Method and device for verifying that a given insulative element conforms to a reference insulative element

• US 5,650,620 A
• Filed: 03/28/1996
• Issued: 07/22/1997
• Est. Priority Date: 03/30/1995
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission), Nexans France (Nokia Corporation)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission), Alcatel SA (Nokia Corporation)
• Inventors: Janah, Hakim, Acroute, Daniel, Le Gressus, Claude, Faure, Claude, Mirebeau, Pierre
• Primary Examiner(s): Berman, Jack I.
• Assistant Examiner(s): NGUYEN, KIET TUAN
• Application Number:
  US08/623,149
• Time in Patent Office: 481 Days
• Field of Search: 250/310, 250/306, 250/307, 250/397, 250/398, 250/399, 250/400, 250/492.1, 250/492.2, 250/492.3, 324/751, 324/558, 324/71.1, 324/96, 324/158.1
• US Class Current: 250/310
• CPC Class Codes: B07C 5/34 Sorting according to other particular properties material testing per se G01N; quality control G07C3/14
• CPC Class Codes: G01N 23/2251 using incident electron beams, e.g. scanning electron microscopy [SEM]

Abstract

A method of verifying that a given insulative element conforms with a reference insulative element, comprising the steps of: emitting a primary beam of electrons impinging on the given insulative element, receiving a secondary beam of electrons returned by the given insulative element in response to emission of the primary beam of electrons, and comparing a curve as a function of time of the electrical current of the secondary beam received with a curve as a function of time of a reference electrical current to establish whether or not the given insulative element conforms to a reference insulative element.

Claims

1. Method of verifying that a given insulative element conforms with a reference insulative element, comprising the steps of:

emitting a primary beam of electrons impinging on said given insulative element,

receiving a secondary beam of electrons returned by said given insulative element in response to emission of said primary beam of electrons, and

comparing a curve as a function of time of the electrical current of said secondary beam received with a curve as a function of time of a reference electrical current to establish whether or not said given insulative element conforms to a reference insulative element.

2. Device for implementing the method according to claim 1, comprising:

means for emitting a primary beam of electrons impinging on said given insulative element,

means for receiving a secondary beam of electrons returned by said given insulative element in response to emission of said primary beam of electrons, and

means for comparing a curve as a function of time of the electrical current of said secondary beam received and a curve as a function of time of a reference electrical current held in memory.

3. Method of sorting insulative material granules, comprising the steps of:

emitting a primary beam of electrons impinging on each of said granules,

receiving a secondary beam of electrons returned by each of said granules in response to emission of said primary beam of electrons,

comparing a curve as a function of time of the electrical current of said secondary beam received with a curve as a function of time of a reference electrical current associated with a reference granule, and

ejecting granules selectively in accordance with a negative result of comparing said curve as a function of time of said electrical current of said secondary beam received and said curve as a function of time of said reference electrical current associated with said reference granule.

4. Method according to claim 3 wherein said curve as a function of time of said reference electrical current is a template curve established from a curve as a function of time of said electrical current of said secondary beam of electrons returned by said reference granule in response to emission of said primary beam of electrons impinging on said reference granule and wherein said comparison step consists in verifying that said curve as a function of time of said electrical current of said secondary beam received is inscribed in said template curve.

5. Method according to claim 3 wherein said primary beam of electrons has an electrical current as a function of time identical, ignoring a proportionality factor, to an electrical voltage as a function of time to be simulated on said granule.

6. Method according to claim 3 wherein said step of emitting a primary beam of electrons impinging on said granules is preceded by a step of evacuating a chamber containing said granules.

7. Method according to claim 3 wherein said granules to be sorted move continuously and said emission of a primary beam of electrons impinging on each of said granules is activated in response to detection by shape recognition means of the passage of each of said granules.

8. Method according to claim 3 wherein said granules are washed beforehand in order to remove surface contamination.