Edge feed ink delivery thermal inkjet printhead structure and method of fabrication

• US 5,635,966 A
• Filed: 04/29/1994
• Issued: 06/03/1997
• Est. Priority Date: 01/11/1994
• Status: Expired due to Term

• Current Assignee: Hewlett-Packard Development Company, L.P. (HP Inc.)
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Metz, Larry S., Bhaskar, Eldukar V., Beckmann, Jerome E., Childers, Winthrop D., Steinfield, Steven W., Trueba, Kenneth E., McClelland, Paul H., Stanback, John H., Hess, Ulrich E., Moore, Charles E., Keefe, Brian J., Hulings, James R., Fasen, Duane A.
• Primary Examiner(s): Royer, William J.
• Application Number:
  US08/235,610
• Time in Patent Office: 1,131 Days
• Field of Search: 347/43-45, 347/65, 347/75, 347/85, 347/58-59, 347/40, 347/71, 347/47, 347/63, 347/50, 156/644, 156/647, 428/447, 428/473.5, 437/133
• US Class Current: 347/43
• CPC Class Codes: B41J 2/04543 Block driving
• CPC Class Codes: B41J 2/04546 Multiplexing
• CPC Class Codes: B41J 2/0458 controlling heads based on heating elements forming bubbles
• CPC Class Codes: B41J 2/14024 Assembling head parts
• CPC Class Codes: B41J 2/1404 Geometrical characteristics
• CPC Class Codes: B41J 2/14072 Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
• CPC Class Codes: B41J 2/14129 Layer structure
• CPC Class Codes: B41J 2/1433 Structure of nozzle plates
• CPC Class Codes: B41J 2/1603 of the front shooter type
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1628 dry etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1634 laser machining
• CPC Class Codes: B41J 2/1635 dividing the wafer into individual chips
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1643 thin film formation by plating
• CPC Class Codes: B41J 2/1646 thin film formation by sputtering
• CPC Class Codes: B41J 2202/13 Heads having an integrated circuit

Abstract

This invention provides an apparatus and method of fabrication thereof for an inkjet printhead with an improved ink flow path between an ink reservoir and vaporization chambers in an inkjet printhead. In the preferred embodiment, a barrier layer containing ink channels and vaporization chambers is located between a rectangular substrate and a nozzle member containing an array of orifices. The substrate contains two linear arrays of heater elements, and each orifice in the nozzle member is associated with a vaporization chamber and heater element. The ink channels in the barrier layer have ink entrances generally running along two opposite edges of the substrate so that ink flowing around the edges of the substrate gain access to the ink channels and to the vaporization chambers. The apparatus is fabricated without using ion implant technology.

Claims

1. An ink-jet pen, comprising:

a plurality of ink reservoirs, each containing a different color ink;

a pen body for housing said ink reservoirs;

a nozzle member having a plurality of ink orifices formed therein; and

an integrated circuit, coupled to said nozzle member, having a substrate, having a first outer edge and a second outer edge;

a plurality of heating means formed on said substrate, each of said heating means being located proximate to an associated one of said orifices, for vaporizing a portion of ink and expelling droplets of said ink from said associated orifice; and

drive circuitry means, connected to said heating means, for selectively activating said heating means; and

a plurality of ink channels and a plurality of vaporization chambers, said ink channels communicating between said ink reservoirs and said vaporization chambers, each of said vaporization chambers being associated with an ink orifice and a heating means, such that said ink channels allow ink to flow around said first and second outer edges of said substrate and into said ink channels so as to deliver ink from one of said plurality of ink reservoirs to at least one of said vaporization chambers,

wherein each of said ink channels is bifurcated and includes;

i. a first fluid channel leading to selected ones of said orifices for communicating with an ink reservoir containing a first color ink, said first fluid channel allowing said first color ink to flow around said first outer edge of said substrate and proximate to said selected ones of said orifices, and

ii. a second fluid channel leading to other selected ones of said orifices for communicating with an ink reservoir containing a second color ink, said second fluid channel allowing said second color ink to flow around a second outer edge of said substrate and proximate to said other selected ones of said orifices; and

a barrier layer between said substrate and said nozzle member, wherein each of said ink channel is in said barrier layer.

2. The ink-jet pen of claim 1, wherein said barrier layer further comprises:

a patterned layer of insulating material formed on said substrate.

3. The ink-jet pen of claim 1, wherein said barrier layer is separate from said nozzle member and adhesively secured to a back surface of said nozzle member.

4. A print cartridge for an ink-jet printer comprising:

an ink reservoir for containing a plurality of ink supplies, each of said supplies containing an ink of a different color;

a nozzle member having a plurality of ink orifices formed therein;

a substrate, coupled to said nozzle member, having a first outer edge and a second outer edge;

a plurality of heating means formed on said substrate, each of said heating means being located proximately to an associated one of said orifices for vaporizing a portion of ink and expelling said ink from said associated one of said orifices for vaporizing a portion of ink and expelling said ink from said associated orifice; and

a barrier layer between said substrate and said nozzle member, having a fluid channel leading to each of said orifices from said ink reservoir, said fluid channel allowing ink from said ink reservoir to flow around said first outer edge and said second outer edge of said substrate proximate to said orifices, said fluid channel further comprising a plurality of ink channels and a plurality of vaporization chambers, each of said ink channels being fiuidically coupled between said ink reservoir and said vaporization chambers such that a differing color ink from said supplies flows through a separate channel, each of said vaporization chambers being associated with a predetermined specific ink orifice and its related heating means.

5. A method for manufacturing a thermal ink-jet printhead structure, comprising:

a. providing a substrate comprised of silicon;

b. forming a layer of silicon dioxide on said substrate;

c. forming a layer of silicon nitride on said layer of silicon dioxide;

d. removing a portion of said layer of silicon nitride so as to leave a section of silicon nitride remaining intact on said layer of silicon dioxide, said section of silicon nitride being surrounded by a plurality of exposed regions of said layer of silicon dioxide;

e. removing said exposed regions of said layer of silicon dioxide;

f. oxidizing said substrate beneath said exposed regions of said layer of silicon dioxide in order to form a field oxide layer surrounding said section of silicon nitride;

g. forming a layer of polycrystalline silicon on said section of silicon nitride, said layer of polycrystalline silicon, said section of silicon nitride, and said layer of silicon dioxide thereunder together forming a gate of a transistor;

h. forming a transistor source region and a transistor drain region within said substrate adjacent said gate;

i. applying a layer of dielectric material onto said field oxide layer, said gate, said source region, and said drain region;

j. forming a plurality of openings through said layer of dielectric material in order to provide access to said gate, said source region, and said drain region;

k. applying a layer of electrically resistive material onto said layer of dielectric material, said layer of electrically resistive material being in direct electrical contact with said gate, said source region, and said drain region through said openings;

l. applying a layer of conductive material onto said layer of electrically resistive material in order to form a multi-layer structure, said layer of electrically resistive material in said multi-layer structure having at least one uncovered section wherein said layer of conductive material is absent therefrom, said uncovered section functioning as a heating resistor, said layer of electrically resistive material being covered with said layer of conductive material at said source region, said drain region, and said gate of said transistor;

m. applying a portion of protective material onto said resistor, including the steps of;

i. applying a passivation and anti-cavitation layer onto said resistor;

ii. applying an ink barrier layer onto said anti-cavitation layer; and

n. securing a plate member having at least one opening therethrough onto said portion of protective material, said portion of protective material having a section thereof removed directly beneath said opening through said plate member in order to form an ink receiving cavity thereunder, said heating resistor being positioned beneath and in alignment with said ink receiving cavity in order to impart heat thereto;

said ink barrier layer including a fluid channel, communicating with an ink reservoir, leading from said reservoir to said opening and said heating resistor, said fluid channel allowing ink to flow from said ink reservoir around at least one outer edge of said substrate into said ink receiving cavity.

6. The method as set forth in claim 5, wherein said barrier layer further comprises:

a polymethylmethacrylate plastic laminate.

7. The method as set forth in claim 5, wherein said passivation and anti-cavitation layer further comprises:

an amorphous single layer of silicon nitride and silicon carbide in the form SiN_x /SiC_y.

8. An ink-jet printhead structure manufactured in accordance with the method as set forth in claim 5.

9. An ink-jet pen having a printhead structure manufactured in accordance with the method as set forth in claim 5.

10. An ink-jet printer having at least one ink-jet pen having a printhead structure manufactured in accordance with the method as set forth in claim 5.