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Microfabricated reactor

  • US 5,646,039 A
  • Filed: 06/06/1995
  • Issued: 07/08/1997
  • Est. Priority Date: 08/31/1992
  • Status: Expired due to Term
First Claim
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1. A microfabricated reactor, comprising:

  • a substrate defining a chamber in which a measurement of viscosity may occur corresponding to a parameter of a reaction, said chamber having a thin film wall;

    an element microfabricated on said thin film wall for manipulation of a property of said reaction;

    at least one Lamb-wave transducer located on another wall of said chamber;

    such that said at least one Lamb-wave transducer measures the viscosity of contents of said chamber corresponding to said parameter, thereby preventing boundary layer effects from reducing the effectiveness of said viscosity measurement.

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