Plasma cleaning method for removing residues in a plasma process chamber

• US 5,647,953 A
• Filed: 12/22/1995
• Issued: 07/15/1997
• Est. Priority Date: 12/22/1995
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Williams, Larry, Ebel, Timothy, Harshbarger, William, Pirkle, David R.
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): ADJODHA, MICHAEL
• Application Number:
  US08/577,340
• Time in Patent Office: 571 Days
• Field of Search: 134/1.1, 216/67, 156/643.1
• US Class Current: 134/1.1
• CPC Class Codes: B08B 7/0035 by radiant energy, e.g. UV, laser, light beam or the like
• CPC Class Codes: C23C 16/4404 Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: Y10S 438/905 Cleaning of reaction chamber

Abstract

A method for cleaning and conditioning a plasma processing chamber wherein oxide residues have been previously formed on interior surfaces of the chamber. The method includes introducing a cleaning gas including a fluorine-based gas into the chamber followed by performing a plasma cleaning step. The plasma cleaning step is performed by activating the cleaning gas mixture and forming a plasma cleaning gas, contacting interior surfaces of the chamber with the plasma cleaning gas and removing oxide residues on the interior surfaces. The cleaning step is followed by coating the interior surfaces with silicon dioxide to adhere loose particles to the interior surfaces and a conditioning step wherein uncoated interior surfaces are treated to remove fluorine therefrom. An advantage of the cleaning and conditioning method is that it is not necessary to open the chamber. Also, it is possible to remove oxide residues during the cleaning step and remove fluorine remaining after the cleaning step during the conditioning step. The conditioning step is carried out by introducing a hydrogen-containing gas into the chamber as a purge gas or the chamber can be pressurized by the hydrogen-containing gas followed by evacuating the chamber.

Claims

1. A plasma cleaning method for removing oxide residues in a plasma process chamber wherein substrates are processed, comprising steps of:

introducing a cleaning gas comprising a fluorine-based gas into the plasma process chamber;

performing a plasma cleaning step by activating the cleaning gas and forming a plasma cleaning gas, contacting interior surfaces of the chamber with the plasma cleaning gas for a time sufficient to remove oxide residues on the interior surfaces;

coating the interior surfaces with silicon dioxide, the coating step being carried out by introducing a coating gas mixture comprising a silicon-containing gas into the chamber, activating the coating gas mixture and forming a plasma coating gas, and contacting the interior surfaces with the plasma coating gas until the interior surfaces are coated with silicon dioxide; and

conditioning uncoated interior surfaces by introducing a conditioning gas comprising a hydrogen-containing gas into the chamber, contacting the interior surfaces with the conditioning gas in a non-plasma state for a time sufficient to remove fluorine from the interior surfaces.

2. The method of claim 1, wherein the fluorine-based gas comprises 100% by volume of the cleaning gas.

3. The method of claim 1, wherein the cleaning gas further comprises ≦

10 volume % of an oxygen-containing gas.

4. The method of claim 1, wherein the cleaning gas further contains ≦

10 volume % of argon.

5. The method of claim 1, wherein the hydrogen-containing gas comprises SiH₄.

6. The method of claim 1, wherein the fluorine-based gas comprises NF₃, SF₆, a fluorocarbon or mixture thereof.

7. The method of claim 6, wherein the fluorocarbon comprises CF₄, C₂ F₆ or mixture thereof.

8. The method of claim 1, wherein the plasma cleaning gas converts silicon dioxide on the interior surfaces to gas by-products.

9. The method of claim 1, wherein the chamber is evacuated during the cleaning step.

10. The method of claim 1, wherein the conditioning step is carried out by flowing the hydrogen-containing gas through the chamber.

11. The method of claim 1, wherein the conditioning step is carried out by flowing the hydrogen-containing gas into the chamber and building up pressure to 0.25 to 1 Torr therein followed by suddenly evacuating the chamber and removing the hydrogen-containing gas and loose particles therefrom.

12. The method of claim 1, further comprising a step of depositing one or more layers on at least one semiconductor substrate in the chamber prior to the plasma cleaning step, the layers including at least one oxide film and the depositing step causing oxide residues to be deposited on interior surfaces of the chamber.

13. The method of claim 12, wherein the oxide residues are removed by the plasma cleaning gas.

14. The method of claim 1, wherein the conditioning step removes fluorine from the interior surfaces in the form of SiF₄ and HF₄.

15. The method of claim 1, wherein the coating step is carried out until the coating has a thickness of 2000 Å

to 2 μ

m.

16. The method of claim 1, wherein the conditioning step is followed by introducing a substrate into the chamber and depositing an oxide layer on the substrate.

17. The method of claim 1, wherein the plasma cleaning gas is generated in a plasma generating chamber of an ECR reactor and the coating step coats interior surfaces in a substrate treatment chamber located adjacent the plasma generating chamber.

18. The method of claim 1, wherein the chamber is located in an ECR reactor.

19. The method of claim 1, wherein the silicon dioxide is coated directly on the interior surfaces during the coating step.

20. The method of claim 1, wherein the interior surfaces are maintained at a temperature below 100°

C. during the conditioning step.

21. A plasma cleaning method for removing oxide residues in a plasma process chamber wherein substrates are processed, comprising steps of:

introducing a cleaning gas comprising a fluorine-based gas into the plasma process chamber;

performing a plasma cleaning step by activating the cleaning gas and forming a plasma cleaning gas, contacting interior surfaces of the chamber with the plasma cleaning gas for a time sufficient to remove oxide residues on the interior surfaces;

coating the interior surfaces with silicon dioxide, the coating step being carried out by introducing a coating gas mixture comprising a silicon-containing gas into the chamber, activating the coating gas mixture and forming a plasma coating gas, and contacting the interior surfaces with the plasma coating gas until the interior surfaces are coated with silicon dioxide;

the coating gas comprising SiH₄, O₂ and Ar and

conditioning uncoated interior surfaces by introducing a conditioning gas comprising a hydrogen-containing gas into the chamber, contacting the interior surfaces with the conditioning gas in a non-plasma state for a time sufficient to remove fluorine from the interior surfaces.

22. The method of claim 21, wherein the O₂ and SiH₄ are present in a ratio of O₂ :

SiH₄ of 1.3-4;

1.

23. A plasma cleaning method for removing oxide residues in a plasma process chamber wherein substrates are processed, comprising steps of:

introducing a cleaning gas comprising a fluorine-based gas into the plasma process chamber;

performing a plasma cleaning step by activating the cleaning gas and forming a plasma cleaning gas, contacting interior surfaces of the chamber with the plasma cleaning gas for a time sufficient to remove oxide residues on the interior surfaces;

coating the interior surfaces with silicon dioxide, the coating step being carried out by introducing a coating gas mixture comprising a silicon-containing gas into the chamber, activating the coating gas mixture and forming a plasma coating gas, and contacting the interior surfaces with the plasma coating gas until the interior surfaces are coated with silicon dioxide;

conditioning uncoated interior surfaces by introducing a conditioning gas comprising a hydrogen-containing gas into the chamber, contacting the interior surfaces with the conditioning gas in a non-plasma state for a time sufficient to remove fluorine from the interior surfaces; and

the chamber being located in an ECR reactor and including water-cooled aluminum chamber walls and at least one water-cooled aluminum component maintained at a temperature of less than 100°

C. during the plasma cleaning step, the component being coated with a silicon dioxide coating which traps Al and F in the coating.