Elastomeric micro electro mechanical systems
First Claim
1. An electromechanical transducer, comprising:
- (a) a first substrate bearing a first plurality of elastomeric microstructures on one side of said substrate;
(b) a first microelectrode on each one of said first plurality of microstructures; and
,(c) power supply means electrically connected to said microelectrodes for controlled application of an electrical potential to said microelectrodes.
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Accused Products
Abstract
An electromechanical transducer having a substrate bearing a plurality of elastomeric microstructures with a microelectrode on each microstructure. A power supply is connected to the microelectrodes for controlled application to them of an electrical potential which alternately induces forces of attraction between adjacent pairs of microelectrodes, causing controlled, time-varying displacement of the microelectrodes. Alternatively, a further plurality of microelectrodes (or one or more macroelectrodes) are elastomerically supported above the microelectrodes, with the power supply being connected to the macroelectrode(s) such that the electrical potential applied between the microelectrodes and macroelectrode(s) alternately induces forces of attraction between the microelectrodes and macroelectrode(s), causing controlled, time-varying displacement of the microelectrodes relative to the macroelectrode(s). The macroelectrode(s) can also be applied to a side of the substrate opposite the microstructures.
444 Citations
17 Claims
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1. An electromechanical transducer, comprising:
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(a) a first substrate bearing a first plurality of elastomeric microstructures on one side of said substrate; (b) a first microelectrode on each one of said first plurality of microstructures; and
,(c) power supply means electrically connected to said microelectrodes for controlled application of an electrical potential to said microelectrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification