High density integrated ultrasonic phased array transducer and a method for making
First Claim
1. A method for forming a high density ultrasonic phased array transducer, the method comprising the steps of:
- forming a backfill material;
forming an array of unidirectional holes in the backfill material, each of the holes separated a predetermined distance apart from each other and having a predetermined depth within the backfill material;
depositing a conducting material in the array of holes forming a high density interconnect with uniaxial conductivity;
bonding a piezoelectric ceramic material and matching layers to the backfill material, the piezoelectric ceramic material and the matching layers bonding to the backfill material on a surface opposite the array of conducting holes; and
cutting at the surface opposite the array of conducting holes through a portion of the matching layers, the piezoelectric ceramic material, and the backfill material, forming an array of isolated individual elements each having multiple electrical connections therein.
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Abstract
The present invention discloses a high density integrated ultrasonic phased array transducer and method for making. The high density integrated ultrasonic phased array includes a backfill material having an array of holes formed therein. Each of the holes are separated a predetermined distance apart from each other and have a predetermined hole depth. Each of the holes contain a conducting material deposited therein forming a high density interconnect with uniaxial conductivity. A piezoelectric ceramic material is bonded to the backfill material at a surface opposite the array of conducting holes. Matching layers are bonded to the piezoelectric ceramic material. The surface opposite the array of conducting holes is cut through a portion of the matching layers, the piezoelectric ceramic material, and the backfill material, forming an array of isolated individual elements each having multiple electrical connections therein.
140 Citations
20 Claims
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1. A method for forming a high density ultrasonic phased array transducer, the method comprising the steps of:
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forming a backfill material; forming an array of unidirectional holes in the backfill material, each of the holes separated a predetermined distance apart from each other and having a predetermined depth within the backfill material; depositing a conducting material in the array of holes forming a high density interconnect with uniaxial conductivity; bonding a piezoelectric ceramic material and matching layers to the backfill material, the piezoelectric ceramic material and the matching layers bonding to the backfill material on a surface opposite the array of conducting holes; and cutting at the surface opposite the array of conducting holes through a portion of the matching layers, the piezoelectric ceramic material, and the backfill material, forming an array of isolated individual elements each having multiple electrical connections therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for forming a high density ultrasonic phased array transducer, the method comprising the steps of:
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forming a backfill material; forming an array of unidirectional holes in the backfill material, each of the holes separated a predetermined distance apart from each other and having a predetermined depth within the backfill material; depositing a conducting material in the array of holes forming a high density interconnect with uniaxial conductivity; metallizing a surface opposite the array of conducting holes; bonding a piezoelectric ceramic material and matching layers to the backfill material, the piezoelectric ceramic material and the matching layers bonding to the backfill material on the metallized surface; cutting at the surface opposite the array of conducting holes through a portion of the matching layers, the piezoelectric ceramic material, and the backfill material, forming an array of isolated individual elements each having multiple electrical connections therein; and patterning solder pads on the array of conducting holes. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A high density ultrasonic phased array transducer, comprising:
a backfill material having an array of holes formed therein, each of the holes separated a predetermined distance apart from each other and having a predetermined hole depth, each of the holes containing a conducting material deposited therein forming a high density interconnect with uniaxial conductivity;
a piezoelectric ceramic material bonded to the backfill material at a surface opposite the array of conducting holes; and
matching layers bonded to the piezoelectric ceramic material, the surface opposite the array of conducting holes having been cut through a portion of the matching layers, the piezoelectric ceramic material, and the backfill material, forming an array of isolated individual elements each having multiple electrical connections therein.- View Dependent Claims (18, 19, 20)
Specification