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Method of fabricating a focal plane array for hybrid thermal imaging system

  • US 5,644,838 A
  • Filed: 01/03/1995
  • Issued: 07/08/1997
  • Est. Priority Date: 01/03/1995
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating an array of thermal sensitive elements for use with a hybrid thermal imaging system, the method comprising the steps of:

  • forming a layer of optical coating on a carrier substrate;

    forming a film layer of pyroelectric material on the optical coating layer by mixing particles with liquid pyroelectric material to provide nucleation sites for growing the film layer;

    depositing a first layer of electrically conducting material between the optical coating layer and the pyroelectric film layer; and

    forming a second layer of electrically conducting material on the pyroelectric film layer opposite from the first layer of electrically conducting material; and

    patterning the pyroelectric film layer to form an array of thermal sensitive elements.

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