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Suspension for micromechanical structure and micromechanical acceleration sensor

  • US 5,646,347 A
  • Filed: 08/31/1995
  • Issued: 07/08/1997
  • Est. Priority Date: 09/03/1994
  • Status: Expired due to Term
First Claim
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1. A device comprising:

  • a substrate;

    a micromechanical structure;

    a first anchorage mounted on the substrate;

    at least one lever element, a first side of the lever element being attached to the first anchorage, and a second side of the lever element being attached to the micromechanical structure to form a first point of action; and

    an equalizing element for eliminating stresses on the micromechanical structure, the equalizing element being attached to the second side of the lever element to form a second point of action, the lever element being adapted to be flexed by a stress in the equalizing element.

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