Method and apparatus for cleaning substrates in preparation for deposition of thin film coatings

• US 5,651,723 A
• Filed: 04/13/1994
• Issued: 07/29/1997
• Est. Priority Date: 04/13/1994
• Status: Expired due to Fees

• Current Assignee: Viratec Thin Films, Inc. (Apogee Enterprises Incorporated)
• Original Assignee: Viratec Thin Films, Inc. (Apogee Enterprises Incorporated)
• Inventors: Shogren, David A., Hoffman, Jeffrey J., Kurman, Eric W., Bjornard, Erik J.
• Primary Examiner(s): Eley, Timothy V.
• Application Number:
  US08/227,156
• Time in Patent Office: 1,203 Days
• Field of Search: 451/28, 451/36, 451/38, 451/40, 451/53, 451/54, 451/57, 451/75, 451/80, 451/81, 451/87, 451/88, 451/89, 451/99, 451/91, 451/39, 134/22.18
• US Class Current: 451/39
• CPC Class Codes: B24C 1/003 using material which dissolves or changes phase after the treatment, e.g. ice, CO2
• CPC Class Codes: B24C 3/08 essentially adapted for abrasive blasting of travelling stock or travelling workpieces
• CPC Class Codes: B24C 3/322 for electrical components
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

A method and apparatus for cleaning a substrate in preparation for thin film coating. The invention involves cleaning the substrate in a cleaning chamber under controlled conditions by a blast of carbon dioxide pellets suspended in and transported by a compressed gas medium.

Claims

1. A method of cleaning a substrate in preparation for thin film coating comprising the steps of:

providing a cleaning chamber having air inlet means and air exhaust means and introducing air into said cleaning chamber through said air inlet means and exhausting air form said cleaning chamber through said air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels, wherein said cleaning chamber includes a substrate entry and a substrate exit

maintaining air pressure within said cleaning chamber at a positive pressure relative to atmospheric pressure;

providing an entry chamber adjacent to said substrate entry in which said entry chamber includes an air inlet means and air exhaust means for maintaining air pressure and flow within said entry chamber at desired levels;

transporting a substrate to be cleaned to a cleaning position within said cleaning chamber; and

exposing said substrate to a blast of carbon dioxide pellets suspended in and transported by a compressed gas medium, said blast of carbon dioxide pellets being effective to clean said substrate in preparation for thin film coating.

2. The method of claim 1 including maintaining air pressure within said entry chamber at a positive pressure relative to atmospheric pressure and maintaining air pressure within said cleaning chamber at a positive pressure relative to said entry chamber.

3. The method of claim 1 including providing an exit chamber adjacent to said substrate exit in which said exit chamber includes air inlet means and air exhaust means for maintaining air pressure and flow within said exit chamber at desired levels.

4. The method of claim 3 including maintaining air pressure within said entry chamber at a positive pressure relative to atmospheric pressure, maintaining air pressure within said cleaning chamber at a positive pressure relative to said entry chamber and maintaining air pressure within said exit chamber at a positive pressure relative to said cleaning chamber.

5. The method of claim 4 including providing closure means between said entry and cleaning chambers and between said cleaning and exit chambers for selectively isolating said entry, cleaning and exit chambers from one another and facilitating the transport of substrates from said entry chamber to said cleaning chamber and from said cleaning chamber to said exit chamber.

6. A method of cleaning a substrate in preparation for thin film coating comprising the steps of:

providing a cleaning chamber having air inlet means and air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels, wherein said cleaning chamber includes a substrate entry and a substrate exit;

providing an air exit chamber adjacent to said substrate exit in which said exit chamber includes an air inlet means and air exhaust means for maintaining air pressure and flow within said exit chamber at desired levels;

transporting a substrate to be cleaned to a cleaning position within said cleaning chamber;

exposing said substrate to a blast of carbon dioxide pellets suspended in and transported by a compressed gas medium, said blast of carbon dioxide pellets being effective to clean said substrate in preparation for thin film coating; and

maintaining air pressure within said cleaning chamber at a positive pressure relative to atmospheric pressure.

7. The method of claim 6 including maintaining air pressure within said exit chamber at a positive pressure relative to atmospheric pressure and relative to said cleaning chamber.

8. A method of cleaning a substrate in preparation for thin film coating comprising the steps of:

providing a cleaning chamber having air inlet means and air exhaust means wherein said air inlet means is a clean air inlet and is provided near the top of said cleaning chamber and introducing air into said cleaning chamber through said air inlet means and exhausting air from said cleaning chamber through said air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels;

transporting a substrate to be cleaned to a cleaning position within said cleaning chamber; and

exposing said substrate to a blast carbon dioxide pellets suspended in and transported by a compressed gas medium, said blast of carbon dioxide pellets being effective to clean said substrate in preparation for thin film coating.

9. The method of claim 8 wherein said air exhaust includes an ionizing vacuum pickup.

10. The method of claim 9 wherein said air exhaust further includes air exhaust plenum provided near the bottom of said cleaning chamber.

11. An apparatus for cleaning a substrate in preparation for thin film coating comprising:

a cleaning chamber having a substrate entry and a substrate exit;

transport means for transporting said substrate through said substrate entry and into said cleaning chamber and for transporting said substrate out of said cleaning chamber through said substrate exit;

air inlet means and air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels, wherein said air inlet means includes a clean air inlet near the top of said cleaning chamber and wherein said air exhaust means includes an ionizing vacuum pickup; and

carbon dioxide particle dispensing means for dispensing carbon dioxide pellets into cleaning engagement with said substrate within said cleaning chamber.

12. The apparatus of claim 11 wherein said air exhaust means includes an exhaust plenum near the bottom of said cleaning chamber.

13. An apparatus for cleaning a substrate in preparation for thin film coating comprising:

a cleaning chamber having a substrate entry and a substrate exit, said substrate exit including a substrate exit separate from said substrate entry and an entry chamber adjacent to said substrate entry;

transport means for transporting said substrate through said substrate entry and into said cleaning chamber and for transporting said substrate out of said cleaning chamber through said substrate exit;

air inlet means and air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels; and

carbon dioxide particle dispensing means for dispensing carbon dioxide pellets into cleaning engagement with said substrate within said cleaning chamber.

14. The apparatus of claim 13 including closure means between said cleaning and entry chambers facilitating the transport of said substrate from said entry chamber into said cleaning chamber.

15. The apparatus of claim 14 including an exit chamber adjacent to said substrate exit.

16. The apparatus of claim 13 including entry chamber air inlet means and air exhaust means for maintaining air pressure and air flow within said entry chamber at desired levels.

17. An apparatus for cleaning a substrate in preparation for thin film coating comprising:

a cleaning chamber having a substrate entry and a substrate exit, said substrate exit including a substrate exit separate from said substrate entry and an exit chamber adjacent to said substrate exit;

transport means for transporting said substrate through said substrate entry and into said cleaning chamber and for transporting said substrate out of said cleaning chamber through said substrate exit;

air inlet means and air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels; and

carbon dioxide particle dispensing means for dispensing carbon dioxide pellets into cleaning engagement with said substrate within said cleaning chamber.

18. The apparatus of claim 17 including closure means between said cleaning and exit chambers facilitating the transport of said substrate from said cleaning chamber into said exit chamber.

19. The apparatus of claim 17 including exit chamber air inlet means and air exhaust means for maintaining air pressure and air flow within said exit chamber at desired levels.

20. The apparatus of claim 17 including a thin film coating line adjacent to said exit chamber.

21. The apparatus of claim 20 including a closure means between said exit chamber and said coating line facilitating the transport of said substrate from said exit chamber into said coating line.

22. An apparatus for cleaning a substrate in preparation for thin film coating comprising:

a cleaning chamber having a substrate entry and a substrate exit separate from said substrate entry;

transport means for transporting said substrate through said substrate entry and into said cleaning chamber and for transporting said substrate out of said cleaning chamber through said substrate exit;

air inlet means and air exhaust means for maintaining air pressure and flow within said cleaning chamber at desired levels; and

carbon dioxide particles dispensing means for dispensing carbon dioxide pellets into cleaning engagement with said substrate within said cleaning chamber.