Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
First Claim
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1. A pressure sensor in a pressure transmitter, comprising:
- a pressure responsive structure;
a first capacitor plate having a back side attached to the pressure responsive structure and a front side;
a second capacitor plate having a back side attached to the pressure responsive structure and a front side, the first and second capacitor plates positioned to provide relative deflection therebetween in response to pressure applied to the pressure responsive structure; and
wherein the electric field between the first and second capacitor plates emanates substantially between the back sides of the first and second capacitor plates.
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Abstract
A transmitter in a process control system transmits a pressure over a process control loop. The transmitter includes I/O circuitry, compensation circuitry and an absolute pressure sensor. The I/O circuitry transmits information over the process control loop. Compensation circuitry receives a pressure related signal and responsively controls the I/O circuitry to transmit pressure information on the loop. The absolute pressure sensor includes a cavity which deforms as the sensor deflects in response to an applied pressure. A sensor in the cavity provides the pressure related signal to the compensation circuitry in response to the deformation.
179 Citations
7 Claims
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1. A pressure sensor in a pressure transmitter, comprising:
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a pressure responsive structure; a first capacitor plate having a back side attached to the pressure responsive structure and a front side; a second capacitor plate having a back side attached to the pressure responsive structure and a front side, the first and second capacitor plates positioned to provide relative deflection therebetween in response to pressure applied to the pressure responsive structure; and wherein the electric field between the first and second capacitor plates emanates substantially between the back sides of the first and second capacitor plates. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification