Dual cylindrical target magnetron with multiple anodes

• US 5,645,699 A
• Filed: 06/21/1996
• Issued: 07/08/1997
• Est. Priority Date: 09/06/1994
• Status: Expired due to Fees

• Current Assignee: Von Ardenne Anlagentechnik GmbH
• Original Assignee: BOC Group Pty Limited (Linde Plc)
• Inventors: Sieck, Peter A.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US08/667,773
• Time in Patent Office: 382 Days
• Field of Search: 204/192.12, 204/298.14, 204/298.22, 204/298.26
• US Class Current: 204/192.12
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3438 Electrodes other than cathode

Abstract

Two adjacent rotating cylindrical targets are used in a specific form of a vacuum sputtering system to deposit a film of material onto a substrate. Elongated anodes are provided on opposite sides and in between the targets in a manner to make more uniform the rate of deposition across the substrate.

Claims

1. In a magnetron having at least first and second targets from which material is sputtered in order to deposit a film on a substrate, each of said first and second targets being symmetrically shaped about an axis, said targets being held with their said axes oriented parallel to each other and with a space between the targets in a direction orthogonal to said axes, an improved anode arrangement, comprising:

first and second elongated anodes with lengths thereof positioned parallel to said axes, said first and second anodes being spaced apart from said targets along sides thereof remote from said space, and

at least a third elongated anode positioned parallel to said axes and in the space between said first and second targets.

2. The magnetron of claim 1 wherein said first, second, and third elongated anodes have lengths extending substantially the lengths of the first and second targets.

3. The magnetron of claim 1, additionally comprising a fourth elongated anode positioned in the space between said first and second targets, wherein said third anode faces said first target and said fourth anode faces said second target, and comprising first and second power supplies, said first power supply being connected between said first target and said first and third anodes, and said second power supply being connected between said second target and said second and fourth anodes.

4. Apparatus for depositing a film of material onto a substrate within a vacuum chamber which includes first and second adjacent elongated target surfaces and anode surfaces, an electrical power supply outside of said vacuum chamber being connected with said target and anode surfaces, said apparatus further comprising:

first and second magnet structures respectively associated with each of said first and second target surfaces, each of said magnet structures defining an elongated closed loop sputtering zone on its associated target surface that is symmetrical about a central axis that extends along a length of the target surface, whereby electrons drift in a defined direction around the sputtering zone adjacent the target surface, the central axes of said first and second magnetic structures being maintained parallel with each other, and

said anode surfaces including first and second surface areas adjacent opposite sides of said first target surface at diagonally opposed corners thereof in positions to capture drift electrons that escape the sputtering zone when turning a corner at a respective end thereof, and third and fourth surface areas adjacent opposite sides of said second target surfaces at diagonally opposed corners thereof in positions to capture drift electrons that escape the sputtering zone when turning a corner at respective ends thereof.

5. Apparatus according to claim 4 wherein each of said first, second, third and fourth anode surface areas are provided as part of respective elongated first, second, third, and fourth anode structures which are oriented parallel to said sputtering zone central axes and extend substantially an entire length of said sputtering zones.

6. Apparatus according to claim 4 wherein said drift current defined direction is the same around each of said first and second target surfaces.

7. Apparatus for depositing a film of material onto a substrate within a vacuum chamber, comprising:

at least first and second cylindrically shaped target surfaces positioned adjacent each other and rotatable about respective cylindrical axes thereof which are maintained parallel to each other,

an elongated magnetic structure non-rotatably held within each of the first and second targets, thereby to define a sputtering zone in a region of the target surface through which the magnetic field of its associated magnetic structure passes,

means for moving the substrate in a direction that is orthogonal to the target surface axes,

first and second elongated anodes with lengths oriented in a direction parallel to the target axes and positioned respectively along oppositely positioned sides of the first and second target surfaces,

third and fourth elongated anodes with lengths oriented in a direction parallel to the target axes and positioned in between the first and second targets, the third anode facing the first target and the fourth anode facing the second target,

a first power supply with a negative polarity terminal connected to the first target and a positive polarity terminal connected to the first and third anodes, and

a second power supply with a negative polarity terminal connected to the second target and a positive polarity terminal connected to the second and fourth anodes.

8. A method of depositing electrically conductive films on substrates within a vacuum chamber including at least first and second targets including electrically conductive material and provided with magnetic structures to form respective first and second elongated closed loop sputtering zones across surfaces of the targets, thereby to form zones of electron drift around the sputtering zones, comprising utilizing four anode surface areas adjacent the first and second targets with one of said four anode surface areas positioned at each end of said first and second elongated sputtering zones with an orientation that captures electrons that leave the sputtering zones at the ends thereof.

9. The method according to claim 8 wherein each of said four anode surface areas is provided as part of an elongated anode extending substantially the length of the sputtering zones.