Micromachined device with rotationally vibrated masses
First Claim
1. A micromachined device comprising:
- a substrate;
a rotatably movable first mass suspended over the substrate;
a rotatably movable second mass suspended over the substrate; and
a first coupling coupled to each of the first and second masses, the first coupling providing little resistance during relative anti-phase movement of the masses, and substantially resisting relative in-phase movement of the masses.
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Accused Products
Abstract
A micromachined device has a plurality of rotationally dithered masses that are used to sense acceleration. To eliminate common modes, the masses are dithered in an equal and opposite manner. To help maintain this relationship between the movement of the masses, a coupling fork provides minimal resistance to anti-phase movement and substantial resistance to in-phase movement. Electrodes are used to detect changes in capacitance between the masses and the substrate resulting from rotation of the device about a radial axis of a mass. These electrodes are electrically connected to eliminate gradients that are caused by external forces and manufacturing differences. Four masses or more can be provided, arranged in a two-dimensional array, such as a square or hexagon with a coupling fork provided between each pair of masses, and with electrodes connected to eliminate gradients.
150 Citations
23 Claims
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1. A micromachined device comprising:
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a substrate; a rotatably movable first mass suspended over the substrate; a rotatably movable second mass suspended over the substrate; and a first coupling coupled to each of the first and second masses, the first coupling providing little resistance during relative anti-phase movement of the masses, and substantially resisting relative in-phase movement of the masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A micromachined device comprising:
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a substrate; a rotatably movable first mass suspended over the substrate; a rotatably movable second mass suspended over the substrate; and means, coupled to the first and second masses, for providing little resistance to relative anti-phase movement of the masses, and for substantially resisting relative in-phase movement of the masses. - View Dependent Claims (20, 21, 22, 23)
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Specification