Micromachined hinge having an integral torsion sensor
First Claim
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1. A silicon micromachined hinge that includes an integral torsion sensor, said silicon micromachined hinge comprising:
- an elongated, single crystal silicon, micromachined bar having a length and a thickness, a major axis disposed along the length of said bar, and major surfaces that are disposed on opposite sides of said bar, that span between opposed ends of said bar, and to which are secured masses that are fabricated integrally with said bar by micromachining, said masses being capable of rotationally twisting said bar in a restorable manner about the major axis;
a four-terminal piezo voltage sensor for sensing torsion in said bar, said four-terminal piezo voltage sensor including;
at least two spaced-apart current electrodes disposed on a first of the major surfaces of said bar for making ohmic contact to an adjacent layer of silicon, said current electrodes being adapted for transmitting an electric current through the silicon; and
at least two spaced-apart voltage sensing electrodes disposed on the first of the major surfaces of said bar along a line generally perpendicular to electric current flow through the silicon between the current electrodes;
whereby upon application of a torsional force to said bar, by rotation of the masses about the major axis of said bar, concurrently with transmission of electric current between the current electrodes through the adjacent layer of silicon, a voltage, generated by the silicon in response to concurrent application of the torsional force and the electric current flow, appears across the voltage sensing electrodes.
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Abstract
An elongated micromachined silicon hinge includes an integral four-terminal piezo voltage torsion sensor. The micromachined hinge is disposed between masses that are located at opposite ends of the hinge, and that are fabricated integrally with the hinge by micromachining. Concurrent application of a torsional force to the hinge, by rotation of the masses about the hinge'"'"'s longitudinal axis, and an electric current through the hinge'"'"'s silicon, generates a voltage that appears across a pair of voltage sensing electrodes.
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Citations
14 Claims
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1. A silicon micromachined hinge that includes an integral torsion sensor, said silicon micromachined hinge comprising:
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an elongated, single crystal silicon, micromachined bar having a length and a thickness, a major axis disposed along the length of said bar, and major surfaces that are disposed on opposite sides of said bar, that span between opposed ends of said bar, and to which are secured masses that are fabricated integrally with said bar by micromachining, said masses being capable of rotationally twisting said bar in a restorable manner about the major axis; a four-terminal piezo voltage sensor for sensing torsion in said bar, said four-terminal piezo voltage sensor including; at least two spaced-apart current electrodes disposed on a first of the major surfaces of said bar for making ohmic contact to an adjacent layer of silicon, said current electrodes being adapted for transmitting an electric current through the silicon; and at least two spaced-apart voltage sensing electrodes disposed on the first of the major surfaces of said bar along a line generally perpendicular to electric current flow through the silicon between the current electrodes; whereby upon application of a torsional force to said bar, by rotation of the masses about the major axis of said bar, concurrently with transmission of electric current between the current electrodes through the adjacent layer of silicon, a voltage, generated by the silicon in response to concurrent application of the torsional force and the electric current flow, appears across the voltage sensing electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification