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RPX’s CEO released a statement on our response to the COVID-19 emergency. Click here to access.

Capacitance based tunable micromechanical resonators

  • US 5,640,133 A
  • Filed: 06/23/1995
  • Issued: 06/17/1997
  • Est. Priority Date: 06/23/1995
  • Status: Expired due to Term
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