Photoresist stripping composition

• US 5,648,324 A
• Filed: 01/23/1996
• Issued: 07/15/1997
• Est. Priority Date: 01/23/1996
• Status: Expired due to Fees

• Current Assignee: Fujifilm Electronic Materials USA Incorporated (Fujifilm Holdings Corporation)
• Original Assignee: OCG Microelectronic Materials Incorporated
• Inventors: Honda, Kenji, Perry, Donald F., Maw, Taishih
• Primary Examiner(s): Willis, Jr., Prince
• Assistant Examiner(s): Toomer, Cephia D.
• Application Number:
  US08/590,005
• Time in Patent Office: 539 Days
• Field of Search: 510/176, 510/255, 510/500, 510/245, 252/394, 134/38
• US Class Current: 510/176
• CPC Class Codes: C11D 7/32 containing nitrogen
• CPC Class Codes: C11D 7/34 containing sulfur
• CPC Class Codes: C11D 7/5009 containing phosphorus, sulfur or silicon, e.g. dimethylsulfoxide
• CPC Class Codes: G03F 7/425 containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen

Abstract

A photoresist stripping composition containing:

(a) 20-70% by weight of an organic polar solvent having a dipole moment of more than 3.5;

(b) 70-20% by weight of alkanolamine compounds; and

(c) 0.1-10% by weight of 2,2'"'"'[[methyl-1H-benzothiazol-1-yl)methyl]imino]bis-ethanol.

Claims

1. A photoresist stripper composition comprising:

(a) from about 20 to about 70% by weight of an organic polar solvent having a dipole moment of more than 3.5;

(b) from about 70 to about 20% by weight of an alkanolamine compound; and

(c) from about 0.1 to about 10% by weight of 2,2'"'"'-[[(methyl-1H-benzothiazol-1-yl)methyl]imino]bis-ethanol;

all percents based on the weight of the stripper composition.

2. The stripper composition of claim 1 wherein said solvent (a) is a cyclic amide.

3. The stripper composition of claim 2 wherein said cyclic amide is selected from the group consisting of N-alkyl-2-pyrrolidone, N-hydroxyalkyl-2-pyrrolidone, and mixtures thereof.

4. The stripper composition of claim 1 wherein said alkanolamine is selected from the group consisting of monoethanolamine, 2-(2-aminoethoxy)ethanol and 2-(2-aminoethylamino)ethanol, diethanolamine, and triethanolamine.