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Coupling for multiple masses in a micromachined device

  • US 5,635,638 A
  • Filed: 06/06/1995
  • Issued: 06/03/1997
  • Est. Priority Date: 06/06/1995
  • Status: Expired due to Term
First Claim
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1. A micromachined device comprising:

  • a substrate;

    a first movable mass anchored to the substrate;

    a second movable mass anchored to the substrate, the first and second masses each being movable along a dither axis, the first and second masses defining an intermediate region therebetween; and

    a first coupling extending from the first mass to the second mass, the coupling allowing relative anti-phase movement and resisting relative in-phase movement by the masses, the first coupling including;

    a first arcuate member extending along a first path from the first mass to the second mass, the first path extending around and not through the intermediate region.

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