Method of fabricating an air-filled waveguide on a semiconductor body
First Claim
1. A method of fabricating an air-filled waveguide on a semiconductor body, comprising the steps of:
- (a) forming a patterned first layer of metallization on an outer surface of a semiconductor body;
(b) fabricating a mold of a waveguide on a support member by,(i) forming a relatively thick film coating of photo-sensitive material on said support member;
(ii) forming a mask on said coating,(iii) forming a cavity defining said waveguide in an unmasked portion of said coating,(iv) forming a second layer of metallization in said cavity and on said coating,(c) turning the mold over and locating it face down on said patterned first layer of metallization;
(d) bonding said first and second layers of metallization together; and
(e) removing said support member and said thick film coating, thereby leaving an air-filled waveguide formed on the outer surface of said semiconductor body.
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Accused Products
Abstract
A method of using layers of gold metallization and a thick film coating of photo-sensitive material to form an air-filled microwave waveguide structure on the outer surface of a semiconductor body, such as a monolithic microwave integrated circuit commonly referred to as an MMIC, so that the waveguide can be coupled to the active and passive devices of the MMIC. First, a patterned metallization layer is formed on a substrate. A mold of a waveguide is fabricated by masking and then etching another metallization layer. The mold is turned over face down on the patterned metallization layer and bonded to the patterned metallization layer, Then, any unnecessary material is etched away.
234 Citations
6 Claims
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1. A method of fabricating an air-filled waveguide on a semiconductor body, comprising the steps of:
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(a) forming a patterned first layer of metallization on an outer surface of a semiconductor body; (b) fabricating a mold of a waveguide on a support member by, (i) forming a relatively thick film coating of photo-sensitive material on said support member; (ii) forming a mask on said coating, (iii) forming a cavity defining said waveguide in an unmasked portion of said coating, (iv) forming a second layer of metallization in said cavity and on said coating, (c) turning the mold over and locating it face down on said patterned first layer of metallization; (d) bonding said first and second layers of metallization together; and (e) removing said support member and said thick film coating, thereby leaving an air-filled waveguide formed on the outer surface of said semiconductor body. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification