Redundancy elements using thin film transistors (TFTs)

• US 5,644,540 A
• Filed: 02/17/1995
• Issued: 07/01/1997
• Est. Priority Date: 08/13/1993
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Manning, Monte
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): MAI, SON LUU
• Application Number:
  US08/390,348
• Time in Patent Office: 865 Days
• Field of Search: 365/96, 365/200, 365/225.7, 327/526, 327/567
• US Class Current: 365/200
• CPC Class Codes: G11C 16/0466 comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS] G11C16/0483, G11C16/0491 take precedence
• CPC Class Codes: G11C 29/789 using non-volatile cells or latches

Abstract

An embodiment of the present invention describes a redundancy repair circuit fabricated in a Static Random Access Memory (SRAM) semiconductor device, with the redundancy repair circuit comprising: a plurality of thin film transistors (TFTs); a programming pad connecting to serially connected control gates of the plurality of TFTs; the plurality of TFTs having their individual source/drain terminals connecting between substitution logic and an address multiplexer. The redundancy repair circuit is operated by a method for shifting the threshold voltages of the TFTs using a programming pad connected serially to the control gates of a plurality of TFTs; the plurality of TFTs having their individual output terminals connecting between substitution logic and an address multiplexer; selecting an individual TFT by the address multiplexer; shorting at least one of the output terminals of the selected TFT to approximately a 5 V potential; shorting the output terminals of the remaining (non-selected) TFTs to approximately a 0 V potential; and applying a programming signal to the programming pad, the programming signal is sufficient to cause the threshold voltage of the selected TFT to shift approximately 1 V by injecting electrons into the TFT'"'"'s gate dielectric region while not effecting the threshold voltage of each individual said non-selected TFTs.

Claims

1. A method for using field effect transistors (FETs) as programmable redundancy elements in a redundancy repair circuit having a plurality of FETs, said method comprising:

applying a first potential to an output terminal of each FET selected for programming; and

applying a programming signal to the gate of each said selected FET that is sufficient to cause the threshold voltage of each selected FET to shift by injecting charge into the FET'"'"'s gate insulation region such that the shift in threshold voltage is detectable from the threshold voltage of a non-selected FET.

2. The method of claim 1, wherein said FETs comprise thin film transistors (TFTs).

3. The method of claim 1, wherein said programming signal comprises a voltage source.

4. The method of claim 1, wherein said programming signal comprises a current source.

5. A method for shifting the threshold voltages of field effect transistors (FETs) in a redundancy repair circuit fabricated in a semiconductor device, said method comprising:

using a programming pad connected serially to the control gates of a plurality of FETs;

selecting individual FETs;

shorting at least one of the output terminals of each selected FET to a first potential that is approximately at 5 V;

shorting the output terminals of the remaining (non-selected) FETs to a second potential that is approximately 0 V and thereby producing an

approximate 5 V offset between said first and second potentials; and

applying a programming signal to said programming pad, said programming signal is sufficient to cause the threshold voltage of each selected FET to shift approximately 1 V by injecting electrons into the FET'"'"'s gate dielectric region while not effecting the individual threshold voltage of each said non-selected FETs.

6. The method of claim 5, wherein said FETs comprise thin film transistors (TFTs).

7. The method of claim 5, wherein said first potential comprises the semiconductor device'"'"'s operating potential.

8. The method of claim 5, wherein said second potential comprises the semiconductor device'"'"'s ground potential.

9. The method of claim 5, wherein said programming signal comprises a voltage source.

10. The method of claim 5, wherein said programming signal comprises a current source.

11. The method of claim 5, wherein said method is performed after said semiconductor device is packaged.

12. The method of claim 6, wherein said TFT'"'"'s gate dielectric comprises at least one dielectric layer selected from the group consisting of oxide or nitride.

13. The method of claim 5, wherein said output terminals comprise source and drain terminals.

14. The method of claim 5, wherein said semiconductor device comprises a Static Random Access Memory (SRAM) semiconductor device.

15. A method for using p-channel field effect transistors (FETs) as programmable redundancy elements in a redundancy repair circuit, said method comprising:

applying a first potential to an output terminal of each p-channel FET selected for programming; and

applying a programming signal to the gate of each said selected p-channel FET that is sufficient to shift the threshold voltage of each selected p-channel FET such that the shift in threshold voltage is detectable from the threshold voltage of a non-selected p-channel FET.

16. The method of claim 15, wherein said programming signal comprises a voltage source.

17. The method of claim 15, wherein said programming signal comprises a current source.

18. A method for shifting the threshold voltages of p-channel field effect transistors (FETs) in a redundancy repair circuit fabricated in a semiconductor device, said method comprising:

using a programming pad connected serially to the control gates of a plurality of p-channel FETs;

selecting individual p-channel FETs;

shorting at least one of the output terminals of each selected p-channel FET to a first potential that is approximately at 5 V;

shorting the output terminals of the remaining (non-selected) p-channel FETs to a second potential that is approximately 0 V and thereby producing an approximate 5 V offset between said first and second potentials; and

applying a programming signal to said programming pad, said programming signal is sufficient to cause the threshold voltage of each selected p-channel FET to shift approximately 1 V by injecting electrons into the p-channel FET'"'"'s gate dielectric region while not effecting the individual threshold voltage of each said non-selected p-channel FETs.

19. The method of claim 18, wherein said first potential comprises the semiconductor device'"'"'s operating potential.

20. The method of claim 18, wherein said second potential comprises the semiconductor device'"'"'s ground potential.

21. The method of claim 18, wherein said programming signal comprises a voltage source.

22. The method of claim 18, wherein said programming signal comprises a current source.

23. The method of claim 18, wherein said method is performed after said semiconductor device is packaged.

24. The method of claim 18, wherein said p-channel FET'"'"'s gate dielectric comprises at least one dielectric layer selected from the group consisting of oxide or nitride.

25. The method of claim 18, wherein said output terminals comprise source and drain terminals.

26. The method of claim 18, wherein said semiconductor device comprises a Static Random Access Memory (SRAM) semiconductor device.