to a nominal rate, resulting in the beam illuminating a spot in the focal plane. Generally, the focal plane coincides with a wafer surface, of the type having periodic and non-periodic features on it. The spot size may be varied from that of a diffraction limited spot to a spot whose maximum size is system dependent. The spot size varies as a result of changing the dispersion rate of the chirp signal. The spot size may vary as it is scanned, or may remain fixed during the inspection of a wafer. In this manner, inspection by periodic feature comparison may be implemented when it proves advantageous. Alternatively, a larger spot may be obtained when periodic feature comparison would provide no benefit, and spatial filtering would achieve an enhanced signal/background.

Claims

1. An apparatus for scanning a patterned wafer of the type having periodic and non-periodic features comprising:

means for providing a beam scanning the surface of a wafer, with a spot; and

means for varying the dimension of the spot with a first dimension for periodic features and a second dimension for non-periodic features.

2. The apparatus as recited in claim 1 wherein the varying means includes a linear FM signal generator producing a linear FM signal,

an acousto-optic deflector having an entrance aperture and an exit aperture, opposite the entrance aperture, with beam passing therethrough, the deflector electronically coupled to the generator to receive the linear FM signal, and

a chirp dispersion selector, electronically coupled to the deflector, for changing a dispersion rate of the linear FM signal in accord with the presence of periodic and non-periodic features.

3. The apparatus as recited in claim 2 wherein the acousto-optic deflector is a single axis acousto-optic deflector.

4. The apparatus as recited in claim 2 wherein the acousto-optic deflector is a dual axis acousto-optic deflector.

5. The apparatus as recited in claim 2 further including a chirp correction lens positioned proximate to the exit aperture, wherein the beam exiting the acousto-optic deflector is characterized by a quadratic phase component defining a phase curvature and the chirp correction lens includes an aspherical surface to remove the phase curvature in the beam exiting the acousto-optic deflector driven by a nominal dispersion rate.

6. The apparatus as recited in claim 2 wherein the linear FM signal is characterized with a chirp time and chirp bandwidth and the chirp dispersion selector changes the chirp time in accordance with the periodic features on the surfaces.

7. The apparatus as recited in claim 2 wherein the linear FM signal is characterized with a chirp time and chirp bandwidth and the chirp dispersion selector changes the chirp bandwidth in accordance with the periodic features on the surface.

8. An apparatus for deflecting a beam of light illuminating a spot on a surface, of the type having periodic and non-periodic features, comprising:

an acousto-optic deflector having an entrance aperture and an exit aperture, opposite the entrance aperture,

a linear FM signal generator electronically coupled to said acousto-optic deflector,

a chirp correction lens positioned proximate to said exit aperture,

means, electronically coupled to said generator, for varying a dispersion rate of a linear FM signal in accord with the presence of periodic and non-periodic features, wherein the beam passes through the acousto-optic deflector from the entrance aperture to the exit aperture, illuminating a spot on the surface with the size of the spot varying in accordance with the dispersion rate.

9. The apparatus as recited in claim 8 wherein the acousto-optic deflector is a single axis acousto-optic deflector.

10. The apparatus as recited in claim 8 wherein the acousto-optic deflector is a dual axis acousto-optic deflector.

11. The apparatus as recited in claim 8 wherein the dispersion rate is characterized with a chirp time and a chirp bandwidth and said varying means varies the chirp time in accordance with the periodic features on the surface.

12. The apparatus as recited in claim 8 wherein the dispersion rate is characterized with a chirp time and a chirp bandwidth and said varying means varies the chirp bandwidth in accordance with the periodic features on the surface.

13. The apparatus as recited in claim 8 wherein the beam exiting the acousto-optic deflector is characterized by a quadratic phase component defining a phase curvature and the chirp correction lens includes an aspherical surface to remove the phase curvature in the beam exiting the acousto-optic deflector driven by a linear FM signal having a nominal dispersion rate.

14. The apparatus as recited in claim 8 further including a scan lens, defining a focal plane, the scan lens positioned to receive a beam exiting the chirp correction lens, wherein the beam is brought to a diffraction limited focus in the focal plane when the acousto-optic deflector is driven with a linear FM signal having a nominal dispersion rate.

15. The apparatus as recited in claim 14 wherein the chirp correction lens is proximate to the exit aperture, at a distance that is substantially less than the focal length of the scan lens.

16. An optical scanning system for defect and foreign matter detection on a surface comprising,

means for producing a beam of light,

means for directing the beam onto a sample surface of the type having locations with periodic and non-periodic features, producing an illuminated spot, means for scanning the spot across the sample surface,

means for varying the spot size in accord with the locations of the periodic and non-periodic features, and

means for detecting light scattered from the surface and generating signals representing the light impinging thereon.

17. The optical scanning system as recited in claim 16 wherein the detecting means is positioned normal to the surface to detect upwardly scattered light.

18. The optical scanning system as recited in claim 17 wherein the detecting means includes a programmable spatial filter and further including a means, in electrical communication with the spatial filter, for activating the spatial filter in accord with the spot illuminating periodic features.

19. The optical scanning system as recited in claim 16 wherein the means for varying the spot size includes an acousto-optic deflector having an entrance and an exit aperture, electronically coupled to both a linear FM signal generator and a chirp dispersion selector, wherein the beam passes through the acousto-optic deflector from the entrance aperture to the exit aperture, and the acousto-optic deflector is driven with a linear FM signal, produced by the generator and characterized by a dispersion rate, the dispersion rate is varied from a nominal rate, by the chirp dispersion selector, in accord with the spot illuminating periodic features to increase the size of the spot and the dispersion is fixed at the nominal rate in accord with the spot illuminating non-periodic features to maintain a nominal spot size.

20. The optical scanning system as recited in claim 19 wherein the means for varying the spot size further comprises a chirp correction lens to collimate a beam exiting the acousto-optic deflector.

21. The optical scanning system as recited in claim 20 wherein the beam exiting the acousto-optic deflector is characterized by a quadratic phase component defining a phase curvature and the chirp correction lens includes an aspherical surface which removes the phase curvature in the beam exiting the acousto-optic deflector driven by a linear FM signal having a nominal dispersion rate.

22. The optical scanning system as recited in claim 20 wherein the dispersion rate is characterized with a chirp time and a chirp bandwidth and the dispersion selector varies the chirp time in accordance with the spot illuminating periodic features on the surface.

23. The optical scanning system as recited in claim 20 wherein the dispersion rate is characterized with a chirp time and a chirp bandwidth and the dispersion selector varies the chirp bandwidth in accordance with the spot illuminating periodic features on the surface.

24. The optical scanning system as recited in claim 20 further including a scan lens, defining a focal plane coinciding with the surface, the scan lens positioned to receive a beam exiting the chirp correction lens, wherein the beam is brought to a diffraction limited focus in the focal plane in accord with illuminating non-periodic features at the focal plane.

25. The optical scanning system as recited in claim 24 wherein the chirp correction lens is proximate to the exit aperture, at a distance that is substantially less than the focal length of the scan lens.

26. A method for scanning a patterned wafer of the type having periodic and non-periodic features comprising:

providing a beam scanning the surface of a wafer with a spot, and

varying the dimension of the spot with a first dimension for periodic features and a second dimension for non-periodic features.

27. The method as recited in claim 26 wherein the dimension of the spot is varied electronically.

28. A method for varying a size of a spot produced by a beam of light illuminating a surface comprising the steps of:

providing an acousto-optic deflector,

driving the acousto-optic deflector with a linear FM signal, and

varying a dispersion rate of the linear FM signal.

29. The method as recited in claim 28 wherein the varying step includes varying a dispersion time.

30. The method as recited in claim 28 wherein the varying step includes varying a dispersion bandwidth.

31. The method as recited in claim 28 wherein the beam exiting the acousto-optic deflector includes a quadratic phase component and further including the step of removing the quadratic component of the beam exiting the deflector.

32. An optical scanning method for anomaly detection on a surface comprising,

directing a light beam onto a sample surface to produce an illuminated spot,

passing the beam through and supplying a chirp signal to an acousto-optic deflector in order to scan the spot across the sample surface, and

providing a control electrical signal for controlling the spot size by altering a dispersion rate of the chirp signal.

33. A method for scanning a patterned surface of the type having periodicity characteristics, comprising:

providing a light beam to illuminate the surface at a spot,

scanning the beam to cause the spot to move across the surface, and

varying a dimension of the spot with the periodicity characteristics of the surface.

34. The method of claim 33, wherein said scanning step includes supplying a chirp signal to an acousto-optic deflector, and wherein said varying step alters a dispersion rate of the chirp signal.

35. An apparatus for deflecting a beam of light illuminating a spot on a surface, comprising:

an acousto-optic deflector,

a chirp signal generator supplying a chirp signal to said acousto-optic deflector,

means for varying a dispersion rate of the chirp signal.

36. The apparatus of claim 35, further comprising a chirp correction lens positioned proximate to said deflector.