System for optically measuring the surface contour of a part using more fringe techniques

• US 5,636,025 A
• Filed: 06/17/1994
• Issued: 06/03/1997
• Est. Priority Date: 04/23/1992
• Status: Expired due to Fees

• Current Assignee: Microscan Systems Inc (Omron Corporation)
• Original Assignee: Medar Incorporated (Nadex (Thailand) Co. Ltd.)
• Inventors: Michniewicz, Mark A., Bieman, Leonard H.
• Primary Examiner(s): Gonzalez, Frank
• Assistant Examiner(s): VIERRA EISENBERG, JASON D
• Application Number:
  US08/262,130
• Time in Patent Office: 1,082 Days
• Field of Search: 250/237 G, 356/376, 356/375, 356/374, 356/354, 356/356
• US Class Current: 356/619
• CPC Class Codes: G01B 11/2527 with phase change by in-plane movement of the patern

Abstract

An optical measuring system comprises an illumination arrangement including a light source, grating, and lens, and an image acquisition arrangement, including a lens, grating, and camera. A mechanical translation device moves the grating in a plane parallel to a reference surface to effect a phase shift of a projected image of the grating on the contoured surface to be measured. A second mechanical translation device moves the lens to effect a change in the contour interval. A first phase of the points on the contoured surface is taken, via a four-bucket algorithm, at a first contour interval. A second phase of the points is taken at a second contour interval. A controller, including a computer, determines a coarse measurement using the difference between the first and second phases. The controller further determines a fine measurement using either the first or second phase. The displacement or distance, relative to the reference plane, of each point is determined, via the controller, using the fine and coarse measurements.

Claims

1. A system for measuring a displacement of points on a contoured surface relative to a known plane, comprising:

illumination means for projecting a grating pattern on said contoured surface;

image acquisition means for viewing an image of said grating pattern on said contoured surface;

phase shifting means for shifting a phase of said viewed image of said grating pattern independent of variations in the displacement of points on the contoured surface relative to the known plane;

contour interval altering means for altering a contour interval of the viewed image of said grating pattern;

control means responsive to a plurality of phase shifted viewed images at a first contour interval for determining a first phase of preselected points on the contoured surface, said control means being further responsive to a second plurality of phase shifted viewed images at a second contour interval for determining a second phase of said preselected points,

said control means having means responsive to said determined first and second phases for determining the displacement, relative to said known plane, of said preselected points; and

,

compensation means optically intermediate said illumination means and said image acquisition means for providing comparison information to said control means to correct for positional errors caused by said phase shifting means and said contour interval altering means.

2. The system of claim 1, wherein said illumination means includes a light source and an optical grating, wherein said grating pattern is projected directly on said contoured surface.

3. The system of claim 2 wherein said contour interval altering means is operative to move said light source in said known plane toward or away from said image acquisition means.

4. The system of the claim 3 wherein said contour interval altering means is further operative to move said optical grating together with said light source.

5. The system of claim 4 wherein said image acquisition means includes a lens having a principal axis, and wherein said contour interval altering means is operative to move said light source and optical grating vertically along a line parallel to said principal axis to thereby field shift said grating pattern.

6. The system of claim 2 wherein said light source emits a narrow straight line of light.

7. The system of claim 1, wherein said compensation means includes a reflective reference surface positioned in known relationship to said known plane and a pair of mirrors disposed to reflect a portion of said grating pattern into the field of view of said image acquisition means.

8. The system of claim 1 wherein said contour interval altering means comprises a second illumination means spaced apart from said first illumination means for projecting a second grating pattern having a second contour interval.

9. The system of claim 8 wherein said first and second illumination means project respective first and second grating patterns having different colors of light.

10. The system of claim 1 further comprising a photoreactive material disposed in an optical path of said viewed image for reducing light intensity variation of said viewed image.

11. The system of claim 1 wherein said illumination means includes an active device for changing said grating pattern.