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Micromachined device with rotationally vibrated masses

  • US 5,635,640 A
  • Filed: 06/06/1995
  • Issued: 06/03/1997
  • Est. Priority Date: 06/06/1995
  • Status: Expired due to Term
First Claim
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1. A micromachined device comprising:

  • a substrate;

    a rotatably movable first mass suspended over the substrate;

    a rotatably movable second mass suspended over the substrate; and

    a first coupling coupled to each of the first and second masses, the first coupling providing little resistance during relative anti-phase movement of the masses, and substantially resisting relative in-phase movement of the masses.

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