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Microfabricated reactor

  • US 5,639,423 A
  • Filed: 08/31/1992
  • Issued: 06/17/1997
  • Est. Priority Date: 08/31/1992
  • Status: Expired due to Term
First Claim
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1. A microfabricated chemical reactor, comprising:

  • a substrate defining a chamber in which the chemical reaction may occur, said chamber having a thin film wall; and

    an element microfabricated on said thin film wall for manipulation of a parameter of said chemical reaction.

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