Dichroic mirror and projector having the same

• US 5,648,870 A
• Filed: 08/16/1994
• Issued: 07/15/1997
• Est. Priority Date: 07/26/1990
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Mistutake, Hideaki
• Primary Examiner(s): Shafer, Ricky D.
• Application Number:
  US08/291,343
• Time in Patent Office: 1,064 Days
• Field of Search: 359/487, 359/490, 359/491, 359/492, 359/494, 359/495, 359/496, 359/497, 359/498, 359/499, 359/502, 359/583, 359/589, 359/634, 353/20, 353/30
• US Class Current: 359/487.05
• CPC Class Codes: G02B 27/1026 for use with reflective spatial light modulators
• CPC Class Codes: G02B 27/142 Coating structures, e.g. thin films multilayers
• CPC Class Codes: G02B 27/145 having sequential partially reflecting surfaces
• CPC Class Codes: G02B 27/149 using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes
• CPC Class Codes: G02B 5/285 comprising deposited thin solid films G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361

Abstract

A dichroic mirror for reflecting a beam of a given color includes a substrate and a multilayered film formed on the substrate. The multilayered film is constituted by a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer sequentially from the beam incident side. The first dichroic reflecting layer has a smaller reflection range of one of two orthogonal polarized components of the beam than the other of the two orthogonal polarized components. The intermediate layer rotates a polarization plane of at least part of a beam of the one component of the beam passing through the first dichroic reflecting layer, and the second dichroic reflecting layer reflects the at least part of the beam whose polarization plane is rotated by the intermediate layer. A projector having the dichroic mirror is also disclosed.

Claims

1. A dichroic mirror for reflecting a red beam, comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film being constituted by a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of the red beam, said first dichroic reflecting layer having a smaller reflection range of a P-polarized component of the beam than that of an S-polarized component thereof, said intermediate layer rotating, through substantially 90°

, at least part of a beam of the P-polarized component of the beam passing through said first dichroic reflecting layer, said second dichroic reflecting layer having short-wavelength characteristics of the reflection range of the S-polarized component of the red beam to be almost equal to short-wavelength characteristics of the reflection range of the S-polarized component in said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

2. A mirror according to claim 1, wherein said intermediate layer comprises a first λ

/2 plate, where λ

is a wavelength of the at least part of the beam; and

said mirror further comprises a second λ

/2 plate formed at a side opposite to said intermediate layer through said second dichroic reflecting layer, said first λ

/2 plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second λ

/2 plate.

3. A mirror according to claim 1, wherein said substrate comprises parallel plates.

4. A mirror according to claim 3, wherein said parallel plates comprise a pair of plates which sandwich said multilayered film.

5. A mirror according to claim 1, wherein said substrate comprises a pair of prisms which sandwich said multilayered film.

6. A dichroic mirror according to claim 1, wherein one of said first and second dichroic reflecting layers is exposed to an air layer.

7. A dichroic mirror for reflecting a blue beam, comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film being constituted by a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of the blue beam, said first dichroic reflecting layer having a smaller reflection range of a P-polarized component of the beam than that of an S-polarized component thereof, said intermediate layer rotating, through substantially 90°

, at least part of a beam of the P-polarized component of the beam passing through said first dichroic reflecting layer, said second dichroic reflecting layer having long-wavelength characteristics of the reflection range of the S-polarized component of the blue beam to be almost equal to long-wavelength characteristics of the reflection range of the S-polarized component in said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

8. A mirror according to claim 7, wherein said intermediate layer comprises a first λ

/2 plate, where λ

is a wavelength of the at least part of the beam; and

said mirror further comprises a second λ

/2 plate formed at a side opposite to said intermediate layer through said second dichroic reflecting layer, said first λ

/2 plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second λ

/2 plate.

9. A mirror according to claim 7, wherein said substrate comprises parallel plates.

10. A mirror according to claim 9, wherein said parallel plates comprise a pair of plates which sandwich said multilayered film.

11. A mirror according to claim 7, wherein said substrate comprises a pair of prisms which sandwich said multilayered film.

12. A dichroic mirror according to claim 7, wherein one of said first and second dichroic reflecting layers is exposed to an air layer.

13. A dichroic mirror for reflecting a green beam, comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film being constituted by a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of the green beam, said first dichroic reflecting layer having a smaller reflection range of a P-polarized component of the beam than that of an S-polarized component thereof, said intermediate layer rotating, through substantially 90°

, at least part of a beam of the P-polarized component of the beam passing through said first dichroic reflecting layer, said second dichroic reflecting layer having long- and short-wavelength characteristics of the reflection range of the S-polarized component of the green beam to be almost equal to long- and short-wavelength characteristics of the reflection range of the S-polarized component in said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

14. A mirror according to claim 13, wherein said intermediate layer comprises a first λ

/2 plate, where λ

is a wavelength of the at least part of the beam; and

said mirror further comprises a second λ

/2 plate formed at a side opposite to said intermediate layer through said second dichroic reflecting layer, said first λ

/2 plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second λ

/2 plate.

15. A mirror according to claim 13, wherein said substrate comprises parallel plates.

16. A mirror according to claim 15, wherein said parallel plates comprise a pair of plates which sandwich said multilayered film.

17. A mirror according to claim 13, wherein said substrate comprises a pair of prisms which sandwich said multilayered film.

18. A dichroic mirror according to claim 13, wherein one of said first and second dichroic reflecting layers is exposed to an air layer.

19. An optical apparatus having a color separation system, said color separation system receiving first and second beams having different colors, said system comprising a dichroic mirror for reflecting the first beam and transmitting the second beam to separate the first beam from the second beam, said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of each of the first and second beams, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than that of the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

20. An apparatus according to claim 19, wherein said second dichroic reflecting layer has characteristics of at least one end of a long- and short-wavelength sides of the reflection range for the other component of the beam similar to those of the reflection range of the other component in said first dichroic reflecting layer.

21. An apparatus according to claim 19, wherein said intermediate layer comprises a halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

.

22. An apparatus according to claim 19, wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

; and

said mirror further comprises a second halfwave plate formed on a side opposite to said intermediate layer through said second dichroic reflecting layer, said first halfwave plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second halfwave plate.

23. An optical apparatus having a color synthesis system, said color synthesis system receiving first and second beams having different colors, said system comprising a dichroic mirror for reflecting the first beam and transmitting the second beam to separate the first beam from the second beam, said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of each of the first and second beams, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than that of the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

24. An apparatus according to claim 23, wherein said intermediate layer comprises a halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

.

25. An apparatus according to claim 23, wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

; and

said mirror further comprises a second halfwave plate formed on a side opposite to said intermediate layer through said second dichroic reflecting layer, said first halfwave plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second halfwave plate.

26. A projector comprising:

radiation beam supply means for supplying a radiation beam including first and second beams having different colors;

a color separation system for separating the radiation beam into the first and second beams, said color separation system having a dichroic mirror, said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of each beam to reflect the first beam and transmit the second beam so as to separate the first beam from the second beam, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than that of the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer;

means for modulating the first beam from said color separation system and generating a first image;

means for modulating the second beam from said color separation system and generating a second image; and

means for projecting the first and second images.

27. A projector according to claim 26, wherein said intermediate layer comprises a halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

.

28. A projector according to claim 26, wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

; and

said mirror further comprises a second halfwave plate formed on a side opposite to said intermediate layer through said second dichroic reflecting layer, said first halfwave plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second halfwave plate.

29. A projector comprising:

supply means for supplying first and second beams having different colors;

first beam generating means for modulating the first beam from said supply means and generating a beam representing a first image;

second beam generating means for modulating the second beam from said supply means and generating a beam representing the second image;

a color synthesis system for synthesizing the beams representing the first and second images, said system having a dichroic mirror, and said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of the first beam to reflect the beam representing the first image and transmit the beam representing the second image to synthesize the beam representing the first image with the beam representing the second image, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than that of the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflects the at least part of the beam whose polarization plane is rotated by said intermediate layer; and

means for projecting the first and second images by using the beams representing the first and second images from said color synthesis system.

30. A projector according to claim 29, wherein said intermediate layer comprises a halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

.

31. A projector according to claim 29, wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

; and

said mirror further comprises a second halfwave plate formed on a side opposite to said intermediate layer through said second dichroic reflecting layer, said first halfwave plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second halfwave plate.

32. A projector according to claim 29, wherein said supply means includes:

radiation beam supply means for supplying a radiation beam including first and second beams having different colors; and

a color separation system for separating the radiation beam into the first and second beams, said color separation system having a dichroic mirror, said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the incident side of each beam to reflect the first beam and transmit the second beam so as to separate the first beam from the second beam, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than that of the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said intermediate layer.

33. A projector according to claim 32, wherein said color separation system is used as said color synthesis system.

34. A projector comprising:

radiation beam supply means for supplying a radiation beam including first and second beams having different colors;

a first image generator for reflecting and modulating the first beam and generating a first image;

a second image generator for reflecting and modulating the second beam and generating a second image;

an optical system for separating the radiation beam into the first and second beams and directing the first and second beams toward said first and second image generators, and for synthesizing the first and second beams reflected and modulated by said first and second image generators, said system having a dichroic mirror, and said mirror having a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the side of said supply means to reflect the first beam and transmit the second beam, said first dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the first beam than the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the first beam passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflects the at least part of the beam whose polarization plane is rotated by said intermediate layer; and

means for receiving through said optical system the first and second beams reflected and modulated by said first and second image generators and projecting the first and second images by using the first and second beams.

35. A projector according to claim 34, wherein said intermediate layer comprises a halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

.

36. A projector according to claim 34, wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the at least part of the beam through 90°

; and

said projector further comprises a second halfwave plate formed on a side opposite to said intermediate layer through said second dichroic reflecting layer, said first halfwave plate having a high-index axis having a direction substantially the same as that of a low-index axis of said second halfwave plate.

37. A projector according to claim 34, wherein said optical system comprises a crossed dichroic prism having said mirror.

38. A projector according to claim 34, wherein

the second beam includes third and fourth beams having colors different from each other and from that of the first beam;

said second image generator comprises a first optical modulator for reflecting and modulating the third beam and forming a third image, and a second optical modulator for reflecting and modulating the fourth beam and forming a fourth image; and

said optical means comprises a second dichroic mirror, said second dichroic mirror having a third dichroic reflecting layer, a second intermediate layer, and a fourth dichroic reflecting layer in the order named from the side of said supply means to reflect the third beam and transmit the fourth beam, said third dichroic reflecting layer having a smaller reflection range of one of two orthogonal polarized components of the third beam than that of the other of the two orthogonal polarized components, said second intermediate layer rotating a polarization plane of at least part of a remaining beam of the one component of the third beam passing through said third dichroic reflecting layer, and said fourth dichroic reflecting layer reflecting the at least part of the beam whose polarization plane is rotated by said second intermediate layer.

39. A projector according to claim 34, wherein said first and second image generators partially rotate the polarization planes of the first and second beams to generate the first and second images.

40. A projector according to claim 39, wherein said supply means comprises a radiation source for generating the radiation beam, and a polarizing beam splitter for directing the radiation beam from said radiation source toward said optical system and directing the first and second beams reflected and modulated by said first and second image generators toward said image projecting means through said optical system.

41. A dichroic mirror for reflecting a beam of a given color, said beam having first and second polarized components, and a reflection range for the first polarized component is smaller than that for the second polarized component, said dichroic mirror comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film being constituted by a first dichroic reflecting layer, an intermediate layer, and a second dichroic reflecting layer in the order named from the beam incident side, said intermediate layer rotating a polarization plane of a part of the first polarized component, passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the part of the first polarized component whose polarization plane is rotated by said intermediate layer,

wherein said intermediate layer comprises a first halfwave plate for rotating the polarization plane of the part of the first polarized component through 90°

; and

said mirror further comprises a second halfwave plate formed on a side opposite to said intermediate layer by way of said second dichroic reflecting layer, said first halfwave plate having high-index axis having substantially the same direction as that of a low-index axis of said second halfwave plate.

42. A dichroic mirror for reflecting a beam of a color, wherein a reflection range for a first polarized component of said color is smaller than that for a second polarized component of said color, said dichroic mirror comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film including a first dichroic reflecting layer, a first halfwave plate, a second dichroic reflecting layer and a second halfwave plate in the order named from the beam incident side, said first halfwave plate rotating a polarization plane of a part of the first polarized component, passing through said first dichroic reflecting layer, and said second dichroic reflecting layer reflecting the part of the first polarized component whose polarization plane is rotated by said first halfwave plate,

wherein said second halfwave plate has a low index axis having substantially the same direction as that of a high-index axis of said first halfwave plate.

43. A dichroic mirror for reflecting a beam of color, wherein a reflection range for a first polarized component of said color is smaller than that for a second polarized component of said color, said dichroic mirror comprising:

a substrate; and

a multilayered film formed on said substrate, said multilayered film including a first dichroic reflecting layer, a first halfwave plate, a second dichroic reflecting layer and a second halfwave plate in the order named from the beam incident side, said first halfwave plate rotating a polarization plane of a part of the first polarized component, passing through said first dichroic reflecting layer, said second dichroic reflecting layer reflecting the part of the first polarized component whose polarization plane is rotated by said first halfwave plate, and said second halfwave plate rotating a polarization plane of a beam of other color which is passed through said first dichroic reflecting layer, said first halfwave plate and said second dichroic reflecting layer.

44. A dichroic mirror for reflecting a beam of a given color, including:

a substrate; and

a multilayered film formed on said substrate, said multilayered film having a first dichroic reflecting layer, an intermediate layer, a second dichroic reflecting layer and an auxiliary layer in the order named from the beam incident side, said first dichroic reflecting layer having a smaller reflection range for one of two orthogonal polarized components of the beam than a reflection range for the other of the two orthogonal polarized components, said intermediate layer rotating a polarization plane of at least part of a beam of the one component of the beam passing through said first dichroic reflecting layer, said second dichroic reflecting layer reflecting the at least part of the beam whose polarization plane has been rotated by said intermediate layer, and said auxiliary layer having a low refractive index axis parallel to a high refractive index axis of said intermediate layer.