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Control type vibro-isolating support

  • US 5,647,579 A
  • Filed: 03/27/1996
  • Issued: 07/15/1997
  • Est. Priority Date: 03/31/1995
  • Status: Expired due to Fees
First Claim
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1. A control type vibro-isolating support, comprising:

  • a source of control vibration which is interposed between a vibrator and a support body, and which can generate control vibration;

    reference signal generation means for detecting the state of the vibration being generated by said vibrator, and for outputting a reference signal;

    residual vibration detection means for detecting residual vibration on said support body side; and

    for outputting a residual vibration signal;

    control means for generating a drive signal for driving said source of control vibration on the basis of said reference signal and said residual vibration signal so as to damp the vibration on said support body side;

    state detection means for detecting the state of said vibro-isolating support; and

    abnormality judgment means for judging if there is abnormality on the basis of the detection result of said state detection means.

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