Plasma etching reactor with surface protection means against erosion of walls

• US 5,641,375 A
• Filed: 08/15/1994
• Issued: 06/24/1997
• Est. Priority Date: 08/15/1994
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Nguyen, Hoan Hai, Nitescu, Petru N.
• Primary Examiner(s): TUNG, TA HSUNG
• Application Number:
  US08/291,369
• Time in Patent Office: 1,044 Days
• Field of Search: 156/345 P, 156/643.1, 156/646.1, 216/67, 216/79
• US Class Current: 156/345.1
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: Y10S 156/916 Differential etching apparatus including chamber cleaning means or shield for preventing deposits

Abstract

A thin flexible removeable shield made of electrically conducting material presses against the interior walls of an apertured processing chamber to protect the processing chamber walls from erosion from the reactive plasma gases. The shield and walls are electrically interconnected with a sleeve-like conductive insert overlapping a surface portion of the shield and passing through the shield and lining a chamber aperture, with the insert also insuring the positioning of the insert against the wall. The remaining exposed surface of the shield has a protective anodization. A conductive connector preferably also connects the insert to another interior chamber structure at the same electrical potential as the chamber walls.

Claims

1. An apparatus for protecting the interior walls of a plasma processing chamber, said interior walls being at an electrical potential, comprising:

a removable, flexible shield comprising electrically conductive material, said shield having a first surface resiliently engaging the contours of the interior walls;

an electrically conductive area defined on a second surface of said shield; and

at least one electrically conductive member distinct from the shield engaging said conductive area to electrically couple said shield to an electrical potential substantially matching the electrical potential of the interior walls of the chamber.

2. An apparatus as in claim 1, wherein said flexible shield is of a circumferential dimension that is larger than the circumferential dimension of the interior walls.

3. An apparatus as in claim 1, wherein said electrically conductive member includes an electrically conductive insert member pressed against the shield thereby holding the shield against the interior walls.

4. An apparatus as in claim 3, wherein said insert member engages said conductive area and a portion of the interior walls of said chamber, whereby the walls and the shield are reliably maintained at substantially the same electrical potential.

5. An apparatus as in claim 4, wherein said interior walls define a first aperture, said shield defines a second aperture, and said insert member engages and electrically couples said shield to said walls via said apertures while fixing said shield in position against the walls.

6. An apparatus as in claim 5, further comprising an electrically conductive member extending between said insert and an interior chamber structure spaced from the interior walls engaged by said shield, additionally insuring that the interior walls and the shield will be maintained at substantially the same electrical potential.

7. An apparatus as in claim 3, further comprising a removable electrically conductive member attached to the electrically conductive insert member so as to form an electrical bridge between the electrically conductive insert member and a chamber structure having an electrical potential substantially matching said electrical potential of the interior walls.

8. An apparatus as in claim 1, wherein said interior walls are at electrical ground potential.

9. An apparatus as in claim 1, wherein said shield defines a surface facing the interior of said chamber upon which is formed a substantially non-reactive coating.

10. An apparatus as in claim 9, wherein said coating is an anodization.

11. An apparatus as in claim 1, wherein said shield defines a discontinuity which enables the ends of the shield adjacent said discontinuity to be overlapped when the shield is compressed.

12. An apparatus as in claim 11, wherein said discontinuity is of a width such that, when the shield is pressed against said interior walls, the discontinuity forms a seam with a minimum spacing between the ends abutting the seam.

13. An apparatus for protecting the interior walls of a plasma processing reactor chamber, said processing chamber having within the processing chamber a structure comprising an electrical coupling assembly at an electrical potential substantially matching the electrical potential of the interior walls, said apparatus comprising:

a removable, flexible shield comprised of electrically conductive material and having a first surface that presses against the contours of the interior walls, said shield including at least one electrically conductive area facing the interior of the processing chamber;

at least one removable electrically conductive insert, wherein each electrically conductive area of the flexible shield is pressed against by a separate insert so as to hold the shield in place against the interior walls thereby electrically coupling said insert to said shield, each insert including an extension electrically coupled to said electrical coupling assembly of said processing chamber, so that each insert, said shield, and said walls are maintained at a substantially matching electrical potential so as to avoid plasma arcing.

14. An apparatus as in claim 13, wherein said interior walls define a first aperture, said shield defines a second aperture, and said insert locks said shield into position against the interior walls via said first and second apertures.

15. A method of protecting the interior walls of a plasma processing reactor chamber, comprising the steps of:

placing a removable, electrically conductive, flexible shield of a diameter larger than the diameter of the interior walls within the plasma processing chamber;

rotating the shield so that it is aligned with the contours of the interior walls;

interlocking the shield against the chamber via an electrically conductive insert that is attached against the shield;

attaching a first end of an electrically conductive member to said insert to form a first end of an electrically conductive path; and

attaching a second end of said electrically conductive member to an electrically grounded area of the plasma processing chamber so as to form an electrically conductive path between the shield and the electrically grounded area of the plasma processing chamber.

16. A chamber liner assembly for a plasma processing chamber having an arcuate interior wall, said wall defining at least one aperture, said assembly comprising;

a thin, resilient band of conductive material sized for insertion over and about at least a substantial portion of the area of said arcuate wall, said band adapted upon insertion to press against said wall in resilient contact thereto and to define an aperture generally matching said chamber aperture;

an insert defining a sleeve portion of an outside configuration matching the shape of said chamber aperture, and a flanged portion at one end of said sleeve portion adapted to overlap and engage a portion of said band; and

a protective layer upon areas of the surface of said band exposed to the processes within the chamber;

said band being insertable into said chamber so as to align said apertures, said insert being insertable into said chamber wall through said apertures to interlock said band, chamber wall and insert and maintain the position of said band against said wall, while providing a positive electrical connection between said band and chamber wall to maintain both at the same electrical potential, thereby to minimize arcing and protect said chamber wall during plasma processing, said band and insert being capable of disassembly and replacement as desired.

17. The assembly of claim 16, in which an inwardly facing surface of said band includes said protective layer over all portions thereof except for a small area immediately adjacent said band aperture, and in which said flanged portion of said insert engages and fully overlaps said small area.

18. The assembly of claim 17, in which said protective layer comprises an anodization.

19. The assembly of claim 16, in which the insert, band, and the chamber wall are maintained at ground potential.

20. The assembly of claim 16, in which the insert is of the same material as the chamber wall.

21. The assembly of claim 16, in which said chamber further includes a central pedestal support assembly for supporting a workpiece to be processed within said chamber, said support assembly including a grounded perimeter member, said liner assembly further including at least one auxiliary electrical connection between said enlarged portion of said insert and said grounded perimeter member.

22. The assembly of claim 16, which further includes an electrical extension connector between said insert and a portion of the chamber not covered by said band.

23. The assembly of claim 16, in which said band is a continuous strip of circumference at least equal to that of said chamber wall.

24. The assembly of claim 16, in which said band is discontinuous, and of a length at least as great as the circumference of said chamber wall.

25. The assembly of claim 24, in which said discontinuous band defines matching cutout portions at its respective ends, said ends and cutout portions upon insertion of said band into said chamber abutting to define said aperture within said band matching said chamber aperture.

26. An assembly for protecting the interior walls of a plasma processing chamber which defines a recess, said assembly comprising:

a removable, flexible shield comprised of electrically conductive material, said shield pressing against the contours of the interior walls, said shield including an electrically conductive area facing the interior of the processing chamber, said shield defining an aperture adjacent said conductive area; and

at least one removable electrically conductive insert engaging said electrically conductive area of the flexible shield and the interior walls via said aperture and recess to hold said shield in place against the interior walls, and to electrically couple said shield, insert and walls and maintain the same at a substantially matching electrical potential, so as to prevent plasma arcing stemming from use of said shield.

27. An assembly as in claim 26, in which said insert is provided with an extension reaching to an interior structure spaced from said recess and at the same electrical potential as said walls, to further insure that said shield and walls are at matching electrical potential.

28. An assembly as in claim 26, in which said recess is an aperture, and said insert defines a hollow sleeve to protect the exposed surfaces of said aperture.

29. An assembly as in claim 26, which further includes a protective coating formed on portions of the shield surface facing the interior of the processing chamber which are not a part of said conductive area.