Micromechanical sensor with a guard band electrode and fabrication technique therefor

• US 5,646,348 A
• Filed: 09/05/1995
• Issued: 07/08/1997
• Est. Priority Date: 08/29/1994
• Status: Expired due to Term

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Greiff, Paul, Sohn, Jerome B.
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US08/523,401
• Time in Patent Office: 672 Days
• Field of Search: 73/514.17, 73/514.18, 73/514.23, 73/514.32, 73/514.36, 73/514.16, 73/777, 310/309, 324/687, 324/688, 361/280, 361/283.1, 361/283.2, 361/283.3, 361/283.4, 361/290, 361/291, 437/228 SEN, 437/901, 437/921, 437/927, 437/148, 437/DIG. 159, 257/415
• US Class Current: 73/514.36
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An electrostatically actuated micromechanical sensor having a guard band electrode for reducing the effect of transients associated with a dielectric substrate of the sensor. A proof mass, responsive to an input, is suspended over the substrate and one or more electrodes are disposed on the substrate in electrostatic communication with the proof mass to sense the input acceleration and/or to torque the proof mass back to a null position. A guard band electrode is disposed over the dielectric substrate in overlapping relationship with the electrodes and maintains the surface of the substrate at a reference potential, thereby shielding the proof mass from transients and enhancing the accuracy of the sensor. A dissolved wafer process for fabricating the micromechanical sensor is described in which the proof mass is defined by a boron doping step. An alternative fabrication technique is also described in which the proof mass is defined by an epitaxial layer.

Claims

1. A method of fabricating a micromechanical sensor comprising the steps of:

providing a silicon substrate with a P+ epitaxial layer doped with boron to a concentration greater than approximately 10²⁰ thereover;

selectively etching said silicon substrate so as to define a proof mass in said silicon substrate wherein said epitaxial layer provides an etch stop;

depositing a sense electrode responsive to an excitation signal on a glass substrate; and

bonding said epitaxial layer to said glass substrate to provide said sensor.

2. The method recited in claim 1 further comprising the steps of patterning a selected portion of said epitaxial layer with resist;

and

etching said epitaxial layer to form a post extending from said epitaxial layer and to define a thickness of said epitaxial layer to provide said proof mass of said sensor, wherein said post is bonded to said glass substrate.

3. The method recited in claim 1 further comprising the step of removing said silicon substrate once said epitaxial layer is bonded to said glass substrate.

4. The method recited in claim 3 wherein said removing step includes the step of etching said silicon substrate with EDP etchant.

5. A method of fabricating a micromechanical sensor comprising the steps of:

providing a silicon substrate with an epitaxial layer thereover in which a proof mass of said sensor is formed;

depositing a sense electrode responsive to an excitation signal on a glass substrate;

bonding said epitaxial layer to said glass substrate to provide said sensor; and

depositing a guard band electrode on said glass substrate in overlapping relationship with said sense electrode.

6. The method recited in claim 5 wherein said guard band depositing step further comprises the step of depositing an insulating layer over said glass substrate in overlapping relationship with said sense electrode and depositing said guard band electrode over said insulating layer.

7. A micromechanical sensor device comprising:

a dielectric substrate having a surface;

a proof mass comprising an epitaxial layer suspended over said surface of said dielectric substrate, said proof mass being responsive to an input stimulus and forming a first capacitor plate;

a first electrode disposed over said surface of said dielectric substrate for coupling an excitation signal to said proof mass and forming a second capacitor plate;

a second electrode for sensing out-of-plane deflection of said proof mass;

an insulating layer disposed over said surface of said dielectric substrate in overlapping relationship with a portion of said first electrode and said second electrode; and

a guard band electrode disposed over said insulating layer so as to overlap said portion of said first electrode and said portion of said second electrode, said guard band electrode receiving a reference potential for shielding said proof mass from spurious charge on said surface of the dielectric substrate.

8. The micromechanical sensor device recited in claim 7 wherein said proof mass is suspended over said surface of said dielectric substrate by a post portion of said epitaxial layer.

9. The micromechanical sensor device recited in claim 7 wherein said dielectric substrate is comprised of glass.