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Preloaded linear beam vibration sensor

  • US 5,644,086 A
  • Filed: 10/08/1996
  • Issued: 07/01/1997
  • Est. Priority Date: 10/08/1996
  • Status: Expired due to Fees
First Claim
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1. A linear beam vibration sensor, comprising:

  • a substrate defining a main body containing a pivot support;

    a see-saw beam having a mass at at least one end thereof pivotally mounted within said main body;

    hinge posts integrally formed on said see-saw beam intermediate the ends thereof, said hinge posts being received in hinge post receivers forming said pivot support to retain said see-saw beam for pivotal rotation;

    said mass on said beam and the location of said hinge posts thereon cooperating to pivotally unbalance said beam within said main body;

    a stopper disposed beneath a mass at one end of said beam and operative to supportively engage said beam at said one end to control the direction of pivotal rotation thereof;

    a cap attached to said main body and covering said see-saw beam, said pivot support and said beam rotation control means;

    means forming electrodes carried by said cap and disposed thereon to overlie said mass engaged by said stopper; and

    means for measuring changes in capacitance between said electrodes and said stopper-engaged mass occurring in response to pivotal movement of said beam.

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