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Method of fabricating organic LED matrices

  • US 5,641,611 A
  • Filed: 08/21/1995
  • Issued: 06/24/1997
  • Est. Priority Date: 08/21/1995
  • Status: Expired due to Term
First Claim
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1. A method of patterning items of material on a supporting substrate comprising the steps of:

  • providing a supporting substrate with first and second laterally spaced apart conducting areas defined on the substrate, the first and second conducting areas defining first electrical contacts;

    forming a first layer of removable material on the substrate and a second layer of removable material on the first layer of removable material;

    forming an aperture through the second layer of removable material overlying the first conducting area and forming an opening through the first layer of removable material positioned between the aperture and the first and second conducting areas, remaining portions of the first layer of removable material defining the opening therein with a first transverse dimension exposing a portion of the surface of the substrate and remaining portions of the second layer of removable material defining the aperture therethrough with a second transverse dimension, smaller than the first transverse dimension, the second layer of removable material overlying a portion of the exposed surface of the substrate in the opening so as to divide the exposed surface of the substrate into a shadow area surrounding the first conducting area and a non-shadow area surrounding the second conducting area; and

    depositing a first material system, including a light emissive material and a second electrical contact, by evaporating the first material system in a vacuum chamber at a distance from the aperture so that evaporated particles of the first material system move toward the exposed surface of the substrate in generally parallel lines which are generally perpendicular to the aperture to form a first multi-layered electrical device of the first material system on the second conducting area of the surface of the substrate in the non-shadow area and depositing a second material system, including a light emissive material and a second electrical contact, by evaporating the second material system in a vacuum chamber at a distance from the aperture so that evaporated particles of the second material system move toward the exposed surface of the substrate in generally parallel lines which are at an angle to the aperture to form a second multi-layered electrical device of the second material system on the first conducting area of the surface of the substrate in the shadow area, the first and second multi-layered devices being laterally spaced apart in non-overlapping relationship; and

    removing the first and second layers of removable material from the substrate.

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