Method to detect non-spherical particles using orthogonally polarized light

• US 5,637,881 A
• Filed: 04/11/1995
• Issued: 06/10/1997
• Est. Priority Date: 04/01/1993
• Status: Expired due to Fees

• Current Assignee: Fisher Pierce Company
• Original Assignee: High Yield Technology
• Inventors: Borden, Peter, Burghard, Raymond, Aqui, Derek
• Primary Examiner(s): ALLEN, STEPHONE B
• Application Number:
  US08/421,572
• Time in Patent Office: 791 Days
• Field of Search: 250/573, 250/575, 250/574, 250/222.2, 250/225, 356/335, 356/336, 356/375, 356/343, 356/338, 356/37, 356/337
• US Class Current: 250/573
• CPC Class Codes: G01N 15/0205 by optical means
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence

Abstract

A structure and a method provide a quasi bright field particle sensor for the detection of non-spherical particles, using a laser beam of predetermined polarization. A phase shift caused by non-spherical particles passing through the laser beam is utilized to detect the presence of such particles. In one embodiment, a single laser beam is used to detect the concentration of non-spherical particles in the pump line receiving the exhaust gas from a process chamber.

Claims

1. A system comprising:

a process chamber; and

a particle monitor that uses a linearly-polarized laser beam to detect the concentration of non-spherical particles in said chamber.

2. A system as in claim 1, wherein said means comprises:

a laser source that emits a single beam of polarized light; and

a detector, located opposite said laser source, for measuring a rotation in polarization in said beam resulting from a non-spherical particle passing through said beam of polarized light.

3. A system as in claim 2, wherein said means further comprises a polarizer positioned for removing polarization noise in said laser beam.

4. A system as in claim 2, wherein said means further comprises a narrow band optical filter, placed before said detector, for removing noise from background light.

5. A system as in claim 2, wherein said means further comprises a tube through which said laser beam travels, said tube restricting the amount of background noise reaching said detector.

6. A system as in claim 2 that further comprises a pump line, coupled to said process chamber, for removing exhaust gas and particles from said chamber and wherein said laser source and said detector are mounted on said pump line.

7. A system as in claim 2, wherein said laser source and said detector are mounted on said process chamber.

8. A method for measuring the concentration of non-spherical particles in a process chamber comprising the steps of:

sending a single beam of linearly polarized light from a laser source to a detector opposite said laser source; and

measuring the rotation in polarization in said beam of polarized light, when a non-spherical particle passes through the beam.

9. A method as in claim 8, further comprising the steps of mounting said laser source and said detector on a pump line, coupled to said process chamber, wherein said pump line removes exhaust gas and particles from said chamber and wherein said beam travels in a direction perpendicular to the direction of the flow of said exhaust through said pump line.

10. A method as in claim 8, wherein said laser beam travels across said process chamber.