Process for producing semiconductor devices using resin tablets
First Claim
1. A process for producing a semiconductor device comprising sealing a semiconductor chip with a resin tablet having a compressibility of not less than 98% and a metallic impurity content of less than 50 ppm which is obtained by cooling and solidifying a molten resin composition, by transfer molding.
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Abstract
A resin tablet for sealing by transfer molding a semiconductor, which is obtained by cooling and solidifying a molten resin composition, is disclosed. The tablet has a compressibility of not less than 98% and a metallic impurity content of less than 50 ppm, preferably with the amount of fine powders of 250 mesh or smaller adhered thereto being controlled below 0.05% by weight based on the tablet and a water content being controlled below 0.1% by weight.
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Citations
9 Claims
- 1. A process for producing a semiconductor device comprising sealing a semiconductor chip with a resin tablet having a compressibility of not less than 98% and a metallic impurity content of less than 50 ppm which is obtained by cooling and solidifying a molten resin composition, by transfer molding.
Specification